5/24/2010	12:00:03 AM	Main Vac valve closed
5/24/2010	12:00:05 AM	Bypass valve closed
5/24/2010	12:00:23 AM	Bypass valve opened
5/24/2010	12:00:24 AM	Main Vac valve opened
5/24/2010	12:00:34 AM	Recipe started at 12:00 AM
5/24/2010	12:00:34 AM	Helium valve closed
5/24/2010	12:00:34 AM	BCl3 valve closed
5/24/2010	12:00:34 AM	PH3 valve closed
5/24/2010	12:00:34 AM	SiCl4 pre valve closed
5/24/2010	12:00:34 AM	SiCl4 post valve closed
5/24/2010	12:00:34 AM	Main Vac valve closed
5/24/2010	12:00:34 AM	Bypass valve closed
5/24/2010	12:00:34 AM	Bubbler valve closed
5/24/2010	12:00:34 AM	H2 valve opened
5/24/2010	12:00:34 AM	Helium MFC set to  0.000000
5/24/2010	12:00:34 AM	H2 MFC set to  500.000000
5/24/2010	12:00:34 AM	BCl3 MFC set to  0.000000
5/24/2010	12:00:34 AM	SiCl4 MFC set to  0.000000
5/24/2010	12:00:34 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:00:34 AM	Tube furnace set to 0
5/24/2010	12:01:54 AM	Helium valve closed
5/24/2010	12:01:54 AM	BCl3 valve closed
5/24/2010	12:01:54 AM	PH3 valve closed
5/24/2010	12:01:54 AM	SiCl4 pre valve closed
5/24/2010	12:01:54 AM	SiCl4 post valve closed
5/24/2010	12:01:54 AM	Main Vac valve closed
5/24/2010	12:01:54 AM	Bypass valve closed
5/24/2010	12:01:54 AM	H2 valve opened
5/24/2010	12:01:54 AM	Bubbler valve opened
5/24/2010	12:01:54 AM	Helium MFC set to  0.000000
5/24/2010	12:01:54 AM	H2 MFC set to  400.000000
5/24/2010	12:01:54 AM	BCl3 MFC set to  0.000000
5/24/2010	12:01:54 AM	SiCl4 MFC set to  0.000000
5/24/2010	12:01:54 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:01:54 AM	Tube furnace set to 1001
5/24/2010	12:25:14 AM	Helium valve closed
5/24/2010	12:25:14 AM	PH3 valve closed
5/24/2010	12:25:14 AM	Main Vac valve closed
5/24/2010	12:25:14 AM	Bypass valve closed
5/24/2010	12:25:14 AM	H2 valve opened
5/24/2010	12:25:14 AM	BCl3 valve opened
5/24/2010	12:25:14 AM	SiCl4 pre valve opened
5/24/2010	12:25:14 AM	SiCl4 post valve opened
5/24/2010	12:25:14 AM	Bubbler valve opened
5/24/2010	12:25:14 AM	Helium MFC set to  0.000000
5/24/2010	12:25:14 AM	H2 MFC set to  500.000000
5/24/2010	12:25:14 AM	BCl3 MFC set to  35.000000
5/24/2010	12:25:14 AM	SiCl4 MFC set to  500.000000
5/24/2010	12:25:14 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:25:14 AM	Tube furnace set to 1000
5/24/2010	12:30:56 AM	H2 valve closed
5/24/2010	12:30:56 AM	BCl3 valve closed
5/24/2010	12:30:56 AM	PH3 valve closed
5/24/2010	12:30:56 AM	SiCl4 pre valve closed
5/24/2010	12:30:56 AM	SiCl4 post valve closed
5/24/2010	12:30:56 AM	Main Vac valve closed
5/24/2010	12:30:56 AM	Bypass valve closed
5/24/2010	12:30:56 AM	Helium valve opened
5/24/2010	12:30:56 AM	Bubbler valve opened
5/24/2010	12:30:56 AM	Helium MFC set to  400.000000
5/24/2010	12:30:56 AM	H2 MFC set to  0.000000
5/24/2010	12:30:56 AM	BCl3 MFC set to  0.000000
5/24/2010	12:30:56 AM	SiCl4 MFC set to  0.000000
5/24/2010	12:30:56 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:30:56 AM	Tube furnace set to 0
5/24/2010	12:35:09 AM	Helium valve closed
5/24/2010	12:35:09 AM	H2 valve closed
5/24/2010	12:35:09 AM	BCl3 valve closed
5/24/2010	12:35:09 AM	PH3 valve closed
5/24/2010	12:35:09 AM	SiCl4 pre valve closed
5/24/2010	12:35:09 AM	SiCl4 post valve closed
5/24/2010	12:35:09 AM	Main Vac valve closed
5/24/2010	12:35:09 AM	Bypass valve closed
5/24/2010	12:35:09 AM	Bubbler valve closed
5/24/2010	12:35:09 AM	Helium MFC set to  0.000000
5/24/2010	12:35:09 AM	H2 MFC set to  0.000000
5/24/2010	12:35:09 AM	BCl3 MFC set to  0.000000
5/24/2010	12:35:09 AM	SiCl4 MFC set to  0.000000
5/24/2010	12:35:09 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:35:09 AM	Tube furnace set to 0
5/24/2010	12:35:09 AM	Run finished at 12:35 AM
5/24/2010	12:36:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	12:36:45 AM	Recipe started at 12:36 AM
5/24/2010	12:36:45 AM	Helium valve closed
5/24/2010	12:36:45 AM	H2 valve closed
5/24/2010	12:36:45 AM	BCl3 valve closed
5/24/2010	12:36:45 AM	PH3 valve closed
5/24/2010	12:36:45 AM	SiCl4 pre valve closed
5/24/2010	12:36:45 AM	SiCl4 post valve closed
5/24/2010	12:36:45 AM	Main Vac valve closed
5/24/2010	12:36:45 AM	Bubbler valve closed
5/24/2010	12:36:45 AM	Bypass valve opened
5/24/2010	12:36:45 AM	Helium MFC set to  0.000000
5/24/2010	12:36:45 AM	H2 MFC set to  0.000000
5/24/2010	12:36:45 AM	BCl3 MFC set to  0.000000
5/24/2010	12:36:45 AM	SiCl4 MFC set to  0.000000
5/24/2010	12:36:45 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:36:45 AM	Tube furnace set to 0
5/24/2010	12:37:24 AM	Helium valve closed
5/24/2010	12:37:24 AM	H2 valve closed
5/24/2010	12:37:24 AM	BCl3 valve closed
5/24/2010	12:37:24 AM	PH3 valve closed
5/24/2010	12:37:24 AM	SiCl4 pre valve closed
5/24/2010	12:37:24 AM	SiCl4 post valve closed
5/24/2010	12:37:24 AM	Bubbler valve closed
5/24/2010	12:37:24 AM	Main Vac valve opened
5/24/2010	12:37:24 AM	Bypass valve opened
5/24/2010	12:37:24 AM	Helium MFC set to  0.000000
5/24/2010	12:37:24 AM	H2 MFC set to  0.000000
5/24/2010	12:37:24 AM	BCl3 MFC set to  0.000000
5/24/2010	12:37:24 AM	SiCl4 MFC set to  0.000000
5/24/2010	12:37:24 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:37:25 AM	Tube furnace set to 0
5/24/2010	12:37:25 AM	Run finished at 12:37 AM
5/24/2010	12:37:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	8:37:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	8:37:30 AM	Recipe started at 8:37 AM
5/24/2010	8:37:30 AM	H2 valve closed
5/24/2010	8:37:30 AM	BCl3 valve closed
5/24/2010	8:37:30 AM	PH3 valve closed
5/24/2010	8:37:30 AM	SiCl4 pre valve closed
5/24/2010	8:37:30 AM	SiCl4 post valve closed
5/24/2010	8:37:30 AM	Main Vac valve closed
5/24/2010	8:37:30 AM	Bypass valve closed
5/24/2010	8:37:30 AM	Bubbler valve closed
5/24/2010	8:37:30 AM	Helium valve opened
5/24/2010	8:37:30 AM	Helium MFC set to  500.000000
5/24/2010	8:37:30 AM	H2 MFC set to  0.000000
5/24/2010	8:37:30 AM	BCl3 MFC set to  0.000000
5/24/2010	8:37:30 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:37:30 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:37:30 AM	Tube furnace set to 0
5/24/2010	8:38:51 AM	Helium valve closed
5/24/2010	8:38:51 AM	H2 valve closed
5/24/2010	8:38:51 AM	BCl3 valve closed
5/24/2010	8:38:51 AM	PH3 valve closed
5/24/2010	8:38:51 AM	SiCl4 pre valve closed
5/24/2010	8:38:51 AM	SiCl4 post valve closed
5/24/2010	8:38:51 AM	Main Vac valve closed
5/24/2010	8:38:51 AM	Bypass valve closed
5/24/2010	8:38:51 AM	Bubbler valve closed
5/24/2010	8:38:51 AM	Helium MFC set to  0.000000
5/24/2010	8:38:51 AM	H2 MFC set to  0.000000
5/24/2010	8:38:51 AM	BCl3 MFC set to  0.000000
5/24/2010	8:38:51 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:38:51 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:38:51 AM	Tube furnace set to 0
5/24/2010	8:38:52 AM	Run finished at 8:38 AM
5/24/2010	8:38:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	8:47:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	8:47:03 AM	Recipe started at 8:47 AM
5/24/2010	8:47:03 AM	Helium valve closed
5/24/2010	8:47:03 AM	H2 valve closed
5/24/2010	8:47:03 AM	BCl3 valve closed
5/24/2010	8:47:03 AM	PH3 valve closed
5/24/2010	8:47:03 AM	SiCl4 pre valve closed
5/24/2010	8:47:03 AM	SiCl4 post valve closed
5/24/2010	8:47:03 AM	Main Vac valve closed
5/24/2010	8:47:03 AM	Bubbler valve closed
5/24/2010	8:47:03 AM	Bypass valve opened
5/24/2010	8:47:03 AM	Helium MFC set to  0.000000
5/24/2010	8:47:03 AM	H2 MFC set to  0.000000
5/24/2010	8:47:03 AM	BCl3 MFC set to  0.000000
5/24/2010	8:47:03 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:47:03 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:47:03 AM	Tube furnace set to 0
5/24/2010	8:47:50 AM	Helium valve closed
5/24/2010	8:47:50 AM	H2 valve closed
5/24/2010	8:47:50 AM	BCl3 valve closed
5/24/2010	8:47:50 AM	PH3 valve closed
5/24/2010	8:47:50 AM	SiCl4 pre valve closed
5/24/2010	8:47:50 AM	SiCl4 post valve closed
5/24/2010	8:47:50 AM	Bubbler valve closed
5/24/2010	8:47:50 AM	Main Vac valve opened
5/24/2010	8:47:50 AM	Bypass valve opened
5/24/2010	8:47:50 AM	Helium MFC set to  0.000000
5/24/2010	8:47:50 AM	H2 MFC set to  0.000000
5/24/2010	8:47:50 AM	BCl3 MFC set to  0.000000
5/24/2010	8:47:50 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:47:50 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:47:50 AM	Tube furnace set to 0
5/24/2010	8:47:50 AM	Run finished at 8:47 AM
5/24/2010	8:47:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	8:48:02 AM	Tube furnace set to 80
5/24/2010	8:48:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/24/2010	8:48:28 AM	Recipe started at 8:48 AM
5/24/2010	8:48:28 AM	H2 valve closed
5/24/2010	8:48:28 AM	BCl3 valve closed
5/24/2010	8:48:28 AM	PH3 valve closed
5/24/2010	8:48:28 AM	SiCl4 pre valve closed
5/24/2010	8:48:28 AM	SiCl4 post valve closed
5/24/2010	8:48:28 AM	Main Vac valve closed
5/24/2010	8:48:28 AM	Bypass valve closed
5/24/2010	8:48:28 AM	Bubbler valve closed
5/24/2010	8:48:28 AM	Helium valve opened
5/24/2010	8:48:28 AM	Helium MFC set to  500.000000
5/24/2010	8:48:28 AM	H2 MFC set to  0.000000
5/24/2010	8:48:28 AM	BCl3 MFC set to  0.000000
5/24/2010	8:48:28 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:48:28 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:48:28 AM	Tube furnace set to 0
5/24/2010	8:49:51 AM	Helium valve closed
5/24/2010	8:49:51 AM	H2 valve closed
5/24/2010	8:49:51 AM	BCl3 valve closed
5/24/2010	8:49:51 AM	PH3 valve closed
5/24/2010	8:49:51 AM	SiCl4 pre valve closed
5/24/2010	8:49:51 AM	SiCl4 post valve closed
5/24/2010	8:49:51 AM	Main Vac valve closed
5/24/2010	8:49:51 AM	Bypass valve closed
5/24/2010	8:49:51 AM	Bubbler valve closed
5/24/2010	8:49:51 AM	Helium MFC set to  0.000000
5/24/2010	8:49:51 AM	H2 MFC set to  0.000000
5/24/2010	8:49:51 AM	BCl3 MFC set to  0.000000
5/24/2010	8:49:51 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:49:51 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:49:51 AM	Tube furnace set to 0
5/24/2010	8:50:06 AM	Helium valve closed
5/24/2010	8:50:06 AM	H2 valve closed
5/24/2010	8:50:06 AM	BCl3 valve closed
5/24/2010	8:50:06 AM	PH3 valve closed
5/24/2010	8:50:06 AM	SiCl4 pre valve closed
5/24/2010	8:50:06 AM	SiCl4 post valve closed
5/24/2010	8:50:06 AM	Main Vac valve closed
5/24/2010	8:50:06 AM	Bubbler valve closed
5/24/2010	8:50:06 AM	Bypass valve opened
5/24/2010	8:50:06 AM	Helium MFC set to  0.000000
5/24/2010	8:50:06 AM	H2 MFC set to  0.000000
5/24/2010	8:50:06 AM	BCl3 MFC set to  0.000000
5/24/2010	8:50:06 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:50:06 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:50:06 AM	Tube furnace set to 0
5/24/2010	8:50:39 AM	Helium valve closed
5/24/2010	8:50:39 AM	H2 valve closed
5/24/2010	8:50:39 AM	BCl3 valve closed
5/24/2010	8:50:39 AM	PH3 valve closed
5/24/2010	8:50:39 AM	SiCl4 pre valve closed
5/24/2010	8:50:39 AM	SiCl4 post valve closed
5/24/2010	8:50:39 AM	Bubbler valve closed
5/24/2010	8:50:39 AM	Main Vac valve opened
5/24/2010	8:50:39 AM	Bypass valve opened
5/24/2010	8:50:39 AM	Helium MFC set to  0.000000
5/24/2010	8:50:39 AM	H2 MFC set to  0.000000
5/24/2010	8:50:39 AM	BCl3 MFC set to  0.000000
5/24/2010	8:50:39 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:50:39 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:50:39 AM	Tube furnace set to 0
5/24/2010	8:51:55 AM	Run aborted at 8:51 AM
5/24/2010	8:51:55 AM	Helium valve closed
5/24/2010	8:51:55 AM	H2 valve closed
5/24/2010	8:51:55 AM	BCl3 valve closed
5/24/2010	8:51:55 AM	PH3 valve closed
5/24/2010	8:51:55 AM	SiCl4 pre valve closed
5/24/2010	8:51:55 AM	SiCl4 post valve closed
5/24/2010	8:51:55 AM	Bypass valve closed
5/24/2010	8:51:55 AM	Main Vac valve closed
5/24/2010	8:51:55 AM	Bubbler valve closed
5/24/2010	8:51:55 AM	Helium MFC set to  0.000000
5/24/2010	8:51:55 AM	H2 MFC set to  0.000000
5/24/2010	8:51:55 AM	BCl3 MFC set to  0.000000
5/24/2010	8:51:55 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:51:55 AM	Tube furnace set to 0
5/24/2010	8:51:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/24/2010	8:51:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	8:51:57 AM	Recipe started at 8:51 AM
5/24/2010	8:51:57 AM	Helium valve closed
5/24/2010	8:51:57 AM	H2 valve closed
5/24/2010	8:51:57 AM	BCl3 valve closed
5/24/2010	8:51:57 AM	PH3 valve closed
5/24/2010	8:51:57 AM	SiCl4 pre valve closed
5/24/2010	8:51:57 AM	SiCl4 post valve closed
5/24/2010	8:51:57 AM	Main Vac valve closed
5/24/2010	8:51:57 AM	Bubbler valve closed
5/24/2010	8:51:57 AM	Bypass valve opened
5/24/2010	8:51:57 AM	Helium MFC set to  0.000000
5/24/2010	8:51:57 AM	H2 MFC set to  0.000000
5/24/2010	8:51:57 AM	BCl3 MFC set to  0.000000
5/24/2010	8:51:57 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:51:57 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:51:58 AM	Tube furnace set to 0
5/24/2010	8:51:58 AM	Helium valve closed
5/24/2010	8:51:58 AM	H2 valve closed
5/24/2010	8:51:58 AM	BCl3 valve closed
5/24/2010	8:51:58 AM	PH3 valve closed
5/24/2010	8:51:58 AM	SiCl4 pre valve closed
5/24/2010	8:51:58 AM	SiCl4 post valve closed
5/24/2010	8:51:58 AM	Bubbler valve closed
5/24/2010	8:51:58 AM	Main Vac valve opened
5/24/2010	8:51:58 AM	Bypass valve opened
5/24/2010	8:51:58 AM	Helium MFC set to  0.000000
5/24/2010	8:51:58 AM	H2 MFC set to  0.000000
5/24/2010	8:51:58 AM	BCl3 MFC set to  0.000000
5/24/2010	8:51:58 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:51:58 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:51:58 AM	Tube furnace set to 0
5/24/2010	8:51:58 AM	Run finished at 8:51 AM
5/24/2010	8:51:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	8:56:11 AM	Recipe started at 8:56 AM
5/24/2010	8:56:11 AM	H2 valve closed
5/24/2010	8:56:11 AM	BCl3 valve closed
5/24/2010	8:56:11 AM	PH3 valve closed
5/24/2010	8:56:11 AM	SiCl4 pre valve closed
5/24/2010	8:56:11 AM	SiCl4 post valve closed
5/24/2010	8:56:11 AM	Main Vac valve closed
5/24/2010	8:56:11 AM	Bypass valve closed
5/24/2010	8:56:11 AM	Bubbler valve closed
5/24/2010	8:56:11 AM	Helium valve opened
5/24/2010	8:56:11 AM	Helium MFC set to  500.000000
5/24/2010	8:56:11 AM	H2 MFC set to  0.000000
5/24/2010	8:56:11 AM	BCl3 MFC set to  0.000000
5/24/2010	8:56:11 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:56:11 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:56:11 AM	Tube furnace set to 80
5/24/2010	8:56:55 AM	Helium valve closed
5/24/2010	8:56:55 AM	H2 valve closed
5/24/2010	8:56:55 AM	BCl3 valve closed
5/24/2010	8:56:55 AM	PH3 valve closed
5/24/2010	8:56:55 AM	SiCl4 pre valve closed
5/24/2010	8:56:55 AM	SiCl4 post valve closed
5/24/2010	8:56:55 AM	Main Vac valve closed
5/24/2010	8:56:55 AM	Bypass valve closed
5/24/2010	8:56:55 AM	Bubbler valve closed
5/24/2010	8:56:55 AM	Helium MFC set to  0.000000
5/24/2010	8:56:55 AM	H2 MFC set to  0.000000
5/24/2010	8:56:55 AM	BCl3 MFC set to  0.000000
5/24/2010	8:56:55 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:56:55 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:56:55 AM	Tube furnace set to 80
5/24/2010	8:57:10 AM	Helium valve closed
5/24/2010	8:57:10 AM	H2 valve closed
5/24/2010	8:57:10 AM	BCl3 valve closed
5/24/2010	8:57:10 AM	PH3 valve closed
5/24/2010	8:57:10 AM	SiCl4 pre valve closed
5/24/2010	8:57:10 AM	SiCl4 post valve closed
5/24/2010	8:57:10 AM	Main Vac valve closed
5/24/2010	8:57:10 AM	Bubbler valve closed
5/24/2010	8:57:10 AM	Bypass valve opened
5/24/2010	8:57:10 AM	Helium MFC set to  0.000000
5/24/2010	8:57:10 AM	H2 MFC set to  0.000000
5/24/2010	8:57:10 AM	BCl3 MFC set to  0.000000
5/24/2010	8:57:10 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:57:10 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:57:10 AM	Tube furnace set to 80
5/24/2010	8:57:38 AM	Helium valve closed
5/24/2010	8:57:38 AM	H2 valve closed
5/24/2010	8:57:38 AM	BCl3 valve closed
5/24/2010	8:57:38 AM	PH3 valve closed
5/24/2010	8:57:38 AM	SiCl4 pre valve closed
5/24/2010	8:57:38 AM	SiCl4 post valve closed
5/24/2010	8:57:38 AM	Bubbler valve closed
5/24/2010	8:57:38 AM	Main Vac valve opened
5/24/2010	8:57:38 AM	Bypass valve opened
5/24/2010	8:57:38 AM	Helium MFC set to  0.000000
5/24/2010	8:57:38 AM	H2 MFC set to  0.000000
5/24/2010	8:57:38 AM	BCl3 MFC set to  0.000000
5/24/2010	8:57:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	8:57:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	8:57:38 AM	Tube furnace set to 80
5/24/2010	9:00:38 AM	H2 valve closed
5/24/2010	9:00:38 AM	BCl3 valve closed
5/24/2010	9:00:38 AM	PH3 valve closed
5/24/2010	9:00:38 AM	SiCl4 pre valve closed
5/24/2010	9:00:38 AM	SiCl4 post valve closed
5/24/2010	9:00:38 AM	Main Vac valve closed
5/24/2010	9:00:38 AM	Bypass valve closed
5/24/2010	9:00:38 AM	Bubbler valve closed
5/24/2010	9:00:38 AM	Helium valve opened
5/24/2010	9:00:38 AM	Helium MFC set to  500.000000
5/24/2010	9:00:38 AM	H2 MFC set to  0.000000
5/24/2010	9:00:38 AM	BCl3 MFC set to  0.000000
5/24/2010	9:00:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:00:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:00:38 AM	Tube furnace set to 80
5/24/2010	9:01:21 AM	Helium valve closed
5/24/2010	9:01:21 AM	H2 valve closed
5/24/2010	9:01:21 AM	BCl3 valve closed
5/24/2010	9:01:21 AM	PH3 valve closed
5/24/2010	9:01:21 AM	SiCl4 pre valve closed
5/24/2010	9:01:21 AM	SiCl4 post valve closed
5/24/2010	9:01:21 AM	Main Vac valve closed
5/24/2010	9:01:21 AM	Bypass valve closed
5/24/2010	9:01:21 AM	Bubbler valve closed
5/24/2010	9:01:21 AM	Helium MFC set to  0.000000
5/24/2010	9:01:21 AM	H2 MFC set to  0.000000
5/24/2010	9:01:21 AM	BCl3 MFC set to  0.000000
5/24/2010	9:01:21 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:01:21 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:01:21 AM	Tube furnace set to 80
5/24/2010	9:01:36 AM	Helium valve closed
5/24/2010	9:01:36 AM	H2 valve closed
5/24/2010	9:01:36 AM	BCl3 valve closed
5/24/2010	9:01:36 AM	PH3 valve closed
5/24/2010	9:01:36 AM	SiCl4 pre valve closed
5/24/2010	9:01:36 AM	SiCl4 post valve closed
5/24/2010	9:01:36 AM	Main Vac valve closed
5/24/2010	9:01:36 AM	Bubbler valve closed
5/24/2010	9:01:36 AM	Bypass valve opened
5/24/2010	9:01:36 AM	Helium MFC set to  0.000000
5/24/2010	9:01:36 AM	H2 MFC set to  0.000000
5/24/2010	9:01:36 AM	BCl3 MFC set to  0.000000
5/24/2010	9:01:36 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:01:36 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:01:37 AM	Tube furnace set to 80
5/24/2010	9:02:04 AM	Helium valve closed
5/24/2010	9:02:04 AM	H2 valve closed
5/24/2010	9:02:04 AM	BCl3 valve closed
5/24/2010	9:02:04 AM	PH3 valve closed
5/24/2010	9:02:04 AM	SiCl4 pre valve closed
5/24/2010	9:02:04 AM	SiCl4 post valve closed
5/24/2010	9:02:04 AM	Bubbler valve closed
5/24/2010	9:02:04 AM	Main Vac valve opened
5/24/2010	9:02:04 AM	Bypass valve opened
5/24/2010	9:02:04 AM	Helium MFC set to  0.000000
5/24/2010	9:02:04 AM	H2 MFC set to  0.000000
5/24/2010	9:02:04 AM	BCl3 MFC set to  0.000000
5/24/2010	9:02:04 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:02:04 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:02:04 AM	Tube furnace set to 80
5/24/2010	9:05:04 AM	H2 valve closed
5/24/2010	9:05:04 AM	BCl3 valve closed
5/24/2010	9:05:04 AM	PH3 valve closed
5/24/2010	9:05:04 AM	SiCl4 pre valve closed
5/24/2010	9:05:04 AM	SiCl4 post valve closed
5/24/2010	9:05:04 AM	Main Vac valve closed
5/24/2010	9:05:04 AM	Bypass valve closed
5/24/2010	9:05:04 AM	Bubbler valve closed
5/24/2010	9:05:04 AM	Helium valve opened
5/24/2010	9:05:04 AM	Helium MFC set to  500.000000
5/24/2010	9:05:04 AM	H2 MFC set to  0.000000
5/24/2010	9:05:04 AM	BCl3 MFC set to  0.000000
5/24/2010	9:05:04 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:05:04 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:05:04 AM	Tube furnace set to 80
5/24/2010	9:05:47 AM	Helium valve closed
5/24/2010	9:05:47 AM	H2 valve closed
5/24/2010	9:05:47 AM	BCl3 valve closed
5/24/2010	9:05:47 AM	PH3 valve closed
5/24/2010	9:05:47 AM	SiCl4 pre valve closed
5/24/2010	9:05:47 AM	SiCl4 post valve closed
5/24/2010	9:05:47 AM	Main Vac valve closed
5/24/2010	9:05:47 AM	Bypass valve closed
5/24/2010	9:05:47 AM	Bubbler valve closed
5/24/2010	9:05:47 AM	Helium MFC set to  0.000000
5/24/2010	9:05:47 AM	H2 MFC set to  0.000000
5/24/2010	9:05:47 AM	BCl3 MFC set to  0.000000
5/24/2010	9:05:47 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:05:47 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:05:47 AM	Tube furnace set to 80
5/24/2010	9:06:02 AM	Helium valve closed
5/24/2010	9:06:02 AM	H2 valve closed
5/24/2010	9:06:02 AM	BCl3 valve closed
5/24/2010	9:06:02 AM	PH3 valve closed
5/24/2010	9:06:02 AM	SiCl4 pre valve closed
5/24/2010	9:06:02 AM	SiCl4 post valve closed
5/24/2010	9:06:02 AM	Main Vac valve closed
5/24/2010	9:06:02 AM	Bubbler valve closed
5/24/2010	9:06:02 AM	Bypass valve opened
5/24/2010	9:06:02 AM	Helium MFC set to  0.000000
5/24/2010	9:06:02 AM	H2 MFC set to  0.000000
5/24/2010	9:06:02 AM	BCl3 MFC set to  0.000000
5/24/2010	9:06:02 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:06:02 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:06:02 AM	Tube furnace set to 80
5/24/2010	9:06:29 AM	Helium valve closed
5/24/2010	9:06:29 AM	H2 valve closed
5/24/2010	9:06:29 AM	BCl3 valve closed
5/24/2010	9:06:29 AM	PH3 valve closed
5/24/2010	9:06:29 AM	SiCl4 pre valve closed
5/24/2010	9:06:29 AM	SiCl4 post valve closed
5/24/2010	9:06:29 AM	Bubbler valve closed
5/24/2010	9:06:29 AM	Main Vac valve opened
5/24/2010	9:06:29 AM	Bypass valve opened
5/24/2010	9:06:29 AM	Helium MFC set to  0.000000
5/24/2010	9:06:29 AM	H2 MFC set to  0.000000
5/24/2010	9:06:29 AM	BCl3 MFC set to  0.000000
5/24/2010	9:06:29 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:06:29 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:06:29 AM	Tube furnace set to 80
5/24/2010	9:09:29 AM	Helium valve closed
5/24/2010	9:09:29 AM	H2 valve closed
5/24/2010	9:09:29 AM	BCl3 valve closed
5/24/2010	9:09:29 AM	PH3 valve closed
5/24/2010	9:09:29 AM	SiCl4 pre valve closed
5/24/2010	9:09:29 AM	SiCl4 post valve closed
5/24/2010	9:09:29 AM	Bubbler valve closed
5/24/2010	9:09:29 AM	Main Vac valve opened
5/24/2010	9:09:29 AM	Bypass valve opened
5/24/2010	9:09:29 AM	Helium MFC set to  0.000000
5/24/2010	9:09:29 AM	H2 MFC set to  0.000000
5/24/2010	9:09:29 AM	BCl3 MFC set to  0.000000
5/24/2010	9:09:29 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:09:29 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:09:29 AM	Tube furnace set to 0
5/24/2010	9:09:30 AM	Run finished at 9:09 AM
5/24/2010	9:13:16 AM	Recipe started at 9:13 AM
5/24/2010	9:13:16 AM	H2 valve closed
5/24/2010	9:13:16 AM	BCl3 valve closed
5/24/2010	9:13:16 AM	PH3 valve closed
5/24/2010	9:13:16 AM	SiCl4 pre valve closed
5/24/2010	9:13:16 AM	SiCl4 post valve closed
5/24/2010	9:13:16 AM	Main Vac valve closed
5/24/2010	9:13:16 AM	Bypass valve closed
5/24/2010	9:13:16 AM	Bubbler valve closed
5/24/2010	9:13:16 AM	Helium valve opened
5/24/2010	9:13:16 AM	Helium MFC set to  500.000000
5/24/2010	9:13:16 AM	H2 MFC set to  0.000000
5/24/2010	9:13:16 AM	BCl3 MFC set to  0.000000
5/24/2010	9:13:16 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:13:16 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:13:16 AM	Tube furnace set to 80
5/24/2010	9:13:59 AM	Helium valve closed
5/24/2010	9:13:59 AM	H2 valve closed
5/24/2010	9:13:59 AM	BCl3 valve closed
5/24/2010	9:13:59 AM	PH3 valve closed
5/24/2010	9:13:59 AM	SiCl4 pre valve closed
5/24/2010	9:13:59 AM	SiCl4 post valve closed
5/24/2010	9:13:59 AM	Main Vac valve closed
5/24/2010	9:13:59 AM	Bypass valve closed
5/24/2010	9:13:59 AM	Bubbler valve closed
5/24/2010	9:13:59 AM	Helium MFC set to  0.000000
5/24/2010	9:13:59 AM	H2 MFC set to  0.000000
5/24/2010	9:13:59 AM	BCl3 MFC set to  0.000000
5/24/2010	9:13:59 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:13:59 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:13:59 AM	Tube furnace set to 80
5/24/2010	9:14:14 AM	Helium valve closed
5/24/2010	9:14:14 AM	H2 valve closed
5/24/2010	9:14:14 AM	BCl3 valve closed
5/24/2010	9:14:14 AM	PH3 valve closed
5/24/2010	9:14:14 AM	SiCl4 pre valve closed
5/24/2010	9:14:14 AM	SiCl4 post valve closed
5/24/2010	9:14:14 AM	Main Vac valve closed
5/24/2010	9:14:14 AM	Bubbler valve closed
5/24/2010	9:14:14 AM	Bypass valve opened
5/24/2010	9:14:14 AM	Helium MFC set to  0.000000
5/24/2010	9:14:14 AM	H2 MFC set to  0.000000
5/24/2010	9:14:14 AM	BCl3 MFC set to  0.000000
5/24/2010	9:14:14 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:14:14 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:14:14 AM	Tube furnace set to 80
5/24/2010	9:14:41 AM	Helium valve closed
5/24/2010	9:14:41 AM	H2 valve closed
5/24/2010	9:14:41 AM	BCl3 valve closed
5/24/2010	9:14:41 AM	PH3 valve closed
5/24/2010	9:14:41 AM	SiCl4 pre valve closed
5/24/2010	9:14:41 AM	SiCl4 post valve closed
5/24/2010	9:14:41 AM	Bubbler valve closed
5/24/2010	9:14:41 AM	Main Vac valve opened
5/24/2010	9:14:41 AM	Bypass valve opened
5/24/2010	9:14:41 AM	Helium MFC set to  0.000000
5/24/2010	9:14:41 AM	H2 MFC set to  0.000000
5/24/2010	9:14:41 AM	BCl3 MFC set to  0.000000
5/24/2010	9:14:41 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:14:41 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:14:41 AM	Tube furnace set to 80
5/24/2010	9:17:41 AM	H2 valve closed
5/24/2010	9:17:41 AM	BCl3 valve closed
5/24/2010	9:17:41 AM	PH3 valve closed
5/24/2010	9:17:41 AM	SiCl4 pre valve closed
5/24/2010	9:17:41 AM	SiCl4 post valve closed
5/24/2010	9:17:41 AM	Main Vac valve closed
5/24/2010	9:17:41 AM	Bypass valve closed
5/24/2010	9:17:41 AM	Bubbler valve closed
5/24/2010	9:17:42 AM	Helium valve opened
5/24/2010	9:17:42 AM	Helium MFC set to  500.000000
5/24/2010	9:17:42 AM	H2 MFC set to  0.000000
5/24/2010	9:17:42 AM	BCl3 MFC set to  0.000000
5/24/2010	9:17:42 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:17:42 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:17:42 AM	Tube furnace set to 80
5/24/2010	9:18:24 AM	Helium valve closed
5/24/2010	9:18:24 AM	H2 valve closed
5/24/2010	9:18:24 AM	BCl3 valve closed
5/24/2010	9:18:24 AM	PH3 valve closed
5/24/2010	9:18:24 AM	SiCl4 pre valve closed
5/24/2010	9:18:24 AM	SiCl4 post valve closed
5/24/2010	9:18:24 AM	Main Vac valve closed
5/24/2010	9:18:24 AM	Bypass valve closed
5/24/2010	9:18:24 AM	Bubbler valve closed
5/24/2010	9:18:24 AM	Helium MFC set to  0.000000
5/24/2010	9:18:24 AM	H2 MFC set to  0.000000
5/24/2010	9:18:24 AM	BCl3 MFC set to  0.000000
5/24/2010	9:18:24 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:18:24 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:18:25 AM	Tube furnace set to 80
5/24/2010	9:18:40 AM	Helium valve closed
5/24/2010	9:18:40 AM	H2 valve closed
5/24/2010	9:18:40 AM	BCl3 valve closed
5/24/2010	9:18:40 AM	PH3 valve closed
5/24/2010	9:18:40 AM	SiCl4 pre valve closed
5/24/2010	9:18:40 AM	SiCl4 post valve closed
5/24/2010	9:18:40 AM	Main Vac valve closed
5/24/2010	9:18:40 AM	Bubbler valve closed
5/24/2010	9:18:40 AM	Bypass valve opened
5/24/2010	9:18:40 AM	Helium MFC set to  0.000000
5/24/2010	9:18:40 AM	H2 MFC set to  0.000000
5/24/2010	9:18:40 AM	BCl3 MFC set to  0.000000
5/24/2010	9:18:40 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:18:40 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:18:40 AM	Tube furnace set to 80
5/24/2010	9:19:07 AM	Helium valve closed
5/24/2010	9:19:07 AM	H2 valve closed
5/24/2010	9:19:07 AM	BCl3 valve closed
5/24/2010	9:19:07 AM	PH3 valve closed
5/24/2010	9:19:07 AM	SiCl4 pre valve closed
5/24/2010	9:19:07 AM	SiCl4 post valve closed
5/24/2010	9:19:07 AM	Bubbler valve closed
5/24/2010	9:19:07 AM	Main Vac valve opened
5/24/2010	9:19:07 AM	Bypass valve opened
5/24/2010	9:19:07 AM	Helium MFC set to  0.000000
5/24/2010	9:19:07 AM	H2 MFC set to  0.000000
5/24/2010	9:19:07 AM	BCl3 MFC set to  0.000000
5/24/2010	9:19:07 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:19:07 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:19:07 AM	Tube furnace set to 80
5/24/2010	9:19:34 AM	Run aborted at 9:19 AM
5/24/2010	9:19:34 AM	Helium valve closed
5/24/2010	9:19:34 AM	H2 valve closed
5/24/2010	9:19:34 AM	BCl3 valve closed
5/24/2010	9:19:34 AM	PH3 valve closed
5/24/2010	9:19:34 AM	SiCl4 pre valve closed
5/24/2010	9:19:34 AM	SiCl4 post valve closed
5/24/2010	9:19:34 AM	Bypass valve closed
5/24/2010	9:19:34 AM	Main Vac valve closed
5/24/2010	9:19:34 AM	Bubbler valve closed
5/24/2010	9:19:34 AM	Helium MFC set to  0.000000
5/24/2010	9:19:34 AM	H2 MFC set to  0.000000
5/24/2010	9:19:34 AM	BCl3 MFC set to  0.000000
5/24/2010	9:19:34 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:19:34 AM	Tube furnace set to 0
5/24/2010	9:19:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	9:19:38 AM	Recipe started at 9:19 AM
5/24/2010	9:19:38 AM	Helium valve closed
5/24/2010	9:19:38 AM	H2 valve closed
5/24/2010	9:19:38 AM	BCl3 valve closed
5/24/2010	9:19:38 AM	PH3 valve closed
5/24/2010	9:19:38 AM	SiCl4 pre valve closed
5/24/2010	9:19:38 AM	SiCl4 post valve closed
5/24/2010	9:19:38 AM	Main Vac valve closed
5/24/2010	9:19:38 AM	Bubbler valve closed
5/24/2010	9:19:38 AM	Bypass valve opened
5/24/2010	9:19:38 AM	Helium MFC set to  0.000000
5/24/2010	9:19:38 AM	H2 MFC set to  0.000000
5/24/2010	9:19:38 AM	BCl3 MFC set to  0.000000
5/24/2010	9:19:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:19:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:19:38 AM	Tube furnace set to 0
5/24/2010	9:19:38 AM	Helium valve closed
5/24/2010	9:19:38 AM	H2 valve closed
5/24/2010	9:19:38 AM	BCl3 valve closed
5/24/2010	9:19:38 AM	PH3 valve closed
5/24/2010	9:19:38 AM	SiCl4 pre valve closed
5/24/2010	9:19:38 AM	SiCl4 post valve closed
5/24/2010	9:19:38 AM	Bubbler valve closed
5/24/2010	9:19:38 AM	Main Vac valve opened
5/24/2010	9:19:38 AM	Bypass valve opened
5/24/2010	9:19:38 AM	Helium MFC set to  0.000000
5/24/2010	9:19:38 AM	H2 MFC set to  0.000000
5/24/2010	9:19:38 AM	BCl3 MFC set to  0.000000
5/24/2010	9:19:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:19:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:19:38 AM	Tube furnace set to 0
5/24/2010	9:19:38 AM	Run finished at 9:19 AM
5/24/2010	9:19:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	9:19:53 AM	Bypass valve closed
5/24/2010	9:19:54 AM	Main Vac valve closed
5/24/2010	9:20:15 AM	Main Vac valve opened
5/24/2010	9:20:15 AM	Bypass valve opened
5/24/2010	9:21:16 AM	Recipe started at 9:21 AM
5/24/2010	9:21:16 AM	Helium valve closed
5/24/2010	9:21:16 AM	BCl3 valve closed
5/24/2010	9:21:16 AM	PH3 valve closed
5/24/2010	9:21:16 AM	SiCl4 pre valve closed
5/24/2010	9:21:16 AM	SiCl4 post valve closed
5/24/2010	9:21:16 AM	Main Vac valve closed
5/24/2010	9:21:16 AM	Bypass valve closed
5/24/2010	9:21:16 AM	Bubbler valve closed
5/24/2010	9:21:16 AM	H2 valve opened
5/24/2010	9:21:16 AM	Helium MFC set to  0.000000
5/24/2010	9:21:16 AM	H2 MFC set to  500.000000
5/24/2010	9:21:16 AM	BCl3 MFC set to  0.000000
5/24/2010	9:21:16 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:21:16 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:21:16 AM	Tube furnace set to 0
5/24/2010	9:22:37 AM	Helium valve closed
5/24/2010	9:22:37 AM	BCl3 valve closed
5/24/2010	9:22:37 AM	PH3 valve closed
5/24/2010	9:22:37 AM	SiCl4 pre valve closed
5/24/2010	9:22:37 AM	SiCl4 post valve closed
5/24/2010	9:22:37 AM	Main Vac valve closed
5/24/2010	9:22:37 AM	Bypass valve closed
5/24/2010	9:22:37 AM	H2 valve opened
5/24/2010	9:22:37 AM	Bubbler valve opened
5/24/2010	9:22:37 AM	Helium MFC set to  0.000000
5/24/2010	9:22:37 AM	H2 MFC set to  500.000000
5/24/2010	9:22:37 AM	BCl3 MFC set to  0.000000
5/24/2010	9:22:37 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:22:37 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:22:37 AM	Tube furnace set to 1000
5/24/2010	9:42:37 AM	Helium valve closed
5/24/2010	9:42:37 AM	PH3 valve closed
5/24/2010	9:42:37 AM	Main Vac valve closed
5/24/2010	9:42:37 AM	Bypass valve closed
5/24/2010	9:42:37 AM	H2 valve opened
5/24/2010	9:42:37 AM	BCl3 valve opened
5/24/2010	9:42:37 AM	SiCl4 pre valve opened
5/24/2010	9:42:37 AM	SiCl4 post valve opened
5/24/2010	9:42:37 AM	Bubbler valve opened
5/24/2010	9:42:37 AM	Helium MFC set to  0.000000
5/24/2010	9:42:37 AM	H2 MFC set to  500.000000
5/24/2010	9:42:37 AM	BCl3 MFC set to  35.000000
5/24/2010	9:42:37 AM	SiCl4 MFC set to  450.000000
5/24/2010	9:42:37 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:42:37 AM	Tube furnace set to 1000
5/24/2010	9:52:37 AM	H2 valve closed
5/24/2010	9:52:37 AM	BCl3 valve closed
5/24/2010	9:52:37 AM	PH3 valve closed
5/24/2010	9:52:37 AM	SiCl4 pre valve closed
5/24/2010	9:52:37 AM	SiCl4 post valve closed
5/24/2010	9:52:37 AM	Main Vac valve closed
5/24/2010	9:52:37 AM	Bypass valve closed
5/24/2010	9:52:37 AM	Helium valve opened
5/24/2010	9:52:37 AM	Bubbler valve opened
5/24/2010	9:52:37 AM	Helium MFC set to  500.000000
5/24/2010	9:52:37 AM	H2 MFC set to  0.000000
5/24/2010	9:52:37 AM	BCl3 MFC set to  0.000000
5/24/2010	9:52:37 AM	SiCl4 MFC set to  0.000000
5/24/2010	9:52:37 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	9:52:38 AM	Tube furnace set to 0
5/24/2010	10:12:38 AM	Helium valve closed
5/24/2010	10:12:38 AM	H2 valve closed
5/24/2010	10:12:38 AM	BCl3 valve closed
5/24/2010	10:12:38 AM	PH3 valve closed
5/24/2010	10:12:38 AM	SiCl4 pre valve closed
5/24/2010	10:12:38 AM	SiCl4 post valve closed
5/24/2010	10:12:38 AM	Main Vac valve closed
5/24/2010	10:12:38 AM	Bypass valve closed
5/24/2010	10:12:38 AM	Bubbler valve closed
5/24/2010	10:12:38 AM	Helium MFC set to  0.000000
5/24/2010	10:12:38 AM	H2 MFC set to  0.000000
5/24/2010	10:12:38 AM	BCl3 MFC set to  0.000000
5/24/2010	10:12:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:12:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:12:38 AM	Tube furnace set to 0
5/24/2010	10:12:38 AM	Run finished at 10:12 AM
5/24/2010	10:15:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	10:15:41 AM	Recipe started at 10:15 AM
5/24/2010	10:15:41 AM	Helium valve closed
5/24/2010	10:15:41 AM	H2 valve closed
5/24/2010	10:15:41 AM	BCl3 valve closed
5/24/2010	10:15:41 AM	PH3 valve closed
5/24/2010	10:15:41 AM	SiCl4 pre valve closed
5/24/2010	10:15:41 AM	SiCl4 post valve closed
5/24/2010	10:15:41 AM	Main Vac valve closed
5/24/2010	10:15:41 AM	Bubbler valve closed
5/24/2010	10:15:41 AM	Bypass valve opened
5/24/2010	10:15:41 AM	Helium MFC set to  0.000000
5/24/2010	10:15:41 AM	H2 MFC set to  0.000000
5/24/2010	10:15:41 AM	BCl3 MFC set to  0.000000
5/24/2010	10:15:41 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:15:41 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:15:41 AM	Tube furnace set to 0
5/24/2010	10:16:27 AM	Helium valve closed
5/24/2010	10:16:27 AM	H2 valve closed
5/24/2010	10:16:27 AM	BCl3 valve closed
5/24/2010	10:16:27 AM	PH3 valve closed
5/24/2010	10:16:27 AM	SiCl4 pre valve closed
5/24/2010	10:16:27 AM	SiCl4 post valve closed
5/24/2010	10:16:27 AM	Bubbler valve closed
5/24/2010	10:16:27 AM	Main Vac valve opened
5/24/2010	10:16:27 AM	Bypass valve opened
5/24/2010	10:16:27 AM	Helium MFC set to  0.000000
5/24/2010	10:16:27 AM	H2 MFC set to  0.000000
5/24/2010	10:16:27 AM	BCl3 MFC set to  0.000000
5/24/2010	10:16:27 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:16:27 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:16:27 AM	Tube furnace set to 0
5/24/2010	10:16:27 AM	Run finished at 10:16 AM
5/24/2010	10:16:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	10:17:04 AM	Recipe started at 10:17 AM
5/24/2010	10:17:04 AM	H2 valve closed
5/24/2010	10:17:04 AM	BCl3 valve closed
5/24/2010	10:17:04 AM	PH3 valve closed
5/24/2010	10:17:04 AM	SiCl4 pre valve closed
5/24/2010	10:17:04 AM	SiCl4 post valve closed
5/24/2010	10:17:04 AM	Main Vac valve closed
5/24/2010	10:17:04 AM	Bypass valve closed
5/24/2010	10:17:04 AM	Bubbler valve closed
5/24/2010	10:17:04 AM	Helium valve opened
5/24/2010	10:17:04 AM	Helium MFC set to  500.000000
5/24/2010	10:17:04 AM	H2 MFC set to  0.000000
5/24/2010	10:17:04 AM	BCl3 MFC set to  0.000000
5/24/2010	10:17:04 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:17:04 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:17:04 AM	Tube furnace set to 80
5/24/2010	10:17:46 AM	Helium valve closed
5/24/2010	10:17:46 AM	H2 valve closed
5/24/2010	10:17:46 AM	BCl3 valve closed
5/24/2010	10:17:46 AM	PH3 valve closed
5/24/2010	10:17:46 AM	SiCl4 pre valve closed
5/24/2010	10:17:46 AM	SiCl4 post valve closed
5/24/2010	10:17:46 AM	Main Vac valve closed
5/24/2010	10:17:46 AM	Bypass valve closed
5/24/2010	10:17:46 AM	Bubbler valve closed
5/24/2010	10:17:46 AM	Helium MFC set to  0.000000
5/24/2010	10:17:46 AM	H2 MFC set to  0.000000
5/24/2010	10:17:46 AM	BCl3 MFC set to  0.000000
5/24/2010	10:17:46 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:17:46 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:17:46 AM	Tube furnace set to 80
5/24/2010	10:18:01 AM	Helium valve closed
5/24/2010	10:18:01 AM	H2 valve closed
5/24/2010	10:18:01 AM	BCl3 valve closed
5/24/2010	10:18:01 AM	PH3 valve closed
5/24/2010	10:18:01 AM	SiCl4 pre valve closed
5/24/2010	10:18:01 AM	SiCl4 post valve closed
5/24/2010	10:18:01 AM	Main Vac valve closed
5/24/2010	10:18:01 AM	Bubbler valve closed
5/24/2010	10:18:01 AM	Bypass valve opened
5/24/2010	10:18:01 AM	Helium MFC set to  0.000000
5/24/2010	10:18:01 AM	H2 MFC set to  0.000000
5/24/2010	10:18:01 AM	BCl3 MFC set to  0.000000
5/24/2010	10:18:01 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:18:01 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:18:01 AM	Tube furnace set to 80
5/24/2010	10:18:29 AM	Helium valve closed
5/24/2010	10:18:29 AM	H2 valve closed
5/24/2010	10:18:29 AM	BCl3 valve closed
5/24/2010	10:18:29 AM	PH3 valve closed
5/24/2010	10:18:29 AM	SiCl4 pre valve closed
5/24/2010	10:18:29 AM	SiCl4 post valve closed
5/24/2010	10:18:29 AM	Bubbler valve closed
5/24/2010	10:18:29 AM	Main Vac valve opened
5/24/2010	10:18:29 AM	Bypass valve opened
5/24/2010	10:18:29 AM	Helium MFC set to  0.000000
5/24/2010	10:18:29 AM	H2 MFC set to  0.000000
5/24/2010	10:18:29 AM	BCl3 MFC set to  0.000000
5/24/2010	10:18:29 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:18:29 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:18:29 AM	Tube furnace set to 80
5/24/2010	10:21:29 AM	H2 valve closed
5/24/2010	10:21:29 AM	BCl3 valve closed
5/24/2010	10:21:29 AM	PH3 valve closed
5/24/2010	10:21:29 AM	SiCl4 pre valve closed
5/24/2010	10:21:29 AM	SiCl4 post valve closed
5/24/2010	10:21:29 AM	Main Vac valve closed
5/24/2010	10:21:29 AM	Bypass valve closed
5/24/2010	10:21:29 AM	Bubbler valve closed
5/24/2010	10:21:29 AM	Helium valve opened
5/24/2010	10:21:29 AM	Helium MFC set to  500.000000
5/24/2010	10:21:29 AM	H2 MFC set to  0.000000
5/24/2010	10:21:29 AM	BCl3 MFC set to  0.000000
5/24/2010	10:21:29 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:21:29 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:21:29 AM	Tube furnace set to 80
5/24/2010	10:22:12 AM	Helium valve closed
5/24/2010	10:22:12 AM	H2 valve closed
5/24/2010	10:22:12 AM	BCl3 valve closed
5/24/2010	10:22:12 AM	PH3 valve closed
5/24/2010	10:22:12 AM	SiCl4 pre valve closed
5/24/2010	10:22:12 AM	SiCl4 post valve closed
5/24/2010	10:22:12 AM	Main Vac valve closed
5/24/2010	10:22:12 AM	Bypass valve closed
5/24/2010	10:22:12 AM	Bubbler valve closed
5/24/2010	10:22:12 AM	Helium MFC set to  0.000000
5/24/2010	10:22:12 AM	H2 MFC set to  0.000000
5/24/2010	10:22:12 AM	BCl3 MFC set to  0.000000
5/24/2010	10:22:12 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:22:12 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:22:12 AM	Tube furnace set to 80
5/24/2010	10:22:27 AM	Helium valve closed
5/24/2010	10:22:27 AM	H2 valve closed
5/24/2010	10:22:27 AM	BCl3 valve closed
5/24/2010	10:22:27 AM	PH3 valve closed
5/24/2010	10:22:27 AM	SiCl4 pre valve closed
5/24/2010	10:22:27 AM	SiCl4 post valve closed
5/24/2010	10:22:27 AM	Main Vac valve closed
5/24/2010	10:22:27 AM	Bubbler valve closed
5/24/2010	10:22:27 AM	Bypass valve opened
5/24/2010	10:22:27 AM	Helium MFC set to  0.000000
5/24/2010	10:22:27 AM	H2 MFC set to  0.000000
5/24/2010	10:22:27 AM	BCl3 MFC set to  0.000000
5/24/2010	10:22:27 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:22:27 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:22:27 AM	Tube furnace set to 80
5/24/2010	10:22:55 AM	Helium valve closed
5/24/2010	10:22:55 AM	H2 valve closed
5/24/2010	10:22:55 AM	BCl3 valve closed
5/24/2010	10:22:55 AM	PH3 valve closed
5/24/2010	10:22:55 AM	SiCl4 pre valve closed
5/24/2010	10:22:55 AM	SiCl4 post valve closed
5/24/2010	10:22:55 AM	Bubbler valve closed
5/24/2010	10:22:55 AM	Main Vac valve opened
5/24/2010	10:22:55 AM	Bypass valve opened
5/24/2010	10:22:55 AM	Helium MFC set to  0.000000
5/24/2010	10:22:55 AM	H2 MFC set to  0.000000
5/24/2010	10:22:55 AM	BCl3 MFC set to  0.000000
5/24/2010	10:22:55 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:22:55 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:22:55 AM	Tube furnace set to 80
5/24/2010	10:25:55 AM	H2 valve closed
5/24/2010	10:25:55 AM	BCl3 valve closed
5/24/2010	10:25:55 AM	PH3 valve closed
5/24/2010	10:25:55 AM	SiCl4 pre valve closed
5/24/2010	10:25:55 AM	SiCl4 post valve closed
5/24/2010	10:25:55 AM	Main Vac valve closed
5/24/2010	10:25:55 AM	Bypass valve closed
5/24/2010	10:25:55 AM	Bubbler valve closed
5/24/2010	10:25:55 AM	Helium valve opened
5/24/2010	10:25:55 AM	Helium MFC set to  500.000000
5/24/2010	10:25:55 AM	H2 MFC set to  0.000000
5/24/2010	10:25:55 AM	BCl3 MFC set to  0.000000
5/24/2010	10:25:55 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:25:55 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:25:55 AM	Tube furnace set to 80
5/24/2010	10:26:38 AM	Helium valve closed
5/24/2010	10:26:38 AM	H2 valve closed
5/24/2010	10:26:38 AM	BCl3 valve closed
5/24/2010	10:26:38 AM	PH3 valve closed
5/24/2010	10:26:38 AM	SiCl4 pre valve closed
5/24/2010	10:26:38 AM	SiCl4 post valve closed
5/24/2010	10:26:38 AM	Main Vac valve closed
5/24/2010	10:26:38 AM	Bypass valve closed
5/24/2010	10:26:38 AM	Bubbler valve closed
5/24/2010	10:26:38 AM	Helium MFC set to  0.000000
5/24/2010	10:26:38 AM	H2 MFC set to  0.000000
5/24/2010	10:26:38 AM	BCl3 MFC set to  0.000000
5/24/2010	10:26:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:26:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:26:38 AM	Tube furnace set to 80
5/24/2010	10:26:53 AM	Helium valve closed
5/24/2010	10:26:53 AM	H2 valve closed
5/24/2010	10:26:53 AM	BCl3 valve closed
5/24/2010	10:26:53 AM	PH3 valve closed
5/24/2010	10:26:53 AM	SiCl4 pre valve closed
5/24/2010	10:26:53 AM	SiCl4 post valve closed
5/24/2010	10:26:53 AM	Main Vac valve closed
5/24/2010	10:26:53 AM	Bubbler valve closed
5/24/2010	10:26:53 AM	Bypass valve opened
5/24/2010	10:26:53 AM	Helium MFC set to  0.000000
5/24/2010	10:26:53 AM	H2 MFC set to  0.000000
5/24/2010	10:26:53 AM	BCl3 MFC set to  0.000000
5/24/2010	10:26:53 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:26:53 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:26:54 AM	Tube furnace set to 80
5/24/2010	10:27:21 AM	Helium valve closed
5/24/2010	10:27:21 AM	H2 valve closed
5/24/2010	10:27:21 AM	BCl3 valve closed
5/24/2010	10:27:21 AM	PH3 valve closed
5/24/2010	10:27:21 AM	SiCl4 pre valve closed
5/24/2010	10:27:21 AM	SiCl4 post valve closed
5/24/2010	10:27:21 AM	Bubbler valve closed
5/24/2010	10:27:21 AM	Main Vac valve opened
5/24/2010	10:27:21 AM	Bypass valve opened
5/24/2010	10:27:21 AM	Helium MFC set to  0.000000
5/24/2010	10:27:21 AM	H2 MFC set to  0.000000
5/24/2010	10:27:21 AM	BCl3 MFC set to  0.000000
5/24/2010	10:27:21 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:27:21 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:27:21 AM	Tube furnace set to 80
5/24/2010	10:28:01 AM	Helium valve closed
5/24/2010	10:28:01 AM	H2 valve closed
5/24/2010	10:28:01 AM	BCl3 valve closed
5/24/2010	10:28:01 AM	PH3 valve closed
5/24/2010	10:28:01 AM	SiCl4 pre valve closed
5/24/2010	10:28:01 AM	SiCl4 post valve closed
5/24/2010	10:28:01 AM	Bubbler valve closed
5/24/2010	10:28:01 AM	Main Vac valve opened
5/24/2010	10:28:01 AM	Bypass valve opened
5/24/2010	10:28:01 AM	Helium MFC set to  0.000000
5/24/2010	10:28:01 AM	H2 MFC set to  0.000000
5/24/2010	10:28:01 AM	BCl3 MFC set to  0.000000
5/24/2010	10:28:01 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:28:01 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:28:01 AM	Tube furnace set to 0
5/24/2010	10:28:02 AM	Run finished at 10:28 AM
5/24/2010	10:28:23 AM	Bypass valve closed
5/24/2010	10:28:24 AM	Main Vac valve closed
5/24/2010	10:28:43 AM	Main Vac valve opened
5/24/2010	10:28:43 AM	Bypass valve opened
5/24/2010	10:30:16 AM	Recipe started at 10:30 AM
5/24/2010	10:30:16 AM	Helium valve closed
5/24/2010	10:30:16 AM	BCl3 valve closed
5/24/2010	10:30:16 AM	PH3 valve closed
5/24/2010	10:30:16 AM	SiCl4 pre valve closed
5/24/2010	10:30:16 AM	SiCl4 post valve closed
5/24/2010	10:30:16 AM	Main Vac valve closed
5/24/2010	10:30:16 AM	Bypass valve closed
5/24/2010	10:30:16 AM	Bubbler valve closed
5/24/2010	10:30:16 AM	H2 valve opened
5/24/2010	10:30:16 AM	Helium MFC set to  0.000000
5/24/2010	10:30:16 AM	H2 MFC set to  500.000000
5/24/2010	10:30:16 AM	BCl3 MFC set to  0.000000
5/24/2010	10:30:16 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:30:16 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:30:16 AM	Tube furnace set to 0
5/24/2010	10:31:37 AM	Helium valve closed
5/24/2010	10:31:37 AM	BCl3 valve closed
5/24/2010	10:31:37 AM	PH3 valve closed
5/24/2010	10:31:37 AM	SiCl4 pre valve closed
5/24/2010	10:31:37 AM	SiCl4 post valve closed
5/24/2010	10:31:37 AM	Main Vac valve closed
5/24/2010	10:31:37 AM	Bypass valve closed
5/24/2010	10:31:37 AM	H2 valve opened
5/24/2010	10:31:37 AM	Bubbler valve opened
5/24/2010	10:31:37 AM	Helium MFC set to  0.000000
5/24/2010	10:31:37 AM	H2 MFC set to  500.000000
5/24/2010	10:31:37 AM	BCl3 MFC set to  0.000000
5/24/2010	10:31:37 AM	SiCl4 MFC set to  0.000000
5/24/2010	10:31:37 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:31:38 AM	Tube furnace set to 1000
5/24/2010	10:51:38 AM	Helium valve closed
5/24/2010	10:51:38 AM	PH3 valve closed
5/24/2010	10:51:38 AM	Main Vac valve closed
5/24/2010	10:51:38 AM	Bypass valve closed
5/24/2010	10:51:38 AM	H2 valve opened
5/24/2010	10:51:38 AM	BCl3 valve opened
5/24/2010	10:51:38 AM	SiCl4 pre valve opened
5/24/2010	10:51:38 AM	SiCl4 post valve opened
5/24/2010	10:51:38 AM	Bubbler valve opened
5/24/2010	10:51:38 AM	Helium MFC set to  0.000000
5/24/2010	10:51:38 AM	H2 MFC set to  500.000000
5/24/2010	10:51:38 AM	BCl3 MFC set to  35.000000
5/24/2010	10:51:38 AM	SiCl4 MFC set to  450.000000
5/24/2010	10:51:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	10:51:38 AM	Tube furnace set to 1000
5/24/2010	11:01:38 AM	H2 valve closed
5/24/2010	11:01:38 AM	BCl3 valve closed
5/24/2010	11:01:38 AM	PH3 valve closed
5/24/2010	11:01:38 AM	SiCl4 pre valve closed
5/24/2010	11:01:38 AM	SiCl4 post valve closed
5/24/2010	11:01:38 AM	Main Vac valve closed
5/24/2010	11:01:38 AM	Bypass valve closed
5/24/2010	11:01:38 AM	Helium valve opened
5/24/2010	11:01:38 AM	Bubbler valve opened
5/24/2010	11:01:38 AM	Helium MFC set to  500.000000
5/24/2010	11:01:38 AM	H2 MFC set to  0.000000
5/24/2010	11:01:38 AM	BCl3 MFC set to  0.000000
5/24/2010	11:01:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:01:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:01:38 AM	Tube furnace set to 0
5/24/2010	11:21:38 AM	Helium valve closed
5/24/2010	11:21:38 AM	H2 valve closed
5/24/2010	11:21:38 AM	BCl3 valve closed
5/24/2010	11:21:38 AM	PH3 valve closed
5/24/2010	11:21:38 AM	SiCl4 pre valve closed
5/24/2010	11:21:38 AM	SiCl4 post valve closed
5/24/2010	11:21:38 AM	Main Vac valve closed
5/24/2010	11:21:38 AM	Bypass valve closed
5/24/2010	11:21:38 AM	Bubbler valve closed
5/24/2010	11:21:38 AM	Helium MFC set to  0.000000
5/24/2010	11:21:38 AM	H2 MFC set to  0.000000
5/24/2010	11:21:38 AM	BCl3 MFC set to  0.000000
5/24/2010	11:21:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:21:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:21:38 AM	Tube furnace set to 0
5/24/2010	11:21:38 AM	Run finished at 11:21 AM
5/24/2010	11:25:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	11:25:09 AM	Recipe started at 11:25 AM
5/24/2010	11:25:09 AM	Helium valve closed
5/24/2010	11:25:09 AM	H2 valve closed
5/24/2010	11:25:09 AM	BCl3 valve closed
5/24/2010	11:25:09 AM	PH3 valve closed
5/24/2010	11:25:09 AM	SiCl4 pre valve closed
5/24/2010	11:25:09 AM	SiCl4 post valve closed
5/24/2010	11:25:09 AM	Main Vac valve closed
5/24/2010	11:25:09 AM	Bubbler valve closed
5/24/2010	11:25:09 AM	Bypass valve opened
5/24/2010	11:25:09 AM	Helium MFC set to  0.000000
5/24/2010	11:25:09 AM	H2 MFC set to  0.000000
5/24/2010	11:25:09 AM	BCl3 MFC set to  0.000000
5/24/2010	11:25:09 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:25:09 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:25:09 AM	Tube furnace set to 0
5/24/2010	11:25:55 AM	Helium valve closed
5/24/2010	11:25:55 AM	H2 valve closed
5/24/2010	11:25:55 AM	BCl3 valve closed
5/24/2010	11:25:55 AM	PH3 valve closed
5/24/2010	11:25:55 AM	SiCl4 pre valve closed
5/24/2010	11:25:55 AM	SiCl4 post valve closed
5/24/2010	11:25:55 AM	Bubbler valve closed
5/24/2010	11:25:55 AM	Main Vac valve opened
5/24/2010	11:25:55 AM	Bypass valve opened
5/24/2010	11:25:55 AM	Helium MFC set to  0.000000
5/24/2010	11:25:55 AM	H2 MFC set to  0.000000
5/24/2010	11:25:55 AM	BCl3 MFC set to  0.000000
5/24/2010	11:25:55 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:25:55 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:25:55 AM	Tube furnace set to 0
5/24/2010	11:25:55 AM	Run finished at 11:25 AM
5/24/2010	11:25:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	11:26:14 AM	Recipe started at 11:26 AM
5/24/2010	11:26:14 AM	H2 valve closed
5/24/2010	11:26:14 AM	BCl3 valve closed
5/24/2010	11:26:14 AM	PH3 valve closed
5/24/2010	11:26:14 AM	SiCl4 pre valve closed
5/24/2010	11:26:14 AM	SiCl4 post valve closed
5/24/2010	11:26:14 AM	Main Vac valve closed
5/24/2010	11:26:14 AM	Bypass valve closed
5/24/2010	11:26:14 AM	Bubbler valve closed
5/24/2010	11:26:14 AM	Helium valve opened
5/24/2010	11:26:14 AM	Helium MFC set to  500.000000
5/24/2010	11:26:14 AM	H2 MFC set to  0.000000
5/24/2010	11:26:14 AM	BCl3 MFC set to  0.000000
5/24/2010	11:26:14 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:26:14 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:26:14 AM	Tube furnace set to 80
5/24/2010	11:26:56 AM	Helium valve closed
5/24/2010	11:26:56 AM	H2 valve closed
5/24/2010	11:26:56 AM	BCl3 valve closed
5/24/2010	11:26:56 AM	PH3 valve closed
5/24/2010	11:26:56 AM	SiCl4 pre valve closed
5/24/2010	11:26:56 AM	SiCl4 post valve closed
5/24/2010	11:26:56 AM	Main Vac valve closed
5/24/2010	11:26:56 AM	Bypass valve closed
5/24/2010	11:26:56 AM	Bubbler valve closed
5/24/2010	11:26:56 AM	Helium MFC set to  0.000000
5/24/2010	11:26:56 AM	H2 MFC set to  0.000000
5/24/2010	11:26:56 AM	BCl3 MFC set to  0.000000
5/24/2010	11:26:56 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:26:56 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:26:56 AM	Tube furnace set to 80
5/24/2010	11:27:11 AM	Helium valve closed
5/24/2010	11:27:11 AM	H2 valve closed
5/24/2010	11:27:11 AM	BCl3 valve closed
5/24/2010	11:27:11 AM	PH3 valve closed
5/24/2010	11:27:11 AM	SiCl4 pre valve closed
5/24/2010	11:27:11 AM	SiCl4 post valve closed
5/24/2010	11:27:11 AM	Main Vac valve closed
5/24/2010	11:27:11 AM	Bubbler valve closed
5/24/2010	11:27:11 AM	Bypass valve opened
5/24/2010	11:27:11 AM	Helium MFC set to  0.000000
5/24/2010	11:27:11 AM	H2 MFC set to  0.000000
5/24/2010	11:27:11 AM	BCl3 MFC set to  0.000000
5/24/2010	11:27:11 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:27:11 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:27:11 AM	Tube furnace set to 80
5/24/2010	11:27:38 AM	Helium valve closed
5/24/2010	11:27:38 AM	H2 valve closed
5/24/2010	11:27:38 AM	BCl3 valve closed
5/24/2010	11:27:38 AM	PH3 valve closed
5/24/2010	11:27:38 AM	SiCl4 pre valve closed
5/24/2010	11:27:38 AM	SiCl4 post valve closed
5/24/2010	11:27:38 AM	Bubbler valve closed
5/24/2010	11:27:38 AM	Main Vac valve opened
5/24/2010	11:27:38 AM	Bypass valve opened
5/24/2010	11:27:38 AM	Helium MFC set to  0.000000
5/24/2010	11:27:38 AM	H2 MFC set to  0.000000
5/24/2010	11:27:38 AM	BCl3 MFC set to  0.000000
5/24/2010	11:27:38 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:27:38 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:27:39 AM	Tube furnace set to 80
5/24/2010	11:30:39 AM	H2 valve closed
5/24/2010	11:30:39 AM	BCl3 valve closed
5/24/2010	11:30:39 AM	PH3 valve closed
5/24/2010	11:30:39 AM	SiCl4 pre valve closed
5/24/2010	11:30:39 AM	SiCl4 post valve closed
5/24/2010	11:30:39 AM	Main Vac valve closed
5/24/2010	11:30:39 AM	Bypass valve closed
5/24/2010	11:30:39 AM	Bubbler valve closed
5/24/2010	11:30:39 AM	Helium valve opened
5/24/2010	11:30:39 AM	Helium MFC set to  500.000000
5/24/2010	11:30:39 AM	H2 MFC set to  0.000000
5/24/2010	11:30:39 AM	BCl3 MFC set to  0.000000
5/24/2010	11:30:39 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:30:39 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:30:39 AM	Tube furnace set to 80
5/24/2010	11:31:20 AM	Helium valve closed
5/24/2010	11:31:20 AM	H2 valve closed
5/24/2010	11:31:20 AM	BCl3 valve closed
5/24/2010	11:31:20 AM	PH3 valve closed
5/24/2010	11:31:20 AM	SiCl4 pre valve closed
5/24/2010	11:31:20 AM	SiCl4 post valve closed
5/24/2010	11:31:20 AM	Main Vac valve closed
5/24/2010	11:31:20 AM	Bypass valve closed
5/24/2010	11:31:20 AM	Bubbler valve closed
5/24/2010	11:31:20 AM	Helium MFC set to  0.000000
5/24/2010	11:31:20 AM	H2 MFC set to  0.000000
5/24/2010	11:31:20 AM	BCl3 MFC set to  0.000000
5/24/2010	11:31:20 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:31:20 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:31:20 AM	Tube furnace set to 80
5/24/2010	11:31:36 AM	Helium valve closed
5/24/2010	11:31:36 AM	H2 valve closed
5/24/2010	11:31:36 AM	BCl3 valve closed
5/24/2010	11:31:36 AM	PH3 valve closed
5/24/2010	11:31:36 AM	SiCl4 pre valve closed
5/24/2010	11:31:36 AM	SiCl4 post valve closed
5/24/2010	11:31:36 AM	Main Vac valve closed
5/24/2010	11:31:36 AM	Bubbler valve closed
5/24/2010	11:31:36 AM	Bypass valve opened
5/24/2010	11:31:36 AM	Helium MFC set to  0.000000
5/24/2010	11:31:36 AM	H2 MFC set to  0.000000
5/24/2010	11:31:36 AM	BCl3 MFC set to  0.000000
5/24/2010	11:31:36 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:31:36 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:31:36 AM	Tube furnace set to 80
5/24/2010	11:32:02 AM	Helium valve closed
5/24/2010	11:32:02 AM	H2 valve closed
5/24/2010	11:32:02 AM	BCl3 valve closed
5/24/2010	11:32:02 AM	PH3 valve closed
5/24/2010	11:32:02 AM	SiCl4 pre valve closed
5/24/2010	11:32:02 AM	SiCl4 post valve closed
5/24/2010	11:32:02 AM	Bubbler valve closed
5/24/2010	11:32:02 AM	Main Vac valve opened
5/24/2010	11:32:02 AM	Bypass valve opened
5/24/2010	11:32:02 AM	Helium MFC set to  0.000000
5/24/2010	11:32:02 AM	H2 MFC set to  0.000000
5/24/2010	11:32:02 AM	BCl3 MFC set to  0.000000
5/24/2010	11:32:02 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:32:02 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:32:02 AM	Tube furnace set to 80
5/24/2010	11:34:47 AM	Run aborted at 11:34 AM
5/24/2010	11:34:47 AM	Helium valve closed
5/24/2010	11:34:47 AM	H2 valve closed
5/24/2010	11:34:47 AM	BCl3 valve closed
5/24/2010	11:34:47 AM	PH3 valve closed
5/24/2010	11:34:47 AM	SiCl4 pre valve closed
5/24/2010	11:34:47 AM	SiCl4 post valve closed
5/24/2010	11:34:47 AM	Bypass valve closed
5/24/2010	11:34:47 AM	Main Vac valve closed
5/24/2010	11:34:47 AM	Bubbler valve closed
5/24/2010	11:34:47 AM	Helium MFC set to  0.000000
5/24/2010	11:34:47 AM	H2 MFC set to  0.000000
5/24/2010	11:34:47 AM	BCl3 MFC set to  0.000000
5/24/2010	11:34:47 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:34:47 AM	Tube furnace set to 0
5/24/2010	11:34:55 AM	Recipe started at 11:34 AM
5/24/2010	11:34:55 AM	H2 valve closed
5/24/2010	11:34:55 AM	BCl3 valve closed
5/24/2010	11:34:55 AM	PH3 valve closed
5/24/2010	11:34:55 AM	SiCl4 pre valve closed
5/24/2010	11:34:55 AM	SiCl4 post valve closed
5/24/2010	11:34:55 AM	Main Vac valve closed
5/24/2010	11:34:55 AM	Bypass valve closed
5/24/2010	11:34:55 AM	Bubbler valve closed
5/24/2010	11:34:55 AM	Helium valve opened
5/24/2010	11:34:55 AM	Helium MFC set to  500.000000
5/24/2010	11:34:55 AM	H2 MFC set to  0.000000
5/24/2010	11:34:55 AM	BCl3 MFC set to  0.000000
5/24/2010	11:34:55 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:34:55 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:34:55 AM	Tube furnace set to 80
5/24/2010	11:35:35 AM	Helium valve closed
5/24/2010	11:35:35 AM	H2 valve closed
5/24/2010	11:35:35 AM	BCl3 valve closed
5/24/2010	11:35:36 AM	PH3 valve closed
5/24/2010	11:35:36 AM	SiCl4 pre valve closed
5/24/2010	11:35:36 AM	SiCl4 post valve closed
5/24/2010	11:35:36 AM	Main Vac valve closed
5/24/2010	11:35:36 AM	Bypass valve closed
5/24/2010	11:35:36 AM	Bubbler valve closed
5/24/2010	11:35:36 AM	Helium MFC set to  0.000000
5/24/2010	11:35:36 AM	H2 MFC set to  0.000000
5/24/2010	11:35:36 AM	BCl3 MFC set to  0.000000
5/24/2010	11:35:36 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:35:36 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:35:36 AM	Tube furnace set to 80
5/24/2010	11:35:51 AM	Helium valve closed
5/24/2010	11:35:51 AM	H2 valve closed
5/24/2010	11:35:51 AM	BCl3 valve closed
5/24/2010	11:35:51 AM	PH3 valve closed
5/24/2010	11:35:51 AM	SiCl4 pre valve closed
5/24/2010	11:35:51 AM	SiCl4 post valve closed
5/24/2010	11:35:51 AM	Main Vac valve closed
5/24/2010	11:35:51 AM	Bubbler valve closed
5/24/2010	11:35:51 AM	Bypass valve opened
5/24/2010	11:35:51 AM	Helium MFC set to  0.000000
5/24/2010	11:35:51 AM	H2 MFC set to  0.000000
5/24/2010	11:35:51 AM	BCl3 MFC set to  0.000000
5/24/2010	11:35:51 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:35:51 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:35:51 AM	Tube furnace set to 80
5/24/2010	11:36:17 AM	Helium valve closed
5/24/2010	11:36:17 AM	H2 valve closed
5/24/2010	11:36:17 AM	BCl3 valve closed
5/24/2010	11:36:17 AM	PH3 valve closed
5/24/2010	11:36:17 AM	SiCl4 pre valve closed
5/24/2010	11:36:17 AM	SiCl4 post valve closed
5/24/2010	11:36:17 AM	Bubbler valve closed
5/24/2010	11:36:17 AM	Main Vac valve opened
5/24/2010	11:36:17 AM	Bypass valve opened
5/24/2010	11:36:17 AM	Helium MFC set to  0.000000
5/24/2010	11:36:17 AM	H2 MFC set to  0.000000
5/24/2010	11:36:17 AM	BCl3 MFC set to  0.000000
5/24/2010	11:36:17 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:36:17 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:36:18 AM	Tube furnace set to 80
5/24/2010	11:39:18 AM	H2 valve closed
5/24/2010	11:39:18 AM	BCl3 valve closed
5/24/2010	11:39:18 AM	PH3 valve closed
5/24/2010	11:39:18 AM	SiCl4 pre valve closed
5/24/2010	11:39:18 AM	SiCl4 post valve closed
5/24/2010	11:39:18 AM	Main Vac valve closed
5/24/2010	11:39:18 AM	Bypass valve closed
5/24/2010	11:39:18 AM	Bubbler valve closed
5/24/2010	11:39:18 AM	Helium valve opened
5/24/2010	11:39:18 AM	Helium MFC set to  500.000000
5/24/2010	11:39:18 AM	H2 MFC set to  0.000000
5/24/2010	11:39:18 AM	BCl3 MFC set to  0.000000
5/24/2010	11:39:18 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:39:18 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:39:18 AM	Tube furnace set to 80
5/24/2010	11:39:59 AM	Helium valve closed
5/24/2010	11:39:59 AM	H2 valve closed
5/24/2010	11:39:59 AM	BCl3 valve closed
5/24/2010	11:39:59 AM	PH3 valve closed
5/24/2010	11:39:59 AM	SiCl4 pre valve closed
5/24/2010	11:39:59 AM	SiCl4 post valve closed
5/24/2010	11:39:59 AM	Main Vac valve closed
5/24/2010	11:39:59 AM	Bypass valve closed
5/24/2010	11:39:59 AM	Bubbler valve closed
5/24/2010	11:39:59 AM	Helium MFC set to  0.000000
5/24/2010	11:39:59 AM	H2 MFC set to  0.000000
5/24/2010	11:39:59 AM	BCl3 MFC set to  0.000000
5/24/2010	11:39:59 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:39:59 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:39:59 AM	Tube furnace set to 80
5/24/2010	11:40:14 AM	Helium valve closed
5/24/2010	11:40:14 AM	H2 valve closed
5/24/2010	11:40:14 AM	BCl3 valve closed
5/24/2010	11:40:14 AM	PH3 valve closed
5/24/2010	11:40:14 AM	SiCl4 pre valve closed
5/24/2010	11:40:14 AM	SiCl4 post valve closed
5/24/2010	11:40:14 AM	Main Vac valve closed
5/24/2010	11:40:14 AM	Bubbler valve closed
5/24/2010	11:40:14 AM	Bypass valve opened
5/24/2010	11:40:14 AM	Helium MFC set to  0.000000
5/24/2010	11:40:14 AM	H2 MFC set to  0.000000
5/24/2010	11:40:14 AM	BCl3 MFC set to  0.000000
5/24/2010	11:40:14 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:40:14 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:40:14 AM	Tube furnace set to 80
5/24/2010	11:40:41 AM	Helium valve closed
5/24/2010	11:40:41 AM	H2 valve closed
5/24/2010	11:40:41 AM	BCl3 valve closed
5/24/2010	11:40:41 AM	PH3 valve closed
5/24/2010	11:40:41 AM	SiCl4 pre valve closed
5/24/2010	11:40:41 AM	SiCl4 post valve closed
5/24/2010	11:40:41 AM	Bubbler valve closed
5/24/2010	11:40:41 AM	Main Vac valve opened
5/24/2010	11:40:41 AM	Bypass valve opened
5/24/2010	11:40:41 AM	Helium MFC set to  0.000000
5/24/2010	11:40:41 AM	H2 MFC set to  0.000000
5/24/2010	11:40:41 AM	BCl3 MFC set to  0.000000
5/24/2010	11:40:41 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:40:41 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:40:41 AM	Tube furnace set to 80
5/24/2010	11:41:26 AM	Run aborted at 11:41 AM
5/24/2010	11:41:26 AM	Helium valve closed
5/24/2010	11:41:26 AM	H2 valve closed
5/24/2010	11:41:26 AM	BCl3 valve closed
5/24/2010	11:41:26 AM	PH3 valve closed
5/24/2010	11:41:26 AM	SiCl4 pre valve closed
5/24/2010	11:41:26 AM	SiCl4 post valve closed
5/24/2010	11:41:26 AM	Bypass valve closed
5/24/2010	11:41:26 AM	Main Vac valve closed
5/24/2010	11:41:26 AM	Bubbler valve closed
5/24/2010	11:41:26 AM	Helium MFC set to  0.000000
5/24/2010	11:41:26 AM	H2 MFC set to  0.000000
5/24/2010	11:41:26 AM	BCl3 MFC set to  0.000000
5/24/2010	11:41:26 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:41:26 AM	Tube furnace set to 0
5/24/2010	11:41:30 AM	Recipe started at 11:41 AM
5/24/2010	11:41:30 AM	H2 valve closed
5/24/2010	11:41:30 AM	BCl3 valve closed
5/24/2010	11:41:30 AM	PH3 valve closed
5/24/2010	11:41:30 AM	SiCl4 pre valve closed
5/24/2010	11:41:30 AM	SiCl4 post valve closed
5/24/2010	11:41:30 AM	Main Vac valve closed
5/24/2010	11:41:30 AM	Bypass valve closed
5/24/2010	11:41:30 AM	Bubbler valve closed
5/24/2010	11:41:30 AM	Helium valve opened
5/24/2010	11:41:30 AM	Helium MFC set to  500.000000
5/24/2010	11:41:30 AM	H2 MFC set to  0.000000
5/24/2010	11:41:30 AM	BCl3 MFC set to  0.000000
5/24/2010	11:41:30 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:41:30 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:41:30 AM	Tube furnace set to 80
5/24/2010	11:42:11 AM	Helium valve closed
5/24/2010	11:42:11 AM	H2 valve closed
5/24/2010	11:42:11 AM	BCl3 valve closed
5/24/2010	11:42:11 AM	PH3 valve closed
5/24/2010	11:42:11 AM	SiCl4 pre valve closed
5/24/2010	11:42:11 AM	SiCl4 post valve closed
5/24/2010	11:42:11 AM	Main Vac valve closed
5/24/2010	11:42:11 AM	Bypass valve closed
5/24/2010	11:42:11 AM	Bubbler valve closed
5/24/2010	11:42:11 AM	Helium MFC set to  0.000000
5/24/2010	11:42:11 AM	H2 MFC set to  0.000000
5/24/2010	11:42:11 AM	BCl3 MFC set to  0.000000
5/24/2010	11:42:11 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:42:11 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:42:11 AM	Tube furnace set to 80
5/24/2010	11:42:26 AM	Helium valve closed
5/24/2010	11:42:26 AM	H2 valve closed
5/24/2010	11:42:26 AM	BCl3 valve closed
5/24/2010	11:42:26 AM	PH3 valve closed
5/24/2010	11:42:26 AM	SiCl4 pre valve closed
5/24/2010	11:42:26 AM	SiCl4 post valve closed
5/24/2010	11:42:26 AM	Main Vac valve closed
5/24/2010	11:42:26 AM	Bubbler valve closed
5/24/2010	11:42:26 AM	Bypass valve opened
5/24/2010	11:42:26 AM	Helium MFC set to  0.000000
5/24/2010	11:42:26 AM	H2 MFC set to  0.000000
5/24/2010	11:42:26 AM	BCl3 MFC set to  0.000000
5/24/2010	11:42:26 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:42:26 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:42:26 AM	Tube furnace set to 80
5/24/2010	11:42:53 AM	Helium valve closed
5/24/2010	11:42:53 AM	H2 valve closed
5/24/2010	11:42:53 AM	BCl3 valve closed
5/24/2010	11:42:53 AM	PH3 valve closed
5/24/2010	11:42:53 AM	SiCl4 pre valve closed
5/24/2010	11:42:53 AM	SiCl4 post valve closed
5/24/2010	11:42:53 AM	Bubbler valve closed
5/24/2010	11:42:53 AM	Main Vac valve opened
5/24/2010	11:42:53 AM	Bypass valve opened
5/24/2010	11:42:53 AM	Helium MFC set to  0.000000
5/24/2010	11:42:53 AM	H2 MFC set to  0.000000
5/24/2010	11:42:53 AM	BCl3 MFC set to  0.000000
5/24/2010	11:42:53 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:42:53 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:42:53 AM	Tube furnace set to 80
5/24/2010	11:45:53 AM	H2 valve closed
5/24/2010	11:45:53 AM	BCl3 valve closed
5/24/2010	11:45:53 AM	PH3 valve closed
5/24/2010	11:45:53 AM	SiCl4 pre valve closed
5/24/2010	11:45:53 AM	SiCl4 post valve closed
5/24/2010	11:45:53 AM	Main Vac valve closed
5/24/2010	11:45:53 AM	Bypass valve closed
5/24/2010	11:45:53 AM	Bubbler valve closed
5/24/2010	11:45:53 AM	Helium valve opened
5/24/2010	11:45:53 AM	Helium MFC set to  500.000000
5/24/2010	11:45:53 AM	H2 MFC set to  0.000000
5/24/2010	11:45:53 AM	BCl3 MFC set to  0.000000
5/24/2010	11:45:53 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:45:53 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:45:53 AM	Tube furnace set to 80
5/24/2010	11:46:35 AM	Helium valve closed
5/24/2010	11:46:35 AM	H2 valve closed
5/24/2010	11:46:35 AM	BCl3 valve closed
5/24/2010	11:46:35 AM	PH3 valve closed
5/24/2010	11:46:35 AM	SiCl4 pre valve closed
5/24/2010	11:46:35 AM	SiCl4 post valve closed
5/24/2010	11:46:35 AM	Main Vac valve closed
5/24/2010	11:46:35 AM	Bypass valve closed
5/24/2010	11:46:35 AM	Bubbler valve closed
5/24/2010	11:46:35 AM	Helium MFC set to  0.000000
5/24/2010	11:46:35 AM	H2 MFC set to  0.000000
5/24/2010	11:46:35 AM	BCl3 MFC set to  0.000000
5/24/2010	11:46:35 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:46:35 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:46:35 AM	Tube furnace set to 80
5/24/2010	11:46:50 AM	Helium valve closed
5/24/2010	11:46:50 AM	H2 valve closed
5/24/2010	11:46:50 AM	BCl3 valve closed
5/24/2010	11:46:50 AM	PH3 valve closed
5/24/2010	11:46:50 AM	SiCl4 pre valve closed
5/24/2010	11:46:50 AM	SiCl4 post valve closed
5/24/2010	11:46:50 AM	Main Vac valve closed
5/24/2010	11:46:50 AM	Bubbler valve closed
5/24/2010	11:46:50 AM	Bypass valve opened
5/24/2010	11:46:50 AM	Helium MFC set to  0.000000
5/24/2010	11:46:50 AM	H2 MFC set to  0.000000
5/24/2010	11:46:50 AM	BCl3 MFC set to  0.000000
5/24/2010	11:46:50 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:46:50 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:46:50 AM	Tube furnace set to 80
5/24/2010	11:47:16 AM	Helium valve closed
5/24/2010	11:47:16 AM	H2 valve closed
5/24/2010	11:47:16 AM	BCl3 valve closed
5/24/2010	11:47:16 AM	PH3 valve closed
5/24/2010	11:47:16 AM	SiCl4 pre valve closed
5/24/2010	11:47:16 AM	SiCl4 post valve closed
5/24/2010	11:47:16 AM	Bubbler valve closed
5/24/2010	11:47:16 AM	Main Vac valve opened
5/24/2010	11:47:16 AM	Bypass valve opened
5/24/2010	11:47:16 AM	Helium MFC set to  0.000000
5/24/2010	11:47:16 AM	H2 MFC set to  0.000000
5/24/2010	11:47:16 AM	BCl3 MFC set to  0.000000
5/24/2010	11:47:16 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:47:16 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:47:17 AM	Tube furnace set to 80
5/24/2010	11:50:17 AM	H2 valve closed
5/24/2010	11:50:17 AM	BCl3 valve closed
5/24/2010	11:50:17 AM	PH3 valve closed
5/24/2010	11:50:17 AM	SiCl4 pre valve closed
5/24/2010	11:50:17 AM	SiCl4 post valve closed
5/24/2010	11:50:17 AM	Main Vac valve closed
5/24/2010	11:50:17 AM	Bypass valve closed
5/24/2010	11:50:17 AM	Bubbler valve closed
5/24/2010	11:50:17 AM	Helium valve opened
5/24/2010	11:50:17 AM	Helium MFC set to  500.000000
5/24/2010	11:50:17 AM	H2 MFC set to  0.000000
5/24/2010	11:50:17 AM	BCl3 MFC set to  0.000000
5/24/2010	11:50:17 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:50:17 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:50:17 AM	Tube furnace set to 80
5/24/2010	11:50:58 AM	Helium valve closed
5/24/2010	11:50:58 AM	H2 valve closed
5/24/2010	11:50:58 AM	BCl3 valve closed
5/24/2010	11:50:58 AM	PH3 valve closed
5/24/2010	11:50:58 AM	SiCl4 pre valve closed
5/24/2010	11:50:58 AM	SiCl4 post valve closed
5/24/2010	11:50:58 AM	Main Vac valve closed
5/24/2010	11:50:58 AM	Bypass valve closed
5/24/2010	11:50:58 AM	Bubbler valve closed
5/24/2010	11:50:58 AM	Helium MFC set to  0.000000
5/24/2010	11:50:58 AM	H2 MFC set to  0.000000
5/24/2010	11:50:58 AM	BCl3 MFC set to  0.000000
5/24/2010	11:50:58 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:50:58 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:50:58 AM	Tube furnace set to 80
5/24/2010	11:51:13 AM	Helium valve closed
5/24/2010	11:51:13 AM	H2 valve closed
5/24/2010	11:51:13 AM	BCl3 valve closed
5/24/2010	11:51:13 AM	PH3 valve closed
5/24/2010	11:51:13 AM	SiCl4 pre valve closed
5/24/2010	11:51:13 AM	SiCl4 post valve closed
5/24/2010	11:51:13 AM	Main Vac valve closed
5/24/2010	11:51:13 AM	Bubbler valve closed
5/24/2010	11:51:13 AM	Bypass valve opened
5/24/2010	11:51:13 AM	Helium MFC set to  0.000000
5/24/2010	11:51:13 AM	H2 MFC set to  0.000000
5/24/2010	11:51:13 AM	BCl3 MFC set to  0.000000
5/24/2010	11:51:13 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:51:13 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:51:14 AM	Tube furnace set to 80
5/24/2010	11:51:40 AM	Helium valve closed
5/24/2010	11:51:40 AM	H2 valve closed
5/24/2010	11:51:40 AM	BCl3 valve closed
5/24/2010	11:51:40 AM	PH3 valve closed
5/24/2010	11:51:40 AM	SiCl4 pre valve closed
5/24/2010	11:51:40 AM	SiCl4 post valve closed
5/24/2010	11:51:40 AM	Bubbler valve closed
5/24/2010	11:51:40 AM	Main Vac valve opened
5/24/2010	11:51:40 AM	Bypass valve opened
5/24/2010	11:51:40 AM	Helium MFC set to  0.000000
5/24/2010	11:51:40 AM	H2 MFC set to  0.000000
5/24/2010	11:51:40 AM	BCl3 MFC set to  0.000000
5/24/2010	11:51:40 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:51:40 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:51:40 AM	Tube furnace set to 80
5/24/2010	11:53:56 AM	Helium valve closed
5/24/2010	11:53:56 AM	H2 valve closed
5/24/2010	11:53:56 AM	BCl3 valve closed
5/24/2010	11:53:56 AM	PH3 valve closed
5/24/2010	11:53:56 AM	SiCl4 pre valve closed
5/24/2010	11:53:56 AM	SiCl4 post valve closed
5/24/2010	11:53:56 AM	Bubbler valve closed
5/24/2010	11:53:56 AM	Main Vac valve opened
5/24/2010	11:53:56 AM	Bypass valve opened
5/24/2010	11:53:56 AM	Helium MFC set to  0.000000
5/24/2010	11:53:56 AM	H2 MFC set to  0.000000
5/24/2010	11:53:56 AM	BCl3 MFC set to  0.000000
5/24/2010	11:53:56 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:53:56 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:53:56 AM	Tube furnace set to 0
5/24/2010	11:53:57 AM	Run finished at 11:53 AM
5/24/2010	11:54:01 AM	Recipe started at 11:53 AM
5/24/2010	11:54:01 AM	H2 valve closed
5/24/2010	11:54:01 AM	BCl3 valve closed
5/24/2010	11:54:01 AM	PH3 valve closed
5/24/2010	11:54:01 AM	SiCl4 pre valve closed
5/24/2010	11:54:01 AM	SiCl4 post valve closed
5/24/2010	11:54:01 AM	Main Vac valve closed
5/24/2010	11:54:01 AM	Bypass valve closed
5/24/2010	11:54:01 AM	Bubbler valve closed
5/24/2010	11:54:01 AM	Helium valve opened
5/24/2010	11:54:01 AM	Helium MFC set to  500.000000
5/24/2010	11:54:01 AM	H2 MFC set to  0.000000
5/24/2010	11:54:01 AM	BCl3 MFC set to  0.000000
5/24/2010	11:54:01 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:54:01 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:54:01 AM	Tube furnace set to 80
5/24/2010	11:54:43 AM	Helium valve closed
5/24/2010	11:54:43 AM	H2 valve closed
5/24/2010	11:54:43 AM	BCl3 valve closed
5/24/2010	11:54:43 AM	PH3 valve closed
5/24/2010	11:54:43 AM	SiCl4 pre valve closed
5/24/2010	11:54:43 AM	SiCl4 post valve closed
5/24/2010	11:54:43 AM	Main Vac valve closed
5/24/2010	11:54:43 AM	Bypass valve closed
5/24/2010	11:54:43 AM	Bubbler valve closed
5/24/2010	11:54:43 AM	Helium MFC set to  0.000000
5/24/2010	11:54:43 AM	H2 MFC set to  0.000000
5/24/2010	11:54:43 AM	BCl3 MFC set to  0.000000
5/24/2010	11:54:43 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:54:43 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:54:43 AM	Tube furnace set to 80
5/24/2010	11:54:58 AM	Helium valve closed
5/24/2010	11:54:58 AM	H2 valve closed
5/24/2010	11:54:58 AM	BCl3 valve closed
5/24/2010	11:54:58 AM	PH3 valve closed
5/24/2010	11:54:58 AM	SiCl4 pre valve closed
5/24/2010	11:54:58 AM	SiCl4 post valve closed
5/24/2010	11:54:58 AM	Main Vac valve closed
5/24/2010	11:54:58 AM	Bubbler valve closed
5/24/2010	11:54:58 AM	Bypass valve opened
5/24/2010	11:54:58 AM	Helium MFC set to  0.000000
5/24/2010	11:54:58 AM	H2 MFC set to  0.000000
5/24/2010	11:54:58 AM	BCl3 MFC set to  0.000000
5/24/2010	11:54:58 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:54:58 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:54:58 AM	Tube furnace set to 80
5/24/2010	11:55:25 AM	Helium valve closed
5/24/2010	11:55:25 AM	H2 valve closed
5/24/2010	11:55:25 AM	BCl3 valve closed
5/24/2010	11:55:25 AM	PH3 valve closed
5/24/2010	11:55:25 AM	SiCl4 pre valve closed
5/24/2010	11:55:25 AM	SiCl4 post valve closed
5/24/2010	11:55:25 AM	Bubbler valve closed
5/24/2010	11:55:25 AM	Main Vac valve opened
5/24/2010	11:55:25 AM	Bypass valve opened
5/24/2010	11:55:25 AM	Helium MFC set to  0.000000
5/24/2010	11:55:25 AM	H2 MFC set to  0.000000
5/24/2010	11:55:25 AM	BCl3 MFC set to  0.000000
5/24/2010	11:55:25 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:55:25 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:55:25 AM	Tube furnace set to 80
5/24/2010	11:58:25 AM	H2 valve closed
5/24/2010	11:58:25 AM	BCl3 valve closed
5/24/2010	11:58:25 AM	PH3 valve closed
5/24/2010	11:58:25 AM	SiCl4 pre valve closed
5/24/2010	11:58:25 AM	SiCl4 post valve closed
5/24/2010	11:58:25 AM	Main Vac valve closed
5/24/2010	11:58:25 AM	Bypass valve closed
5/24/2010	11:58:25 AM	Bubbler valve closed
5/24/2010	11:58:25 AM	Helium valve opened
5/24/2010	11:58:25 AM	Helium MFC set to  500.000000
5/24/2010	11:58:25 AM	H2 MFC set to  0.000000
5/24/2010	11:58:25 AM	BCl3 MFC set to  0.000000
5/24/2010	11:58:25 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:58:25 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:58:25 AM	Tube furnace set to 80
5/24/2010	11:59:06 AM	Helium valve closed
5/24/2010	11:59:06 AM	H2 valve closed
5/24/2010	11:59:06 AM	BCl3 valve closed
5/24/2010	11:59:06 AM	PH3 valve closed
5/24/2010	11:59:06 AM	SiCl4 pre valve closed
5/24/2010	11:59:06 AM	SiCl4 post valve closed
5/24/2010	11:59:06 AM	Main Vac valve closed
5/24/2010	11:59:06 AM	Bypass valve closed
5/24/2010	11:59:06 AM	Bubbler valve closed
5/24/2010	11:59:06 AM	Helium MFC set to  0.000000
5/24/2010	11:59:06 AM	H2 MFC set to  0.000000
5/24/2010	11:59:06 AM	BCl3 MFC set to  0.000000
5/24/2010	11:59:06 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:59:06 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:59:07 AM	Tube furnace set to 80
5/24/2010	11:59:22 AM	Helium valve closed
5/24/2010	11:59:22 AM	H2 valve closed
5/24/2010	11:59:22 AM	BCl3 valve closed
5/24/2010	11:59:22 AM	PH3 valve closed
5/24/2010	11:59:22 AM	SiCl4 pre valve closed
5/24/2010	11:59:22 AM	SiCl4 post valve closed
5/24/2010	11:59:22 AM	Main Vac valve closed
5/24/2010	11:59:22 AM	Bubbler valve closed
5/24/2010	11:59:22 AM	Bypass valve opened
5/24/2010	11:59:22 AM	Helium MFC set to  0.000000
5/24/2010	11:59:22 AM	H2 MFC set to  0.000000
5/24/2010	11:59:22 AM	BCl3 MFC set to  0.000000
5/24/2010	11:59:22 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:59:22 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:59:22 AM	Tube furnace set to 80
5/24/2010	11:59:48 AM	Helium valve closed
5/24/2010	11:59:48 AM	H2 valve closed
5/24/2010	11:59:48 AM	BCl3 valve closed
5/24/2010	11:59:48 AM	PH3 valve closed
5/24/2010	11:59:48 AM	SiCl4 pre valve closed
5/24/2010	11:59:48 AM	SiCl4 post valve closed
5/24/2010	11:59:48 AM	Bubbler valve closed
5/24/2010	11:59:48 AM	Main Vac valve opened
5/24/2010	11:59:48 AM	Bypass valve opened
5/24/2010	11:59:48 AM	Helium MFC set to  0.000000
5/24/2010	11:59:48 AM	H2 MFC set to  0.000000
5/24/2010	11:59:48 AM	BCl3 MFC set to  0.000000
5/24/2010	11:59:48 AM	SiCl4 MFC set to  0.000000
5/24/2010	11:59:48 AM	Bypass solenoid MFC set to  0.000000
5/24/2010	11:59:48 AM	Tube furnace set to 80
5/24/2010	12:02:49 PM	H2 valve closed
5/24/2010	12:02:49 PM	BCl3 valve closed
5/24/2010	12:02:49 PM	PH3 valve closed
5/24/2010	12:02:49 PM	SiCl4 pre valve closed
5/24/2010	12:02:49 PM	SiCl4 post valve closed
5/24/2010	12:02:49 PM	Main Vac valve closed
5/24/2010	12:02:49 PM	Bypass valve closed
5/24/2010	12:02:49 PM	Bubbler valve closed
5/24/2010	12:02:49 PM	Helium valve opened
5/24/2010	12:02:49 PM	Helium MFC set to  500.000000
5/24/2010	12:02:49 PM	H2 MFC set to  0.000000
5/24/2010	12:02:49 PM	BCl3 MFC set to  0.000000
5/24/2010	12:02:49 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:02:49 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:02:49 PM	Tube furnace set to 80
5/24/2010	12:03:30 PM	Helium valve closed
5/24/2010	12:03:30 PM	H2 valve closed
5/24/2010	12:03:30 PM	BCl3 valve closed
5/24/2010	12:03:30 PM	PH3 valve closed
5/24/2010	12:03:30 PM	SiCl4 pre valve closed
5/24/2010	12:03:30 PM	SiCl4 post valve closed
5/24/2010	12:03:30 PM	Main Vac valve closed
5/24/2010	12:03:30 PM	Bypass valve closed
5/24/2010	12:03:30 PM	Bubbler valve closed
5/24/2010	12:03:30 PM	Helium MFC set to  0.000000
5/24/2010	12:03:30 PM	H2 MFC set to  0.000000
5/24/2010	12:03:30 PM	BCl3 MFC set to  0.000000
5/24/2010	12:03:30 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:03:30 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:03:30 PM	Tube furnace set to 80
5/24/2010	12:03:45 PM	Helium valve closed
5/24/2010	12:03:45 PM	H2 valve closed
5/24/2010	12:03:45 PM	BCl3 valve closed
5/24/2010	12:03:45 PM	PH3 valve closed
5/24/2010	12:03:45 PM	SiCl4 pre valve closed
5/24/2010	12:03:45 PM	SiCl4 post valve closed
5/24/2010	12:03:45 PM	Main Vac valve closed
5/24/2010	12:03:45 PM	Bubbler valve closed
5/24/2010	12:03:45 PM	Bypass valve opened
5/24/2010	12:03:45 PM	Helium MFC set to  0.000000
5/24/2010	12:03:45 PM	H2 MFC set to  0.000000
5/24/2010	12:03:45 PM	BCl3 MFC set to  0.000000
5/24/2010	12:03:45 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:03:45 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:03:46 PM	Tube furnace set to 80
5/24/2010	12:04:12 PM	Helium valve closed
5/24/2010	12:04:12 PM	H2 valve closed
5/24/2010	12:04:12 PM	BCl3 valve closed
5/24/2010	12:04:12 PM	PH3 valve closed
5/24/2010	12:04:12 PM	SiCl4 pre valve closed
5/24/2010	12:04:12 PM	SiCl4 post valve closed
5/24/2010	12:04:12 PM	Bubbler valve closed
5/24/2010	12:04:12 PM	Main Vac valve opened
5/24/2010	12:04:12 PM	Bypass valve opened
5/24/2010	12:04:12 PM	Helium MFC set to  0.000000
5/24/2010	12:04:12 PM	H2 MFC set to  0.000000
5/24/2010	12:04:12 PM	BCl3 MFC set to  0.000000
5/24/2010	12:04:12 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:04:12 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:04:12 PM	Tube furnace set to 80
5/24/2010	12:05:02 PM	Helium valve closed
5/24/2010	12:05:02 PM	H2 valve closed
5/24/2010	12:05:02 PM	BCl3 valve closed
5/24/2010	12:05:02 PM	PH3 valve closed
5/24/2010	12:05:02 PM	SiCl4 pre valve closed
5/24/2010	12:05:02 PM	SiCl4 post valve closed
5/24/2010	12:05:02 PM	Bubbler valve closed
5/24/2010	12:05:02 PM	Main Vac valve opened
5/24/2010	12:05:02 PM	Bypass valve opened
5/24/2010	12:05:02 PM	Helium MFC set to  0.000000
5/24/2010	12:05:02 PM	H2 MFC set to  0.000000
5/24/2010	12:05:02 PM	BCl3 MFC set to  0.000000
5/24/2010	12:05:02 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:05:02 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:05:02 PM	Tube furnace set to 0
5/24/2010	12:05:03 PM	Run finished at 12:05 PM
5/24/2010	12:05:21 PM	Bypass valve closed
5/24/2010	12:05:21 PM	Main Vac valve closed
5/24/2010	12:05:43 PM	Main Vac valve opened
5/24/2010	12:05:43 PM	Bypass valve opened
5/24/2010	12:07:31 PM	Recipe started at 12:07 PM
5/24/2010	12:07:31 PM	Helium valve closed
5/24/2010	12:07:31 PM	BCl3 valve closed
5/24/2010	12:07:31 PM	PH3 valve closed
5/24/2010	12:07:31 PM	SiCl4 pre valve closed
5/24/2010	12:07:31 PM	SiCl4 post valve closed
5/24/2010	12:07:31 PM	Main Vac valve closed
5/24/2010	12:07:31 PM	Bypass valve closed
5/24/2010	12:07:31 PM	Bubbler valve closed
5/24/2010	12:07:31 PM	H2 valve opened
5/24/2010	12:07:31 PM	Helium MFC set to  0.000000
5/24/2010	12:07:31 PM	H2 MFC set to  500.000000
5/24/2010	12:07:31 PM	BCl3 MFC set to  0.000000
5/24/2010	12:07:31 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:07:31 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:07:31 PM	Tube furnace set to 0
5/24/2010	12:08:50 PM	Helium valve closed
5/24/2010	12:08:50 PM	BCl3 valve closed
5/24/2010	12:08:50 PM	PH3 valve closed
5/24/2010	12:08:50 PM	SiCl4 pre valve closed
5/24/2010	12:08:50 PM	SiCl4 post valve closed
5/24/2010	12:08:50 PM	Main Vac valve closed
5/24/2010	12:08:50 PM	Bypass valve closed
5/24/2010	12:08:50 PM	H2 valve opened
5/24/2010	12:08:50 PM	Bubbler valve opened
5/24/2010	12:08:50 PM	Helium MFC set to  0.000000
5/24/2010	12:08:50 PM	H2 MFC set to  500.000000
5/24/2010	12:08:50 PM	BCl3 MFC set to  0.000000
5/24/2010	12:08:50 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:08:50 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:08:50 PM	Tube furnace set to 1000
5/24/2010	12:28:50 PM	Helium valve closed
5/24/2010	12:28:50 PM	PH3 valve closed
5/24/2010	12:28:50 PM	Main Vac valve closed
5/24/2010	12:28:50 PM	Bypass valve closed
5/24/2010	12:28:50 PM	H2 valve opened
5/24/2010	12:28:50 PM	BCl3 valve opened
5/24/2010	12:28:50 PM	SiCl4 pre valve opened
5/24/2010	12:28:50 PM	SiCl4 post valve opened
5/24/2010	12:28:50 PM	Bubbler valve opened
5/24/2010	12:28:50 PM	Helium MFC set to  0.000000
5/24/2010	12:28:50 PM	H2 MFC set to  500.000000
5/24/2010	12:28:50 PM	BCl3 MFC set to  35.000000
5/24/2010	12:28:50 PM	SiCl4 MFC set to  450.000000
5/24/2010	12:28:50 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:28:50 PM	Tube furnace set to 1000
5/24/2010	12:38:50 PM	H2 valve closed
5/24/2010	12:38:50 PM	BCl3 valve closed
5/24/2010	12:38:50 PM	PH3 valve closed
5/24/2010	12:38:50 PM	SiCl4 pre valve closed
5/24/2010	12:38:50 PM	SiCl4 post valve closed
5/24/2010	12:38:50 PM	Main Vac valve closed
5/24/2010	12:38:50 PM	Bypass valve closed
5/24/2010	12:38:50 PM	Helium valve opened
5/24/2010	12:38:50 PM	Bubbler valve opened
5/24/2010	12:38:50 PM	Helium MFC set to  500.000000
5/24/2010	12:38:50 PM	H2 MFC set to  0.000000
5/24/2010	12:38:50 PM	BCl3 MFC set to  0.000000
5/24/2010	12:38:50 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:38:50 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:38:50 PM	Tube furnace set to 0
5/24/2010	12:58:50 PM	Helium valve closed
5/24/2010	12:58:50 PM	H2 valve closed
5/24/2010	12:58:50 PM	BCl3 valve closed
5/24/2010	12:58:50 PM	PH3 valve closed
5/24/2010	12:58:50 PM	SiCl4 pre valve closed
5/24/2010	12:58:50 PM	SiCl4 post valve closed
5/24/2010	12:58:50 PM	Main Vac valve closed
5/24/2010	12:58:50 PM	Bypass valve closed
5/24/2010	12:58:50 PM	Bubbler valve closed
5/24/2010	12:58:50 PM	Helium MFC set to  0.000000
5/24/2010	12:58:50 PM	H2 MFC set to  0.000000
5/24/2010	12:58:50 PM	BCl3 MFC set to  0.000000
5/24/2010	12:58:50 PM	SiCl4 MFC set to  0.000000
5/24/2010	12:58:50 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	12:58:50 PM	Tube furnace set to 0
5/24/2010	12:58:51 PM	Run finished at 12:58 PM
5/24/2010	1:01:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	1:01:53 PM	Recipe started at 1:01 PM
5/24/2010	1:01:54 PM	Helium valve closed
5/24/2010	1:01:54 PM	H2 valve closed
5/24/2010	1:01:54 PM	BCl3 valve closed
5/24/2010	1:01:54 PM	PH3 valve closed
5/24/2010	1:01:54 PM	SiCl4 pre valve closed
5/24/2010	1:01:54 PM	SiCl4 post valve closed
5/24/2010	1:01:54 PM	Main Vac valve closed
5/24/2010	1:01:54 PM	Bubbler valve closed
5/24/2010	1:01:54 PM	Bypass valve opened
5/24/2010	1:01:54 PM	Helium MFC set to  0.000000
5/24/2010	1:01:54 PM	H2 MFC set to  0.000000
5/24/2010	1:01:54 PM	BCl3 MFC set to  0.000000
5/24/2010	1:01:54 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:01:54 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:01:54 PM	Tube furnace set to 0
5/24/2010	1:02:39 PM	Helium valve closed
5/24/2010	1:02:39 PM	H2 valve closed
5/24/2010	1:02:39 PM	BCl3 valve closed
5/24/2010	1:02:39 PM	PH3 valve closed
5/24/2010	1:02:39 PM	SiCl4 pre valve closed
5/24/2010	1:02:39 PM	SiCl4 post valve closed
5/24/2010	1:02:39 PM	Bubbler valve closed
5/24/2010	1:02:39 PM	Main Vac valve opened
5/24/2010	1:02:39 PM	Bypass valve opened
5/24/2010	1:02:39 PM	Helium MFC set to  0.000000
5/24/2010	1:02:39 PM	H2 MFC set to  0.000000
5/24/2010	1:02:39 PM	BCl3 MFC set to  0.000000
5/24/2010	1:02:39 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:02:39 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:02:40 PM	Tube furnace set to 0
5/24/2010	1:02:40 PM	Run finished at 1:02 PM
5/24/2010	1:02:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	1:03:00 PM	Recipe started at 1:02 PM
5/24/2010	1:03:00 PM	H2 valve closed
5/24/2010	1:03:00 PM	BCl3 valve closed
5/24/2010	1:03:00 PM	PH3 valve closed
5/24/2010	1:03:00 PM	SiCl4 pre valve closed
5/24/2010	1:03:00 PM	SiCl4 post valve closed
5/24/2010	1:03:00 PM	Main Vac valve closed
5/24/2010	1:03:00 PM	Bypass valve closed
5/24/2010	1:03:00 PM	Bubbler valve closed
5/24/2010	1:03:00 PM	Helium valve opened
5/24/2010	1:03:00 PM	Helium MFC set to  500.000000
5/24/2010	1:03:00 PM	H2 MFC set to  0.000000
5/24/2010	1:03:00 PM	BCl3 MFC set to  0.000000
5/24/2010	1:03:00 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:03:00 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:03:00 PM	Tube furnace set to 80
5/24/2010	1:03:42 PM	Helium valve closed
5/24/2010	1:03:42 PM	H2 valve closed
5/24/2010	1:03:42 PM	BCl3 valve closed
5/24/2010	1:03:42 PM	PH3 valve closed
5/24/2010	1:03:42 PM	SiCl4 pre valve closed
5/24/2010	1:03:42 PM	SiCl4 post valve closed
5/24/2010	1:03:42 PM	Main Vac valve closed
5/24/2010	1:03:42 PM	Bypass valve closed
5/24/2010	1:03:42 PM	Bubbler valve closed
5/24/2010	1:03:42 PM	Helium MFC set to  0.000000
5/24/2010	1:03:42 PM	H2 MFC set to  0.000000
5/24/2010	1:03:42 PM	BCl3 MFC set to  0.000000
5/24/2010	1:03:42 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:03:42 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:03:42 PM	Tube furnace set to 80
5/24/2010	1:03:57 PM	Helium valve closed
5/24/2010	1:03:57 PM	H2 valve closed
5/24/2010	1:03:57 PM	BCl3 valve closed
5/24/2010	1:03:57 PM	PH3 valve closed
5/24/2010	1:03:57 PM	SiCl4 pre valve closed
5/24/2010	1:03:57 PM	SiCl4 post valve closed
5/24/2010	1:03:57 PM	Main Vac valve closed
5/24/2010	1:03:57 PM	Bubbler valve closed
5/24/2010	1:03:57 PM	Bypass valve opened
5/24/2010	1:03:57 PM	Helium MFC set to  0.000000
5/24/2010	1:03:57 PM	H2 MFC set to  0.000000
5/24/2010	1:03:57 PM	BCl3 MFC set to  0.000000
5/24/2010	1:03:57 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:03:57 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:03:57 PM	Tube furnace set to 80
5/24/2010	1:04:24 PM	Helium valve closed
5/24/2010	1:04:24 PM	H2 valve closed
5/24/2010	1:04:24 PM	BCl3 valve closed
5/24/2010	1:04:24 PM	PH3 valve closed
5/24/2010	1:04:24 PM	SiCl4 pre valve closed
5/24/2010	1:04:24 PM	SiCl4 post valve closed
5/24/2010	1:04:24 PM	Bubbler valve closed
5/24/2010	1:04:24 PM	Main Vac valve opened
5/24/2010	1:04:24 PM	Bypass valve opened
5/24/2010	1:04:24 PM	Helium MFC set to  0.000000
5/24/2010	1:04:24 PM	H2 MFC set to  0.000000
5/24/2010	1:04:24 PM	BCl3 MFC set to  0.000000
5/24/2010	1:04:24 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:04:24 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:04:25 PM	Tube furnace set to 80
5/24/2010	1:07:25 PM	H2 valve closed
5/24/2010	1:07:25 PM	BCl3 valve closed
5/24/2010	1:07:25 PM	PH3 valve closed
5/24/2010	1:07:25 PM	SiCl4 pre valve closed
5/24/2010	1:07:25 PM	SiCl4 post valve closed
5/24/2010	1:07:25 PM	Main Vac valve closed
5/24/2010	1:07:25 PM	Bypass valve closed
5/24/2010	1:07:25 PM	Bubbler valve closed
5/24/2010	1:07:25 PM	Helium valve opened
5/24/2010	1:07:25 PM	Helium MFC set to  500.000000
5/24/2010	1:07:25 PM	H2 MFC set to  0.000000
5/24/2010	1:07:25 PM	BCl3 MFC set to  0.000000
5/24/2010	1:07:25 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:07:25 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:07:25 PM	Tube furnace set to 80
5/24/2010	1:08:06 PM	Helium valve closed
5/24/2010	1:08:06 PM	H2 valve closed
5/24/2010	1:08:06 PM	BCl3 valve closed
5/24/2010	1:08:06 PM	PH3 valve closed
5/24/2010	1:08:06 PM	SiCl4 pre valve closed
5/24/2010	1:08:06 PM	SiCl4 post valve closed
5/24/2010	1:08:06 PM	Main Vac valve closed
5/24/2010	1:08:06 PM	Bypass valve closed
5/24/2010	1:08:06 PM	Bubbler valve closed
5/24/2010	1:08:06 PM	Helium MFC set to  0.000000
5/24/2010	1:08:06 PM	H2 MFC set to  0.000000
5/24/2010	1:08:06 PM	BCl3 MFC set to  0.000000
5/24/2010	1:08:06 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:08:06 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:08:06 PM	Tube furnace set to 80
5/24/2010	1:08:21 PM	Helium valve closed
5/24/2010	1:08:21 PM	H2 valve closed
5/24/2010	1:08:21 PM	BCl3 valve closed
5/24/2010	1:08:21 PM	PH3 valve closed
5/24/2010	1:08:21 PM	SiCl4 pre valve closed
5/24/2010	1:08:21 PM	SiCl4 post valve closed
5/24/2010	1:08:21 PM	Main Vac valve closed
5/24/2010	1:08:21 PM	Bubbler valve closed
5/24/2010	1:08:21 PM	Bypass valve opened
5/24/2010	1:08:21 PM	Helium MFC set to  0.000000
5/24/2010	1:08:21 PM	H2 MFC set to  0.000000
5/24/2010	1:08:21 PM	BCl3 MFC set to  0.000000
5/24/2010	1:08:21 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:08:21 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:08:21 PM	Tube furnace set to 80
5/24/2010	1:08:48 PM	Helium valve closed
5/24/2010	1:08:48 PM	H2 valve closed
5/24/2010	1:08:48 PM	BCl3 valve closed
5/24/2010	1:08:48 PM	PH3 valve closed
5/24/2010	1:08:48 PM	SiCl4 pre valve closed
5/24/2010	1:08:48 PM	SiCl4 post valve closed
5/24/2010	1:08:48 PM	Bubbler valve closed
5/24/2010	1:08:48 PM	Main Vac valve opened
5/24/2010	1:08:48 PM	Bypass valve opened
5/24/2010	1:08:48 PM	Helium MFC set to  0.000000
5/24/2010	1:08:48 PM	H2 MFC set to  0.000000
5/24/2010	1:08:48 PM	BCl3 MFC set to  0.000000
5/24/2010	1:08:48 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:08:48 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:08:48 PM	Tube furnace set to 80
5/24/2010	1:11:48 PM	H2 valve closed
5/24/2010	1:11:48 PM	BCl3 valve closed
5/24/2010	1:11:48 PM	PH3 valve closed
5/24/2010	1:11:48 PM	SiCl4 pre valve closed
5/24/2010	1:11:48 PM	SiCl4 post valve closed
5/24/2010	1:11:48 PM	Main Vac valve closed
5/24/2010	1:11:48 PM	Bypass valve closed
5/24/2010	1:11:48 PM	Bubbler valve closed
5/24/2010	1:11:48 PM	Helium valve opened
5/24/2010	1:11:48 PM	Helium MFC set to  500.000000
5/24/2010	1:11:48 PM	H2 MFC set to  0.000000
5/24/2010	1:11:48 PM	BCl3 MFC set to  0.000000
5/24/2010	1:11:48 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:11:48 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:11:48 PM	Tube furnace set to 80
5/24/2010	1:12:30 PM	Helium valve closed
5/24/2010	1:12:30 PM	H2 valve closed
5/24/2010	1:12:30 PM	BCl3 valve closed
5/24/2010	1:12:30 PM	PH3 valve closed
5/24/2010	1:12:30 PM	SiCl4 pre valve closed
5/24/2010	1:12:30 PM	SiCl4 post valve closed
5/24/2010	1:12:30 PM	Main Vac valve closed
5/24/2010	1:12:30 PM	Bypass valve closed
5/24/2010	1:12:30 PM	Bubbler valve closed
5/24/2010	1:12:30 PM	Helium MFC set to  0.000000
5/24/2010	1:12:30 PM	H2 MFC set to  0.000000
5/24/2010	1:12:30 PM	BCl3 MFC set to  0.000000
5/24/2010	1:12:30 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:12:30 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:12:30 PM	Tube furnace set to 80
5/24/2010	1:12:45 PM	Helium valve closed
5/24/2010	1:12:45 PM	H2 valve closed
5/24/2010	1:12:45 PM	BCl3 valve closed
5/24/2010	1:12:45 PM	PH3 valve closed
5/24/2010	1:12:45 PM	SiCl4 pre valve closed
5/24/2010	1:12:45 PM	SiCl4 post valve closed
5/24/2010	1:12:45 PM	Main Vac valve closed
5/24/2010	1:12:45 PM	Bubbler valve closed
5/24/2010	1:12:45 PM	Bypass valve opened
5/24/2010	1:12:45 PM	Helium MFC set to  0.000000
5/24/2010	1:12:45 PM	H2 MFC set to  0.000000
5/24/2010	1:12:45 PM	BCl3 MFC set to  0.000000
5/24/2010	1:12:45 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:12:45 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:12:45 PM	Tube furnace set to 80
5/24/2010	1:13:12 PM	Helium valve closed
5/24/2010	1:13:12 PM	H2 valve closed
5/24/2010	1:13:12 PM	BCl3 valve closed
5/24/2010	1:13:12 PM	PH3 valve closed
5/24/2010	1:13:12 PM	SiCl4 pre valve closed
5/24/2010	1:13:12 PM	SiCl4 post valve closed
5/24/2010	1:13:12 PM	Bubbler valve closed
5/24/2010	1:13:12 PM	Main Vac valve opened
5/24/2010	1:13:12 PM	Bypass valve opened
5/24/2010	1:13:12 PM	Helium MFC set to  0.000000
5/24/2010	1:13:12 PM	H2 MFC set to  0.000000
5/24/2010	1:13:12 PM	BCl3 MFC set to  0.000000
5/24/2010	1:13:12 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:13:12 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:13:12 PM	Tube furnace set to 80
5/24/2010	1:13:25 PM	Helium valve closed
5/24/2010	1:13:25 PM	H2 valve closed
5/24/2010	1:13:25 PM	BCl3 valve closed
5/24/2010	1:13:25 PM	PH3 valve closed
5/24/2010	1:13:25 PM	SiCl4 pre valve closed
5/24/2010	1:13:25 PM	SiCl4 post valve closed
5/24/2010	1:13:25 PM	Bubbler valve closed
5/24/2010	1:13:25 PM	Main Vac valve opened
5/24/2010	1:13:25 PM	Bypass valve opened
5/24/2010	1:13:25 PM	Helium MFC set to  0.000000
5/24/2010	1:13:25 PM	H2 MFC set to  0.000000
5/24/2010	1:13:25 PM	BCl3 MFC set to  0.000000
5/24/2010	1:13:25 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:13:25 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:13:25 PM	Tube furnace set to 0
5/24/2010	1:13:26 PM	Run finished at 1:13 PM
5/24/2010	1:13:45 PM	Recipe started at 1:13 PM
5/24/2010	1:13:45 PM	H2 valve closed
5/24/2010	1:13:45 PM	BCl3 valve closed
5/24/2010	1:13:45 PM	PH3 valve closed
5/24/2010	1:13:45 PM	SiCl4 pre valve closed
5/24/2010	1:13:45 PM	SiCl4 post valve closed
5/24/2010	1:13:45 PM	Main Vac valve closed
5/24/2010	1:13:45 PM	Bypass valve closed
5/24/2010	1:13:45 PM	Bubbler valve closed
5/24/2010	1:13:45 PM	Helium valve opened
5/24/2010	1:13:45 PM	Helium MFC set to  500.000000
5/24/2010	1:13:45 PM	H2 MFC set to  0.000000
5/24/2010	1:13:45 PM	BCl3 MFC set to  0.000000
5/24/2010	1:13:45 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:13:45 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:13:45 PM	Tube furnace set to 80
5/24/2010	1:14:26 PM	Helium valve closed
5/24/2010	1:14:26 PM	H2 valve closed
5/24/2010	1:14:26 PM	BCl3 valve closed
5/24/2010	1:14:26 PM	PH3 valve closed
5/24/2010	1:14:26 PM	SiCl4 pre valve closed
5/24/2010	1:14:26 PM	SiCl4 post valve closed
5/24/2010	1:14:26 PM	Main Vac valve closed
5/24/2010	1:14:26 PM	Bypass valve closed
5/24/2010	1:14:26 PM	Bubbler valve closed
5/24/2010	1:14:26 PM	Helium MFC set to  0.000000
5/24/2010	1:14:26 PM	H2 MFC set to  0.000000
5/24/2010	1:14:26 PM	BCl3 MFC set to  0.000000
5/24/2010	1:14:26 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:14:26 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:14:26 PM	Tube furnace set to 80
5/24/2010	1:14:41 PM	Helium valve closed
5/24/2010	1:14:41 PM	H2 valve closed
5/24/2010	1:14:41 PM	BCl3 valve closed
5/24/2010	1:14:41 PM	PH3 valve closed
5/24/2010	1:14:41 PM	SiCl4 pre valve closed
5/24/2010	1:14:41 PM	SiCl4 post valve closed
5/24/2010	1:14:41 PM	Main Vac valve closed
5/24/2010	1:14:41 PM	Bubbler valve closed
5/24/2010	1:14:41 PM	Bypass valve opened
5/24/2010	1:14:41 PM	Helium MFC set to  0.000000
5/24/2010	1:14:41 PM	H2 MFC set to  0.000000
5/24/2010	1:14:41 PM	BCl3 MFC set to  0.000000
5/24/2010	1:14:41 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:14:41 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:14:41 PM	Tube furnace set to 80
5/24/2010	1:15:08 PM	Helium valve closed
5/24/2010	1:15:08 PM	H2 valve closed
5/24/2010	1:15:08 PM	BCl3 valve closed
5/24/2010	1:15:08 PM	PH3 valve closed
5/24/2010	1:15:08 PM	SiCl4 pre valve closed
5/24/2010	1:15:08 PM	SiCl4 post valve closed
5/24/2010	1:15:08 PM	Bubbler valve closed
5/24/2010	1:15:08 PM	Main Vac valve opened
5/24/2010	1:15:08 PM	Bypass valve opened
5/24/2010	1:15:08 PM	Helium MFC set to  0.000000
5/24/2010	1:15:08 PM	H2 MFC set to  0.000000
5/24/2010	1:15:08 PM	BCl3 MFC set to  0.000000
5/24/2010	1:15:08 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:15:08 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:15:08 PM	Tube furnace set to 80
5/24/2010	1:18:08 PM	H2 valve closed
5/24/2010	1:18:08 PM	BCl3 valve closed
5/24/2010	1:18:08 PM	PH3 valve closed
5/24/2010	1:18:08 PM	SiCl4 pre valve closed
5/24/2010	1:18:08 PM	SiCl4 post valve closed
5/24/2010	1:18:08 PM	Main Vac valve closed
5/24/2010	1:18:08 PM	Bypass valve closed
5/24/2010	1:18:08 PM	Bubbler valve closed
5/24/2010	1:18:08 PM	Helium valve opened
5/24/2010	1:18:08 PM	Helium MFC set to  500.000000
5/24/2010	1:18:08 PM	H2 MFC set to  0.000000
5/24/2010	1:18:08 PM	BCl3 MFC set to  0.000000
5/24/2010	1:18:08 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:18:08 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:18:08 PM	Tube furnace set to 80
5/24/2010	1:18:49 PM	Helium valve closed
5/24/2010	1:18:49 PM	H2 valve closed
5/24/2010	1:18:49 PM	BCl3 valve closed
5/24/2010	1:18:49 PM	PH3 valve closed
5/24/2010	1:18:49 PM	SiCl4 pre valve closed
5/24/2010	1:18:49 PM	SiCl4 post valve closed
5/24/2010	1:18:49 PM	Main Vac valve closed
5/24/2010	1:18:49 PM	Bypass valve closed
5/24/2010	1:18:49 PM	Bubbler valve closed
5/24/2010	1:18:49 PM	Helium MFC set to  0.000000
5/24/2010	1:18:49 PM	H2 MFC set to  0.000000
5/24/2010	1:18:49 PM	BCl3 MFC set to  0.000000
5/24/2010	1:18:49 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:18:49 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:18:49 PM	Tube furnace set to 80
5/24/2010	1:19:04 PM	Helium valve closed
5/24/2010	1:19:04 PM	H2 valve closed
5/24/2010	1:19:04 PM	BCl3 valve closed
5/24/2010	1:19:04 PM	PH3 valve closed
5/24/2010	1:19:04 PM	SiCl4 pre valve closed
5/24/2010	1:19:04 PM	SiCl4 post valve closed
5/24/2010	1:19:04 PM	Main Vac valve closed
5/24/2010	1:19:04 PM	Bubbler valve closed
5/24/2010	1:19:04 PM	Bypass valve opened
5/24/2010	1:19:04 PM	Helium MFC set to  0.000000
5/24/2010	1:19:04 PM	H2 MFC set to  0.000000
5/24/2010	1:19:04 PM	BCl3 MFC set to  0.000000
5/24/2010	1:19:04 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:19:04 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:19:05 PM	Tube furnace set to 80
5/24/2010	1:19:31 PM	Helium valve closed
5/24/2010	1:19:31 PM	H2 valve closed
5/24/2010	1:19:31 PM	BCl3 valve closed
5/24/2010	1:19:31 PM	PH3 valve closed
5/24/2010	1:19:31 PM	SiCl4 pre valve closed
5/24/2010	1:19:31 PM	SiCl4 post valve closed
5/24/2010	1:19:31 PM	Bubbler valve closed
5/24/2010	1:19:31 PM	Main Vac valve opened
5/24/2010	1:19:31 PM	Bypass valve opened
5/24/2010	1:19:31 PM	Helium MFC set to  0.000000
5/24/2010	1:19:31 PM	H2 MFC set to  0.000000
5/24/2010	1:19:31 PM	BCl3 MFC set to  0.000000
5/24/2010	1:19:31 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:19:31 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:19:31 PM	Tube furnace set to 80
5/24/2010	1:22:31 PM	H2 valve closed
5/24/2010	1:22:31 PM	BCl3 valve closed
5/24/2010	1:22:31 PM	PH3 valve closed
5/24/2010	1:22:31 PM	SiCl4 pre valve closed
5/24/2010	1:22:31 PM	SiCl4 post valve closed
5/24/2010	1:22:31 PM	Main Vac valve closed
5/24/2010	1:22:31 PM	Bypass valve closed
5/24/2010	1:22:31 PM	Bubbler valve closed
5/24/2010	1:22:31 PM	Helium valve opened
5/24/2010	1:22:31 PM	Helium MFC set to  500.000000
5/24/2010	1:22:31 PM	H2 MFC set to  0.000000
5/24/2010	1:22:31 PM	BCl3 MFC set to  0.000000
5/24/2010	1:22:31 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:22:31 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:22:31 PM	Tube furnace set to 80
5/24/2010	1:23:12 PM	Helium valve closed
5/24/2010	1:23:12 PM	H2 valve closed
5/24/2010	1:23:12 PM	BCl3 valve closed
5/24/2010	1:23:12 PM	PH3 valve closed
5/24/2010	1:23:12 PM	SiCl4 pre valve closed
5/24/2010	1:23:12 PM	SiCl4 post valve closed
5/24/2010	1:23:12 PM	Main Vac valve closed
5/24/2010	1:23:12 PM	Bypass valve closed
5/24/2010	1:23:12 PM	Bubbler valve closed
5/24/2010	1:23:12 PM	Helium MFC set to  0.000000
5/24/2010	1:23:12 PM	H2 MFC set to  0.000000
5/24/2010	1:23:12 PM	BCl3 MFC set to  0.000000
5/24/2010	1:23:12 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:23:12 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:23:13 PM	Tube furnace set to 80
5/24/2010	1:23:28 PM	Helium valve closed
5/24/2010	1:23:28 PM	H2 valve closed
5/24/2010	1:23:28 PM	BCl3 valve closed
5/24/2010	1:23:28 PM	PH3 valve closed
5/24/2010	1:23:28 PM	SiCl4 pre valve closed
5/24/2010	1:23:28 PM	SiCl4 post valve closed
5/24/2010	1:23:28 PM	Main Vac valve closed
5/24/2010	1:23:28 PM	Bubbler valve closed
5/24/2010	1:23:28 PM	Bypass valve opened
5/24/2010	1:23:28 PM	Helium MFC set to  0.000000
5/24/2010	1:23:28 PM	H2 MFC set to  0.000000
5/24/2010	1:23:28 PM	BCl3 MFC set to  0.000000
5/24/2010	1:23:28 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:23:28 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:23:28 PM	Tube furnace set to 80
5/24/2010	1:23:54 PM	Helium valve closed
5/24/2010	1:23:54 PM	H2 valve closed
5/24/2010	1:23:54 PM	BCl3 valve closed
5/24/2010	1:23:54 PM	PH3 valve closed
5/24/2010	1:23:54 PM	SiCl4 pre valve closed
5/24/2010	1:23:54 PM	SiCl4 post valve closed
5/24/2010	1:23:54 PM	Bubbler valve closed
5/24/2010	1:23:54 PM	Main Vac valve opened
5/24/2010	1:23:54 PM	Bypass valve opened
5/24/2010	1:23:54 PM	Helium MFC set to  0.000000
5/24/2010	1:23:54 PM	H2 MFC set to  0.000000
5/24/2010	1:23:54 PM	BCl3 MFC set to  0.000000
5/24/2010	1:23:54 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:23:54 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:23:54 PM	Tube furnace set to 80
5/24/2010	1:24:28 PM	Helium valve closed
5/24/2010	1:24:28 PM	H2 valve closed
5/24/2010	1:24:28 PM	BCl3 valve closed
5/24/2010	1:24:28 PM	PH3 valve closed
5/24/2010	1:24:28 PM	SiCl4 pre valve closed
5/24/2010	1:24:28 PM	SiCl4 post valve closed
5/24/2010	1:24:28 PM	Bubbler valve closed
5/24/2010	1:24:28 PM	Main Vac valve opened
5/24/2010	1:24:28 PM	Bypass valve opened
5/24/2010	1:24:28 PM	Helium MFC set to  0.000000
5/24/2010	1:24:28 PM	H2 MFC set to  0.000000
5/24/2010	1:24:28 PM	BCl3 MFC set to  0.000000
5/24/2010	1:24:28 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:24:28 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:24:28 PM	Tube furnace set to 0
5/24/2010	1:24:29 PM	Run finished at 1:24 PM
5/24/2010	1:24:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	1:24:55 PM	Recipe started at 1:24 PM
5/24/2010	1:24:55 PM	H2 valve closed
5/24/2010	1:24:55 PM	BCl3 valve closed
5/24/2010	1:24:55 PM	PH3 valve closed
5/24/2010	1:24:55 PM	SiCl4 pre valve closed
5/24/2010	1:24:55 PM	SiCl4 post valve closed
5/24/2010	1:24:55 PM	Main Vac valve closed
5/24/2010	1:24:55 PM	Bypass valve closed
5/24/2010	1:24:55 PM	Bubbler valve closed
5/24/2010	1:24:55 PM	Helium valve opened
5/24/2010	1:24:55 PM	Helium MFC set to  500.000000
5/24/2010	1:24:55 PM	H2 MFC set to  0.000000
5/24/2010	1:24:55 PM	BCl3 MFC set to  0.000000
5/24/2010	1:24:55 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:24:55 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:24:55 PM	Tube furnace set to 0
5/24/2010	1:25:28 PM	Helium valve closed
5/24/2010	1:25:28 PM	H2 valve closed
5/24/2010	1:25:28 PM	BCl3 valve closed
5/24/2010	1:25:28 PM	PH3 valve closed
5/24/2010	1:25:28 PM	SiCl4 pre valve closed
5/24/2010	1:25:28 PM	SiCl4 post valve closed
5/24/2010	1:25:28 PM	Main Vac valve closed
5/24/2010	1:25:28 PM	Bypass valve closed
5/24/2010	1:25:28 PM	Bubbler valve closed
5/24/2010	1:25:28 PM	Helium MFC set to  0.000000
5/24/2010	1:25:28 PM	H2 MFC set to  0.000000
5/24/2010	1:25:28 PM	BCl3 MFC set to  0.000000
5/24/2010	1:25:28 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:25:28 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:25:28 PM	Tube furnace set to 0
5/24/2010	1:25:29 PM	Run finished at 1:25 PM
5/24/2010	1:25:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	1:25:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	1:25:30 PM	Recipe started at 1:25 PM
5/24/2010	1:25:30 PM	Helium valve closed
5/24/2010	1:25:30 PM	H2 valve closed
5/24/2010	1:25:30 PM	BCl3 valve closed
5/24/2010	1:25:30 PM	PH3 valve closed
5/24/2010	1:25:30 PM	SiCl4 pre valve closed
5/24/2010	1:25:30 PM	SiCl4 post valve closed
5/24/2010	1:25:30 PM	Main Vac valve closed
5/24/2010	1:25:30 PM	Bubbler valve closed
5/24/2010	1:25:30 PM	Bypass valve opened
5/24/2010	1:25:30 PM	Helium MFC set to  0.000000
5/24/2010	1:25:30 PM	H2 MFC set to  0.000000
5/24/2010	1:25:30 PM	BCl3 MFC set to  0.000000
5/24/2010	1:25:30 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:25:30 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:25:30 PM	Tube furnace set to 0
5/24/2010	1:25:55 PM	Helium valve closed
5/24/2010	1:25:55 PM	H2 valve closed
5/24/2010	1:25:55 PM	BCl3 valve closed
5/24/2010	1:25:55 PM	PH3 valve closed
5/24/2010	1:25:55 PM	SiCl4 pre valve closed
5/24/2010	1:25:55 PM	SiCl4 post valve closed
5/24/2010	1:25:55 PM	Bubbler valve closed
5/24/2010	1:25:55 PM	Main Vac valve opened
5/24/2010	1:25:55 PM	Bypass valve opened
5/24/2010	1:25:55 PM	Helium MFC set to  0.000000
5/24/2010	1:25:55 PM	H2 MFC set to  0.000000
5/24/2010	1:25:55 PM	BCl3 MFC set to  0.000000
5/24/2010	1:25:55 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:25:55 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:25:55 PM	Tube furnace set to 0
5/24/2010	1:25:55 PM	Run finished at 1:25 PM
5/24/2010	1:25:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	1:26:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	1:26:44 PM	Recipe started at 1:26 PM
5/24/2010	1:26:44 PM	H2 valve closed
5/24/2010	1:26:44 PM	BCl3 valve closed
5/24/2010	1:26:45 PM	PH3 valve closed
5/24/2010	1:26:45 PM	SiCl4 pre valve closed
5/24/2010	1:26:45 PM	SiCl4 post valve closed
5/24/2010	1:26:45 PM	Main Vac valve closed
5/24/2010	1:26:45 PM	Bypass valve closed
5/24/2010	1:26:45 PM	Bubbler valve closed
5/24/2010	1:26:45 PM	Helium valve opened
5/24/2010	1:26:45 PM	Helium MFC set to  500.000000
5/24/2010	1:26:45 PM	H2 MFC set to  0.000000
5/24/2010	1:26:45 PM	BCl3 MFC set to  0.000000
5/24/2010	1:26:45 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:26:45 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:26:45 PM	Tube furnace set to 0
5/24/2010	1:27:18 PM	Helium valve closed
5/24/2010	1:27:18 PM	H2 valve closed
5/24/2010	1:27:18 PM	BCl3 valve closed
5/24/2010	1:27:18 PM	PH3 valve closed
5/24/2010	1:27:18 PM	SiCl4 pre valve closed
5/24/2010	1:27:18 PM	SiCl4 post valve closed
5/24/2010	1:27:18 PM	Main Vac valve closed
5/24/2010	1:27:18 PM	Bypass valve closed
5/24/2010	1:27:18 PM	Bubbler valve closed
5/24/2010	1:27:18 PM	Helium MFC set to  0.000000
5/24/2010	1:27:18 PM	H2 MFC set to  0.000000
5/24/2010	1:27:18 PM	BCl3 MFC set to  0.000000
5/24/2010	1:27:18 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:27:18 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:27:19 PM	Tube furnace set to 0
5/24/2010	1:27:19 PM	Run finished at 1:27 PM
5/24/2010	1:27:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	1:27:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	1:27:20 PM	Recipe started at 1:27 PM
5/24/2010	1:27:20 PM	Helium valve closed
5/24/2010	1:27:20 PM	H2 valve closed
5/24/2010	1:27:20 PM	BCl3 valve closed
5/24/2010	1:27:20 PM	PH3 valve closed
5/24/2010	1:27:20 PM	SiCl4 pre valve closed
5/24/2010	1:27:20 PM	SiCl4 post valve closed
5/24/2010	1:27:20 PM	Main Vac valve closed
5/24/2010	1:27:20 PM	Bubbler valve closed
5/24/2010	1:27:20 PM	Bypass valve opened
5/24/2010	1:27:20 PM	Helium MFC set to  0.000000
5/24/2010	1:27:20 PM	H2 MFC set to  0.000000
5/24/2010	1:27:20 PM	BCl3 MFC set to  0.000000
5/24/2010	1:27:20 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:27:20 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:27:20 PM	Tube furnace set to 0
5/24/2010	1:27:45 PM	Helium valve closed
5/24/2010	1:27:45 PM	H2 valve closed
5/24/2010	1:27:45 PM	BCl3 valve closed
5/24/2010	1:27:45 PM	PH3 valve closed
5/24/2010	1:27:45 PM	SiCl4 pre valve closed
5/24/2010	1:27:45 PM	SiCl4 post valve closed
5/24/2010	1:27:45 PM	Bubbler valve closed
5/24/2010	1:27:45 PM	Main Vac valve opened
5/24/2010	1:27:45 PM	Bypass valve opened
5/24/2010	1:27:45 PM	Helium MFC set to  0.000000
5/24/2010	1:27:45 PM	H2 MFC set to  0.000000
5/24/2010	1:27:45 PM	BCl3 MFC set to  0.000000
5/24/2010	1:27:45 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:27:45 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:27:45 PM	Tube furnace set to 0
5/24/2010	1:27:45 PM	Run finished at 1:27 PM
5/24/2010	1:27:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	1:29:14 PM	Recipe started at 1:29 PM
5/24/2010	1:29:14 PM	H2 valve closed
5/24/2010	1:29:14 PM	BCl3 valve closed
5/24/2010	1:29:14 PM	PH3 valve closed
5/24/2010	1:29:14 PM	SiCl4 pre valve closed
5/24/2010	1:29:14 PM	SiCl4 post valve closed
5/24/2010	1:29:14 PM	Main Vac valve closed
5/24/2010	1:29:14 PM	Bypass valve closed
5/24/2010	1:29:14 PM	Bubbler valve closed
5/24/2010	1:29:14 PM	Helium valve opened
5/24/2010	1:29:14 PM	Helium MFC set to  500.000000
5/24/2010	1:29:14 PM	H2 MFC set to  0.000000
5/24/2010	1:29:14 PM	BCl3 MFC set to  0.000000
5/24/2010	1:29:14 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:29:14 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:29:14 PM	Tube furnace set to 80
5/24/2010	1:29:56 PM	Helium valve closed
5/24/2010	1:29:56 PM	H2 valve closed
5/24/2010	1:29:56 PM	BCl3 valve closed
5/24/2010	1:29:56 PM	PH3 valve closed
5/24/2010	1:29:56 PM	SiCl4 pre valve closed
5/24/2010	1:29:56 PM	SiCl4 post valve closed
5/24/2010	1:29:56 PM	Main Vac valve closed
5/24/2010	1:29:56 PM	Bypass valve closed
5/24/2010	1:29:56 PM	Bubbler valve closed
5/24/2010	1:29:56 PM	Helium MFC set to  0.000000
5/24/2010	1:29:56 PM	H2 MFC set to  0.000000
5/24/2010	1:29:56 PM	BCl3 MFC set to  0.000000
5/24/2010	1:29:56 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:29:56 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:29:56 PM	Tube furnace set to 80
5/24/2010	1:30:11 PM	Helium valve closed
5/24/2010	1:30:11 PM	H2 valve closed
5/24/2010	1:30:11 PM	BCl3 valve closed
5/24/2010	1:30:11 PM	PH3 valve closed
5/24/2010	1:30:11 PM	SiCl4 pre valve closed
5/24/2010	1:30:11 PM	SiCl4 post valve closed
5/24/2010	1:30:11 PM	Main Vac valve closed
5/24/2010	1:30:11 PM	Bubbler valve closed
5/24/2010	1:30:11 PM	Bypass valve opened
5/24/2010	1:30:11 PM	Helium MFC set to  0.000000
5/24/2010	1:30:11 PM	H2 MFC set to  0.000000
5/24/2010	1:30:11 PM	BCl3 MFC set to  0.000000
5/24/2010	1:30:11 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:30:11 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:30:11 PM	Tube furnace set to 80
5/24/2010	1:30:37 PM	Helium valve closed
5/24/2010	1:30:37 PM	H2 valve closed
5/24/2010	1:30:37 PM	BCl3 valve closed
5/24/2010	1:30:37 PM	PH3 valve closed
5/24/2010	1:30:37 PM	SiCl4 pre valve closed
5/24/2010	1:30:37 PM	SiCl4 post valve closed
5/24/2010	1:30:37 PM	Bubbler valve closed
5/24/2010	1:30:37 PM	Main Vac valve opened
5/24/2010	1:30:37 PM	Bypass valve opened
5/24/2010	1:30:37 PM	Helium MFC set to  0.000000
5/24/2010	1:30:37 PM	H2 MFC set to  0.000000
5/24/2010	1:30:37 PM	BCl3 MFC set to  0.000000
5/24/2010	1:30:37 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:30:37 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:30:37 PM	Tube furnace set to 80
5/24/2010	1:33:37 PM	H2 valve closed
5/24/2010	1:33:37 PM	BCl3 valve closed
5/24/2010	1:33:37 PM	PH3 valve closed
5/24/2010	1:33:37 PM	SiCl4 pre valve closed
5/24/2010	1:33:37 PM	SiCl4 post valve closed
5/24/2010	1:33:37 PM	Main Vac valve closed
5/24/2010	1:33:37 PM	Bypass valve closed
5/24/2010	1:33:37 PM	Bubbler valve closed
5/24/2010	1:33:37 PM	Helium valve opened
5/24/2010	1:33:37 PM	Helium MFC set to  500.000000
5/24/2010	1:33:37 PM	H2 MFC set to  0.000000
5/24/2010	1:33:37 PM	BCl3 MFC set to  0.000000
5/24/2010	1:33:37 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:33:37 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:33:38 PM	Tube furnace set to 80
5/24/2010	1:34:19 PM	Helium valve closed
5/24/2010	1:34:19 PM	H2 valve closed
5/24/2010	1:34:19 PM	BCl3 valve closed
5/24/2010	1:34:19 PM	PH3 valve closed
5/24/2010	1:34:19 PM	SiCl4 pre valve closed
5/24/2010	1:34:19 PM	SiCl4 post valve closed
5/24/2010	1:34:19 PM	Main Vac valve closed
5/24/2010	1:34:19 PM	Bypass valve closed
5/24/2010	1:34:19 PM	Bubbler valve closed
5/24/2010	1:34:19 PM	Helium MFC set to  0.000000
5/24/2010	1:34:19 PM	H2 MFC set to  0.000000
5/24/2010	1:34:19 PM	BCl3 MFC set to  0.000000
5/24/2010	1:34:19 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:34:19 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:34:19 PM	Tube furnace set to 80
5/24/2010	1:34:34 PM	Helium valve closed
5/24/2010	1:34:34 PM	H2 valve closed
5/24/2010	1:34:34 PM	BCl3 valve closed
5/24/2010	1:34:34 PM	PH3 valve closed
5/24/2010	1:34:34 PM	SiCl4 pre valve closed
5/24/2010	1:34:34 PM	SiCl4 post valve closed
5/24/2010	1:34:34 PM	Main Vac valve closed
5/24/2010	1:34:34 PM	Bubbler valve closed
5/24/2010	1:34:34 PM	Bypass valve opened
5/24/2010	1:34:34 PM	Helium MFC set to  0.000000
5/24/2010	1:34:34 PM	H2 MFC set to  0.000000
5/24/2010	1:34:34 PM	BCl3 MFC set to  0.000000
5/24/2010	1:34:34 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:34:34 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:34:34 PM	Tube furnace set to 80
5/24/2010	1:35:01 PM	Helium valve closed
5/24/2010	1:35:01 PM	H2 valve closed
5/24/2010	1:35:01 PM	BCl3 valve closed
5/24/2010	1:35:01 PM	PH3 valve closed
5/24/2010	1:35:01 PM	SiCl4 pre valve closed
5/24/2010	1:35:01 PM	SiCl4 post valve closed
5/24/2010	1:35:01 PM	Bubbler valve closed
5/24/2010	1:35:01 PM	Main Vac valve opened
5/24/2010	1:35:01 PM	Bypass valve opened
5/24/2010	1:35:01 PM	Helium MFC set to  0.000000
5/24/2010	1:35:01 PM	H2 MFC set to  0.000000
5/24/2010	1:35:01 PM	BCl3 MFC set to  0.000000
5/24/2010	1:35:01 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:35:01 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:35:01 PM	Tube furnace set to 80
5/24/2010	1:38:01 PM	H2 valve closed
5/24/2010	1:38:01 PM	BCl3 valve closed
5/24/2010	1:38:01 PM	PH3 valve closed
5/24/2010	1:38:01 PM	SiCl4 pre valve closed
5/24/2010	1:38:01 PM	SiCl4 post valve closed
5/24/2010	1:38:01 PM	Main Vac valve closed
5/24/2010	1:38:01 PM	Bypass valve closed
5/24/2010	1:38:01 PM	Bubbler valve closed
5/24/2010	1:38:01 PM	Helium valve opened
5/24/2010	1:38:01 PM	Helium MFC set to  500.000000
5/24/2010	1:38:01 PM	H2 MFC set to  0.000000
5/24/2010	1:38:01 PM	BCl3 MFC set to  0.000000
5/24/2010	1:38:01 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:38:01 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:38:01 PM	Tube furnace set to 80
5/24/2010	1:38:42 PM	Helium valve closed
5/24/2010	1:38:42 PM	H2 valve closed
5/24/2010	1:38:42 PM	BCl3 valve closed
5/24/2010	1:38:42 PM	PH3 valve closed
5/24/2010	1:38:42 PM	SiCl4 pre valve closed
5/24/2010	1:38:42 PM	SiCl4 post valve closed
5/24/2010	1:38:42 PM	Main Vac valve closed
5/24/2010	1:38:42 PM	Bypass valve closed
5/24/2010	1:38:42 PM	Bubbler valve closed
5/24/2010	1:38:42 PM	Helium MFC set to  0.000000
5/24/2010	1:38:42 PM	H2 MFC set to  0.000000
5/24/2010	1:38:42 PM	BCl3 MFC set to  0.000000
5/24/2010	1:38:42 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:38:42 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:38:43 PM	Tube furnace set to 80
5/24/2010	1:38:58 PM	Helium valve closed
5/24/2010	1:38:58 PM	H2 valve closed
5/24/2010	1:38:58 PM	BCl3 valve closed
5/24/2010	1:38:58 PM	PH3 valve closed
5/24/2010	1:38:58 PM	SiCl4 pre valve closed
5/24/2010	1:38:58 PM	SiCl4 post valve closed
5/24/2010	1:38:58 PM	Main Vac valve closed
5/24/2010	1:38:58 PM	Bubbler valve closed
5/24/2010	1:38:58 PM	Bypass valve opened
5/24/2010	1:38:58 PM	Helium MFC set to  0.000000
5/24/2010	1:38:58 PM	H2 MFC set to  0.000000
5/24/2010	1:38:58 PM	BCl3 MFC set to  0.000000
5/24/2010	1:38:58 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:38:58 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:38:58 PM	Tube furnace set to 80
5/24/2010	1:39:24 PM	Helium valve closed
5/24/2010	1:39:24 PM	H2 valve closed
5/24/2010	1:39:24 PM	BCl3 valve closed
5/24/2010	1:39:24 PM	PH3 valve closed
5/24/2010	1:39:24 PM	SiCl4 pre valve closed
5/24/2010	1:39:24 PM	SiCl4 post valve closed
5/24/2010	1:39:24 PM	Bubbler valve closed
5/24/2010	1:39:24 PM	Main Vac valve opened
5/24/2010	1:39:24 PM	Bypass valve opened
5/24/2010	1:39:24 PM	Helium MFC set to  0.000000
5/24/2010	1:39:24 PM	H2 MFC set to  0.000000
5/24/2010	1:39:24 PM	BCl3 MFC set to  0.000000
5/24/2010	1:39:24 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:39:24 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:39:24 PM	Tube furnace set to 80
5/24/2010	1:41:02 PM	Helium valve closed
5/24/2010	1:41:02 PM	H2 valve closed
5/24/2010	1:41:02 PM	BCl3 valve closed
5/24/2010	1:41:02 PM	PH3 valve closed
5/24/2010	1:41:02 PM	SiCl4 pre valve closed
5/24/2010	1:41:02 PM	SiCl4 post valve closed
5/24/2010	1:41:02 PM	Bubbler valve closed
5/24/2010	1:41:02 PM	Main Vac valve opened
5/24/2010	1:41:02 PM	Bypass valve opened
5/24/2010	1:41:02 PM	Helium MFC set to  0.000000
5/24/2010	1:41:02 PM	H2 MFC set to  0.000000
5/24/2010	1:41:03 PM	BCl3 MFC set to  0.000000
5/24/2010	1:41:03 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:41:03 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:41:03 PM	Tube furnace set to 0
5/24/2010	1:41:04 PM	Run finished at 1:41 PM
5/24/2010	1:41:25 PM	Bypass valve closed
5/24/2010	1:41:26 PM	Main Vac valve closed
5/24/2010	1:41:47 PM	Main Vac valve opened
5/24/2010	1:41:47 PM	Bypass valve opened
5/24/2010	1:46:29 PM	Recipe started at 1:46 PM
5/24/2010	1:46:29 PM	Helium valve closed
5/24/2010	1:46:29 PM	BCl3 valve closed
5/24/2010	1:46:29 PM	PH3 valve closed
5/24/2010	1:46:29 PM	SiCl4 pre valve closed
5/24/2010	1:46:29 PM	SiCl4 post valve closed
5/24/2010	1:46:29 PM	Main Vac valve closed
5/24/2010	1:46:29 PM	Bypass valve closed
5/24/2010	1:46:29 PM	Bubbler valve closed
5/24/2010	1:46:29 PM	H2 valve opened
5/24/2010	1:46:29 PM	Helium MFC set to  0.000000
5/24/2010	1:46:29 PM	H2 MFC set to  500.000000
5/24/2010	1:46:29 PM	BCl3 MFC set to  0.000000
5/24/2010	1:46:29 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:46:29 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:46:29 PM	Tube furnace set to 0
5/24/2010	1:47:48 PM	Helium valve closed
5/24/2010	1:47:48 PM	BCl3 valve closed
5/24/2010	1:47:48 PM	PH3 valve closed
5/24/2010	1:47:48 PM	SiCl4 pre valve closed
5/24/2010	1:47:48 PM	SiCl4 post valve closed
5/24/2010	1:47:48 PM	Main Vac valve closed
5/24/2010	1:47:48 PM	Bypass valve closed
5/24/2010	1:47:48 PM	H2 valve opened
5/24/2010	1:47:48 PM	Bubbler valve opened
5/24/2010	1:47:48 PM	Helium MFC set to  0.000000
5/24/2010	1:47:48 PM	H2 MFC set to  500.000000
5/24/2010	1:47:48 PM	BCl3 MFC set to  0.000000
5/24/2010	1:47:48 PM	SiCl4 MFC set to  0.000000
5/24/2010	1:47:48 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	1:47:48 PM	Tube furnace set to 1000
5/24/2010	2:07:48 PM	Helium valve closed
5/24/2010	2:07:48 PM	PH3 valve closed
5/24/2010	2:07:48 PM	Main Vac valve closed
5/24/2010	2:07:48 PM	Bypass valve closed
5/24/2010	2:07:48 PM	H2 valve opened
5/24/2010	2:07:48 PM	BCl3 valve opened
5/24/2010	2:07:48 PM	SiCl4 pre valve opened
5/24/2010	2:07:48 PM	SiCl4 post valve opened
5/24/2010	2:07:48 PM	Bubbler valve opened
5/24/2010	2:07:48 PM	Helium MFC set to  0.000000
5/24/2010	2:07:48 PM	H2 MFC set to  500.000000
5/24/2010	2:07:48 PM	BCl3 MFC set to  35.000000
5/24/2010	2:07:48 PM	SiCl4 MFC set to  500.000000
5/24/2010	2:07:48 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:07:48 PM	Tube furnace set to 1000
5/24/2010	2:17:48 PM	H2 valve closed
5/24/2010	2:17:48 PM	BCl3 valve closed
5/24/2010	2:17:48 PM	PH3 valve closed
5/24/2010	2:17:48 PM	SiCl4 pre valve closed
5/24/2010	2:17:48 PM	SiCl4 post valve closed
5/24/2010	2:17:48 PM	Main Vac valve closed
5/24/2010	2:17:48 PM	Bypass valve closed
5/24/2010	2:17:48 PM	Helium valve opened
5/24/2010	2:17:48 PM	Bubbler valve opened
5/24/2010	2:17:48 PM	Helium MFC set to  500.000000
5/24/2010	2:17:48 PM	H2 MFC set to  0.000000
5/24/2010	2:17:48 PM	BCl3 MFC set to  0.000000
5/24/2010	2:17:48 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:17:48 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:17:48 PM	Tube furnace set to 0
5/24/2010	2:37:13 PM	Helium valve closed
5/24/2010	2:37:13 PM	H2 valve closed
5/24/2010	2:37:13 PM	BCl3 valve closed
5/24/2010	2:37:13 PM	PH3 valve closed
5/24/2010	2:37:13 PM	SiCl4 pre valve closed
5/24/2010	2:37:13 PM	SiCl4 post valve closed
5/24/2010	2:37:13 PM	Main Vac valve closed
5/24/2010	2:37:13 PM	Bypass valve closed
5/24/2010	2:37:13 PM	Bubbler valve closed
5/24/2010	2:37:13 PM	Helium MFC set to  0.000000
5/24/2010	2:37:13 PM	H2 MFC set to  0.000000
5/24/2010	2:37:13 PM	BCl3 MFC set to  0.000000
5/24/2010	2:37:13 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:37:13 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:37:14 PM	Tube furnace set to 0
5/24/2010	2:37:14 PM	Run finished at 2:37 PM
5/24/2010	2:39:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	2:39:22 PM	Recipe started at 2:39 PM
5/24/2010	2:39:22 PM	Helium valve closed
5/24/2010	2:39:22 PM	H2 valve closed
5/24/2010	2:39:22 PM	BCl3 valve closed
5/24/2010	2:39:22 PM	PH3 valve closed
5/24/2010	2:39:22 PM	SiCl4 pre valve closed
5/24/2010	2:39:22 PM	SiCl4 post valve closed
5/24/2010	2:39:22 PM	Main Vac valve closed
5/24/2010	2:39:22 PM	Bubbler valve closed
5/24/2010	2:39:22 PM	Bypass valve opened
5/24/2010	2:39:22 PM	Helium MFC set to  0.000000
5/24/2010	2:39:22 PM	H2 MFC set to  0.000000
5/24/2010	2:39:22 PM	BCl3 MFC set to  0.000000
5/24/2010	2:39:22 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:39:22 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:39:22 PM	Tube furnace set to 0
5/24/2010	2:40:08 PM	Helium valve closed
5/24/2010	2:40:08 PM	H2 valve closed
5/24/2010	2:40:08 PM	BCl3 valve closed
5/24/2010	2:40:08 PM	PH3 valve closed
5/24/2010	2:40:08 PM	SiCl4 pre valve closed
5/24/2010	2:40:08 PM	SiCl4 post valve closed
5/24/2010	2:40:08 PM	Bubbler valve closed
5/24/2010	2:40:08 PM	Main Vac valve opened
5/24/2010	2:40:08 PM	Bypass valve opened
5/24/2010	2:40:08 PM	Helium MFC set to  0.000000
5/24/2010	2:40:08 PM	H2 MFC set to  0.000000
5/24/2010	2:40:08 PM	BCl3 MFC set to  0.000000
5/24/2010	2:40:08 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:40:08 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:40:08 PM	Tube furnace set to 0
5/24/2010	2:40:08 PM	Run finished at 2:40 PM
5/24/2010	2:40:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	2:41:15 PM	Recipe started at 2:41 PM
5/24/2010	2:41:15 PM	H2 valve closed
5/24/2010	2:41:15 PM	BCl3 valve closed
5/24/2010	2:41:15 PM	PH3 valve closed
5/24/2010	2:41:15 PM	SiCl4 pre valve closed
5/24/2010	2:41:15 PM	SiCl4 post valve closed
5/24/2010	2:41:15 PM	Main Vac valve closed
5/24/2010	2:41:15 PM	Bypass valve closed
5/24/2010	2:41:15 PM	Bubbler valve closed
5/24/2010	2:41:15 PM	Helium valve opened
5/24/2010	2:41:15 PM	Helium MFC set to  500.000000
5/24/2010	2:41:15 PM	H2 MFC set to  0.000000
5/24/2010	2:41:15 PM	BCl3 MFC set to  0.000000
5/24/2010	2:41:15 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:41:15 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:41:15 PM	Tube furnace set to 80
5/24/2010	2:41:56 PM	Helium valve closed
5/24/2010	2:41:56 PM	H2 valve closed
5/24/2010	2:41:56 PM	BCl3 valve closed
5/24/2010	2:41:56 PM	PH3 valve closed
5/24/2010	2:41:56 PM	SiCl4 pre valve closed
5/24/2010	2:41:56 PM	SiCl4 post valve closed
5/24/2010	2:41:56 PM	Main Vac valve closed
5/24/2010	2:41:56 PM	Bypass valve closed
5/24/2010	2:41:56 PM	Bubbler valve closed
5/24/2010	2:41:56 PM	Helium MFC set to  0.000000
5/24/2010	2:41:56 PM	H2 MFC set to  0.000000
5/24/2010	2:41:56 PM	BCl3 MFC set to  0.000000
5/24/2010	2:41:56 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:41:56 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:41:57 PM	Tube furnace set to 80
5/24/2010	2:42:12 PM	Helium valve closed
5/24/2010	2:42:12 PM	H2 valve closed
5/24/2010	2:42:12 PM	BCl3 valve closed
5/24/2010	2:42:12 PM	PH3 valve closed
5/24/2010	2:42:12 PM	SiCl4 pre valve closed
5/24/2010	2:42:12 PM	SiCl4 post valve closed
5/24/2010	2:42:12 PM	Main Vac valve closed
5/24/2010	2:42:12 PM	Bubbler valve closed
5/24/2010	2:42:12 PM	Bypass valve opened
5/24/2010	2:42:12 PM	Helium MFC set to  0.000000
5/24/2010	2:42:12 PM	H2 MFC set to  0.000000
5/24/2010	2:42:12 PM	BCl3 MFC set to  0.000000
5/24/2010	2:42:12 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:42:12 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:42:12 PM	Tube furnace set to 80
5/24/2010	2:42:39 PM	Helium valve closed
5/24/2010	2:42:39 PM	H2 valve closed
5/24/2010	2:42:39 PM	BCl3 valve closed
5/24/2010	2:42:39 PM	PH3 valve closed
5/24/2010	2:42:39 PM	SiCl4 pre valve closed
5/24/2010	2:42:39 PM	SiCl4 post valve closed
5/24/2010	2:42:39 PM	Bubbler valve closed
5/24/2010	2:42:39 PM	Main Vac valve opened
5/24/2010	2:42:39 PM	Bypass valve opened
5/24/2010	2:42:39 PM	Helium MFC set to  0.000000
5/24/2010	2:42:39 PM	H2 MFC set to  0.000000
5/24/2010	2:42:39 PM	BCl3 MFC set to  0.000000
5/24/2010	2:42:39 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:42:39 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:42:39 PM	Tube furnace set to 80
5/24/2010	2:45:39 PM	H2 valve closed
5/24/2010	2:45:39 PM	BCl3 valve closed
5/24/2010	2:45:39 PM	PH3 valve closed
5/24/2010	2:45:39 PM	SiCl4 pre valve closed
5/24/2010	2:45:39 PM	SiCl4 post valve closed
5/24/2010	2:45:39 PM	Main Vac valve closed
5/24/2010	2:45:39 PM	Bypass valve closed
5/24/2010	2:45:39 PM	Bubbler valve closed
5/24/2010	2:45:39 PM	Helium valve opened
5/24/2010	2:45:39 PM	Helium MFC set to  500.000000
5/24/2010	2:45:39 PM	H2 MFC set to  0.000000
5/24/2010	2:45:39 PM	BCl3 MFC set to  0.000000
5/24/2010	2:45:39 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:45:39 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:45:39 PM	Tube furnace set to 80
5/24/2010	2:46:20 PM	Helium valve closed
5/24/2010	2:46:20 PM	H2 valve closed
5/24/2010	2:46:20 PM	BCl3 valve closed
5/24/2010	2:46:20 PM	PH3 valve closed
5/24/2010	2:46:20 PM	SiCl4 pre valve closed
5/24/2010	2:46:20 PM	SiCl4 post valve closed
5/24/2010	2:46:20 PM	Main Vac valve closed
5/24/2010	2:46:20 PM	Bypass valve closed
5/24/2010	2:46:20 PM	Bubbler valve closed
5/24/2010	2:46:20 PM	Helium MFC set to  0.000000
5/24/2010	2:46:20 PM	H2 MFC set to  0.000000
5/24/2010	2:46:20 PM	BCl3 MFC set to  0.000000
5/24/2010	2:46:20 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:46:20 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:46:20 PM	Tube furnace set to 80
5/24/2010	2:46:35 PM	Helium valve closed
5/24/2010	2:46:35 PM	H2 valve closed
5/24/2010	2:46:35 PM	BCl3 valve closed
5/24/2010	2:46:35 PM	PH3 valve closed
5/24/2010	2:46:35 PM	SiCl4 pre valve closed
5/24/2010	2:46:35 PM	SiCl4 post valve closed
5/24/2010	2:46:35 PM	Main Vac valve closed
5/24/2010	2:46:35 PM	Bubbler valve closed
5/24/2010	2:46:35 PM	Bypass valve opened
5/24/2010	2:46:35 PM	Helium MFC set to  0.000000
5/24/2010	2:46:35 PM	H2 MFC set to  0.000000
5/24/2010	2:46:35 PM	BCl3 MFC set to  0.000000
5/24/2010	2:46:35 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:46:35 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:46:35 PM	Tube furnace set to 80
5/24/2010	2:47:02 PM	Helium valve closed
5/24/2010	2:47:02 PM	H2 valve closed
5/24/2010	2:47:02 PM	BCl3 valve closed
5/24/2010	2:47:02 PM	PH3 valve closed
5/24/2010	2:47:02 PM	SiCl4 pre valve closed
5/24/2010	2:47:02 PM	SiCl4 post valve closed
5/24/2010	2:47:02 PM	Bubbler valve closed
5/24/2010	2:47:02 PM	Main Vac valve opened
5/24/2010	2:47:02 PM	Bypass valve opened
5/24/2010	2:47:02 PM	Helium MFC set to  0.000000
5/24/2010	2:47:02 PM	H2 MFC set to  0.000000
5/24/2010	2:47:02 PM	BCl3 MFC set to  0.000000
5/24/2010	2:47:02 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:47:02 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:47:02 PM	Tube furnace set to 80
5/24/2010	2:50:02 PM	H2 valve closed
5/24/2010	2:50:02 PM	BCl3 valve closed
5/24/2010	2:50:02 PM	PH3 valve closed
5/24/2010	2:50:02 PM	SiCl4 pre valve closed
5/24/2010	2:50:02 PM	SiCl4 post valve closed
5/24/2010	2:50:02 PM	Main Vac valve closed
5/24/2010	2:50:02 PM	Bypass valve closed
5/24/2010	2:50:02 PM	Bubbler valve closed
5/24/2010	2:50:02 PM	Helium valve opened
5/24/2010	2:50:02 PM	Helium MFC set to  500.000000
5/24/2010	2:50:02 PM	H2 MFC set to  0.000000
5/24/2010	2:50:02 PM	BCl3 MFC set to  0.000000
5/24/2010	2:50:02 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:50:02 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:50:02 PM	Tube furnace set to 80
5/24/2010	2:50:43 PM	Helium valve closed
5/24/2010	2:50:43 PM	H2 valve closed
5/24/2010	2:50:43 PM	BCl3 valve closed
5/24/2010	2:50:43 PM	PH3 valve closed
5/24/2010	2:50:43 PM	SiCl4 pre valve closed
5/24/2010	2:50:43 PM	SiCl4 post valve closed
5/24/2010	2:50:43 PM	Main Vac valve closed
5/24/2010	2:50:43 PM	Bypass valve closed
5/24/2010	2:50:43 PM	Bubbler valve closed
5/24/2010	2:50:43 PM	Helium MFC set to  0.000000
5/24/2010	2:50:43 PM	H2 MFC set to  0.000000
5/24/2010	2:50:43 PM	BCl3 MFC set to  0.000000
5/24/2010	2:50:43 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:50:43 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:50:43 PM	Tube furnace set to 80
5/24/2010	2:50:58 PM	Helium valve closed
5/24/2010	2:50:58 PM	H2 valve closed
5/24/2010	2:50:58 PM	BCl3 valve closed
5/24/2010	2:50:58 PM	PH3 valve closed
5/24/2010	2:50:58 PM	SiCl4 pre valve closed
5/24/2010	2:50:58 PM	SiCl4 post valve closed
5/24/2010	2:50:58 PM	Main Vac valve closed
5/24/2010	2:50:58 PM	Bubbler valve closed
5/24/2010	2:50:58 PM	Bypass valve opened
5/24/2010	2:50:58 PM	Helium MFC set to  0.000000
5/24/2010	2:50:58 PM	H2 MFC set to  0.000000
5/24/2010	2:50:58 PM	BCl3 MFC set to  0.000000
5/24/2010	2:50:58 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:50:58 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:50:58 PM	Tube furnace set to 80
5/24/2010	2:51:25 PM	Helium valve closed
5/24/2010	2:51:25 PM	H2 valve closed
5/24/2010	2:51:25 PM	BCl3 valve closed
5/24/2010	2:51:25 PM	PH3 valve closed
5/24/2010	2:51:25 PM	SiCl4 pre valve closed
5/24/2010	2:51:25 PM	SiCl4 post valve closed
5/24/2010	2:51:25 PM	Bubbler valve closed
5/24/2010	2:51:25 PM	Main Vac valve opened
5/24/2010	2:51:25 PM	Bypass valve opened
5/24/2010	2:51:25 PM	Helium MFC set to  0.000000
5/24/2010	2:51:25 PM	H2 MFC set to  0.000000
5/24/2010	2:51:25 PM	BCl3 MFC set to  0.000000
5/24/2010	2:51:25 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:51:25 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:51:25 PM	Tube furnace set to 80
5/24/2010	2:51:46 PM	Helium valve closed
5/24/2010	2:51:46 PM	H2 valve closed
5/24/2010	2:51:46 PM	BCl3 valve closed
5/24/2010	2:51:46 PM	PH3 valve closed
5/24/2010	2:51:46 PM	SiCl4 pre valve closed
5/24/2010	2:51:46 PM	SiCl4 post valve closed
5/24/2010	2:51:46 PM	Bubbler valve closed
5/24/2010	2:51:46 PM	Main Vac valve opened
5/24/2010	2:51:46 PM	Bypass valve opened
5/24/2010	2:51:46 PM	Helium MFC set to  0.000000
5/24/2010	2:51:46 PM	H2 MFC set to  0.000000
5/24/2010	2:51:46 PM	BCl3 MFC set to  0.000000
5/24/2010	2:51:46 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:51:46 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:51:46 PM	Tube furnace set to 0
5/24/2010	2:51:47 PM	Run finished at 2:51 PM
5/24/2010	2:51:52 PM	Recipe started at 2:51 PM
5/24/2010	2:51:52 PM	H2 valve closed
5/24/2010	2:51:52 PM	BCl3 valve closed
5/24/2010	2:51:52 PM	PH3 valve closed
5/24/2010	2:51:52 PM	SiCl4 pre valve closed
5/24/2010	2:51:52 PM	SiCl4 post valve closed
5/24/2010	2:51:52 PM	Main Vac valve closed
5/24/2010	2:51:52 PM	Bypass valve closed
5/24/2010	2:51:52 PM	Bubbler valve closed
5/24/2010	2:51:52 PM	Helium valve opened
5/24/2010	2:51:52 PM	Helium MFC set to  500.000000
5/24/2010	2:51:52 PM	H2 MFC set to  0.000000
5/24/2010	2:51:52 PM	BCl3 MFC set to  0.000000
5/24/2010	2:51:52 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:51:52 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:51:52 PM	Tube furnace set to 80
5/24/2010	2:52:33 PM	Helium valve closed
5/24/2010	2:52:33 PM	H2 valve closed
5/24/2010	2:52:33 PM	BCl3 valve closed
5/24/2010	2:52:33 PM	PH3 valve closed
5/24/2010	2:52:33 PM	SiCl4 pre valve closed
5/24/2010	2:52:33 PM	SiCl4 post valve closed
5/24/2010	2:52:33 PM	Main Vac valve closed
5/24/2010	2:52:33 PM	Bypass valve closed
5/24/2010	2:52:33 PM	Bubbler valve closed
5/24/2010	2:52:33 PM	Helium MFC set to  0.000000
5/24/2010	2:52:33 PM	H2 MFC set to  0.000000
5/24/2010	2:52:33 PM	BCl3 MFC set to  0.000000
5/24/2010	2:52:33 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:52:33 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:52:33 PM	Tube furnace set to 80
5/24/2010	2:52:48 PM	Helium valve closed
5/24/2010	2:52:48 PM	H2 valve closed
5/24/2010	2:52:48 PM	BCl3 valve closed
5/24/2010	2:52:48 PM	PH3 valve closed
5/24/2010	2:52:48 PM	SiCl4 pre valve closed
5/24/2010	2:52:48 PM	SiCl4 post valve closed
5/24/2010	2:52:48 PM	Main Vac valve closed
5/24/2010	2:52:48 PM	Bubbler valve closed
5/24/2010	2:52:48 PM	Bypass valve opened
5/24/2010	2:52:48 PM	Helium MFC set to  0.000000
5/24/2010	2:52:48 PM	H2 MFC set to  0.000000
5/24/2010	2:52:48 PM	BCl3 MFC set to  0.000000
5/24/2010	2:52:48 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:52:48 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:52:48 PM	Tube furnace set to 80
5/24/2010	2:53:15 PM	Helium valve closed
5/24/2010	2:53:15 PM	H2 valve closed
5/24/2010	2:53:15 PM	BCl3 valve closed
5/24/2010	2:53:15 PM	PH3 valve closed
5/24/2010	2:53:15 PM	SiCl4 pre valve closed
5/24/2010	2:53:15 PM	SiCl4 post valve closed
5/24/2010	2:53:15 PM	Bubbler valve closed
5/24/2010	2:53:15 PM	Main Vac valve opened
5/24/2010	2:53:15 PM	Bypass valve opened
5/24/2010	2:53:15 PM	Helium MFC set to  0.000000
5/24/2010	2:53:15 PM	H2 MFC set to  0.000000
5/24/2010	2:53:15 PM	BCl3 MFC set to  0.000000
5/24/2010	2:53:15 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:53:15 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:53:15 PM	Tube furnace set to 80
5/24/2010	2:56:15 PM	H2 valve closed
5/24/2010	2:56:15 PM	BCl3 valve closed
5/24/2010	2:56:15 PM	PH3 valve closed
5/24/2010	2:56:15 PM	SiCl4 pre valve closed
5/24/2010	2:56:15 PM	SiCl4 post valve closed
5/24/2010	2:56:15 PM	Main Vac valve closed
5/24/2010	2:56:15 PM	Bypass valve closed
5/24/2010	2:56:15 PM	Bubbler valve closed
5/24/2010	2:56:15 PM	Helium valve opened
5/24/2010	2:56:15 PM	Helium MFC set to  500.000000
5/24/2010	2:56:15 PM	H2 MFC set to  0.000000
5/24/2010	2:56:15 PM	BCl3 MFC set to  0.000000
5/24/2010	2:56:15 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:56:15 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:56:15 PM	Tube furnace set to 80
5/24/2010	2:56:56 PM	Helium valve closed
5/24/2010	2:56:56 PM	H2 valve closed
5/24/2010	2:56:56 PM	BCl3 valve closed
5/24/2010	2:56:56 PM	PH3 valve closed
5/24/2010	2:56:56 PM	SiCl4 pre valve closed
5/24/2010	2:56:56 PM	SiCl4 post valve closed
5/24/2010	2:56:56 PM	Main Vac valve closed
5/24/2010	2:56:56 PM	Bypass valve closed
5/24/2010	2:56:56 PM	Bubbler valve closed
5/24/2010	2:56:56 PM	Helium MFC set to  0.000000
5/24/2010	2:56:56 PM	H2 MFC set to  0.000000
5/24/2010	2:56:56 PM	BCl3 MFC set to  0.000000
5/24/2010	2:56:56 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:56:56 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:56:56 PM	Tube furnace set to 80
5/24/2010	2:57:11 PM	Helium valve closed
5/24/2010	2:57:11 PM	H2 valve closed
5/24/2010	2:57:11 PM	BCl3 valve closed
5/24/2010	2:57:11 PM	PH3 valve closed
5/24/2010	2:57:11 PM	SiCl4 pre valve closed
5/24/2010	2:57:11 PM	SiCl4 post valve closed
5/24/2010	2:57:11 PM	Main Vac valve closed
5/24/2010	2:57:11 PM	Bubbler valve closed
5/24/2010	2:57:11 PM	Bypass valve opened
5/24/2010	2:57:11 PM	Helium MFC set to  0.000000
5/24/2010	2:57:11 PM	H2 MFC set to  0.000000
5/24/2010	2:57:11 PM	BCl3 MFC set to  0.000000
5/24/2010	2:57:11 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:57:11 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:57:11 PM	Tube furnace set to 80
5/24/2010	2:57:37 PM	Helium valve closed
5/24/2010	2:57:38 PM	H2 valve closed
5/24/2010	2:57:38 PM	BCl3 valve closed
5/24/2010	2:57:38 PM	PH3 valve closed
5/24/2010	2:57:38 PM	SiCl4 pre valve closed
5/24/2010	2:57:38 PM	SiCl4 post valve closed
5/24/2010	2:57:38 PM	Bubbler valve closed
5/24/2010	2:57:38 PM	Main Vac valve opened
5/24/2010	2:57:38 PM	Bypass valve opened
5/24/2010	2:57:38 PM	Helium MFC set to  0.000000
5/24/2010	2:57:38 PM	H2 MFC set to  0.000000
5/24/2010	2:57:38 PM	BCl3 MFC set to  0.000000
5/24/2010	2:57:38 PM	SiCl4 MFC set to  0.000000
5/24/2010	2:57:38 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	2:57:38 PM	Tube furnace set to 80
5/24/2010	3:00:38 PM	H2 valve closed
5/24/2010	3:00:38 PM	BCl3 valve closed
5/24/2010	3:00:38 PM	PH3 valve closed
5/24/2010	3:00:38 PM	SiCl4 pre valve closed
5/24/2010	3:00:38 PM	SiCl4 post valve closed
5/24/2010	3:00:38 PM	Main Vac valve closed
5/24/2010	3:00:38 PM	Bypass valve closed
5/24/2010	3:00:38 PM	Bubbler valve closed
5/24/2010	3:00:38 PM	Helium valve opened
5/24/2010	3:00:38 PM	Helium MFC set to  500.000000
5/24/2010	3:00:38 PM	H2 MFC set to  0.000000
5/24/2010	3:00:38 PM	BCl3 MFC set to  0.000000
5/24/2010	3:00:38 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:00:38 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:00:38 PM	Tube furnace set to 80
5/24/2010	3:01:19 PM	Helium valve closed
5/24/2010	3:01:19 PM	H2 valve closed
5/24/2010	3:01:19 PM	BCl3 valve closed
5/24/2010	3:01:19 PM	PH3 valve closed
5/24/2010	3:01:19 PM	SiCl4 pre valve closed
5/24/2010	3:01:19 PM	SiCl4 post valve closed
5/24/2010	3:01:19 PM	Main Vac valve closed
5/24/2010	3:01:19 PM	Bypass valve closed
5/24/2010	3:01:19 PM	Bubbler valve closed
5/24/2010	3:01:19 PM	Helium MFC set to  0.000000
5/24/2010	3:01:19 PM	H2 MFC set to  0.000000
5/24/2010	3:01:19 PM	BCl3 MFC set to  0.000000
5/24/2010	3:01:19 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:01:19 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:01:19 PM	Tube furnace set to 80
5/24/2010	3:01:34 PM	Helium valve closed
5/24/2010	3:01:34 PM	H2 valve closed
5/24/2010	3:01:34 PM	BCl3 valve closed
5/24/2010	3:01:34 PM	PH3 valve closed
5/24/2010	3:01:34 PM	SiCl4 pre valve closed
5/24/2010	3:01:34 PM	SiCl4 post valve closed
5/24/2010	3:01:34 PM	Main Vac valve closed
5/24/2010	3:01:34 PM	Bubbler valve closed
5/24/2010	3:01:34 PM	Bypass valve opened
5/24/2010	3:01:34 PM	Helium MFC set to  0.000000
5/24/2010	3:01:34 PM	H2 MFC set to  0.000000
5/24/2010	3:01:34 PM	BCl3 MFC set to  0.000000
5/24/2010	3:01:34 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:01:34 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:01:34 PM	Tube furnace set to 80
5/24/2010	3:02:00 PM	Helium valve closed
5/24/2010	3:02:00 PM	H2 valve closed
5/24/2010	3:02:00 PM	BCl3 valve closed
5/24/2010	3:02:00 PM	PH3 valve closed
5/24/2010	3:02:00 PM	SiCl4 pre valve closed
5/24/2010	3:02:00 PM	SiCl4 post valve closed
5/24/2010	3:02:00 PM	Bubbler valve closed
5/24/2010	3:02:00 PM	Main Vac valve opened
5/24/2010	3:02:00 PM	Bypass valve opened
5/24/2010	3:02:00 PM	Helium MFC set to  0.000000
5/24/2010	3:02:00 PM	H2 MFC set to  0.000000
5/24/2010	3:02:00 PM	BCl3 MFC set to  0.000000
5/24/2010	3:02:00 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:02:00 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:02:00 PM	Tube furnace set to 80
5/24/2010	3:05:00 PM	Helium valve closed
5/24/2010	3:05:00 PM	H2 valve closed
5/24/2010	3:05:00 PM	BCl3 valve closed
5/24/2010	3:05:00 PM	PH3 valve closed
5/24/2010	3:05:00 PM	SiCl4 pre valve closed
5/24/2010	3:05:00 PM	SiCl4 post valve closed
5/24/2010	3:05:00 PM	Bubbler valve closed
5/24/2010	3:05:00 PM	Main Vac valve opened
5/24/2010	3:05:00 PM	Bypass valve opened
5/24/2010	3:05:00 PM	Helium MFC set to  0.000000
5/24/2010	3:05:00 PM	H2 MFC set to  0.000000
5/24/2010	3:05:00 PM	BCl3 MFC set to  0.000000
5/24/2010	3:05:00 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:05:00 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:05:01 PM	Tube furnace set to 0
5/24/2010	3:05:02 PM	Run finished at 3:05 PM
5/24/2010	3:09:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	3:09:51 PM	Recipe started at 3:09 PM
5/24/2010	3:09:51 PM	H2 valve closed
5/24/2010	3:09:51 PM	BCl3 valve closed
5/24/2010	3:09:51 PM	PH3 valve closed
5/24/2010	3:09:51 PM	SiCl4 pre valve closed
5/24/2010	3:09:51 PM	SiCl4 post valve closed
5/24/2010	3:09:51 PM	Main Vac valve closed
5/24/2010	3:09:51 PM	Bypass valve closed
5/24/2010	3:09:51 PM	Bubbler valve closed
5/24/2010	3:09:51 PM	Helium valve opened
5/24/2010	3:09:51 PM	Helium MFC set to  500.000000
5/24/2010	3:09:51 PM	H2 MFC set to  0.000000
5/24/2010	3:09:51 PM	BCl3 MFC set to  0.000000
5/24/2010	3:09:51 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:09:51 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:09:51 PM	Tube furnace set to 0
5/24/2010	3:10:23 PM	Helium valve closed
5/24/2010	3:10:23 PM	H2 valve closed
5/24/2010	3:10:23 PM	BCl3 valve closed
5/24/2010	3:10:23 PM	PH3 valve closed
5/24/2010	3:10:23 PM	SiCl4 pre valve closed
5/24/2010	3:10:23 PM	SiCl4 post valve closed
5/24/2010	3:10:23 PM	Main Vac valve closed
5/24/2010	3:10:23 PM	Bypass valve closed
5/24/2010	3:10:23 PM	Bubbler valve closed
5/24/2010	3:10:23 PM	Helium MFC set to  0.000000
5/24/2010	3:10:23 PM	H2 MFC set to  0.000000
5/24/2010	3:10:23 PM	BCl3 MFC set to  0.000000
5/24/2010	3:10:23 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:10:23 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:10:24 PM	Tube furnace set to 0
5/24/2010	3:10:24 PM	Run finished at 3:10 PM
5/24/2010	3:10:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	3:10:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	3:10:25 PM	Recipe started at 3:10 PM
5/24/2010	3:10:25 PM	Helium valve closed
5/24/2010	3:10:25 PM	H2 valve closed
5/24/2010	3:10:25 PM	BCl3 valve closed
5/24/2010	3:10:25 PM	PH3 valve closed
5/24/2010	3:10:25 PM	SiCl4 pre valve closed
5/24/2010	3:10:25 PM	SiCl4 post valve closed
5/24/2010	3:10:25 PM	Main Vac valve closed
5/24/2010	3:10:25 PM	Bubbler valve closed
5/24/2010	3:10:25 PM	Bypass valve opened
5/24/2010	3:10:25 PM	Helium MFC set to  0.000000
5/24/2010	3:10:25 PM	H2 MFC set to  0.000000
5/24/2010	3:10:25 PM	BCl3 MFC set to  0.000000
5/24/2010	3:10:25 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:10:25 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:10:25 PM	Tube furnace set to 0
5/24/2010	3:10:49 PM	Helium valve closed
5/24/2010	3:10:49 PM	H2 valve closed
5/24/2010	3:10:49 PM	BCl3 valve closed
5/24/2010	3:10:49 PM	PH3 valve closed
5/24/2010	3:10:49 PM	SiCl4 pre valve closed
5/24/2010	3:10:49 PM	SiCl4 post valve closed
5/24/2010	3:10:49 PM	Bubbler valve closed
5/24/2010	3:10:49 PM	Main Vac valve opened
5/24/2010	3:10:49 PM	Bypass valve opened
5/24/2010	3:10:49 PM	Helium MFC set to  0.000000
5/24/2010	3:10:49 PM	H2 MFC set to  0.000000
5/24/2010	3:10:49 PM	BCl3 MFC set to  0.000000
5/24/2010	3:10:49 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:10:49 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:10:49 PM	Tube furnace set to 0
5/24/2010	3:10:50 PM	Run finished at 3:10 PM
5/24/2010	3:10:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	3:11:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	3:11:47 PM	Recipe started at 3:11 PM
5/24/2010	3:11:47 PM	H2 valve closed
5/24/2010	3:11:47 PM	BCl3 valve closed
5/24/2010	3:11:47 PM	PH3 valve closed
5/24/2010	3:11:47 PM	SiCl4 pre valve closed
5/24/2010	3:11:47 PM	SiCl4 post valve closed
5/24/2010	3:11:47 PM	Main Vac valve closed
5/24/2010	3:11:47 PM	Bypass valve closed
5/24/2010	3:11:47 PM	Bubbler valve closed
5/24/2010	3:11:47 PM	Helium valve opened
5/24/2010	3:11:47 PM	Helium MFC set to  500.000000
5/24/2010	3:11:47 PM	H2 MFC set to  0.000000
5/24/2010	3:11:47 PM	BCl3 MFC set to  0.000000
5/24/2010	3:11:47 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:11:47 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:11:47 PM	Tube furnace set to 0
5/24/2010	3:12:19 PM	Helium valve closed
5/24/2010	3:12:19 PM	H2 valve closed
5/24/2010	3:12:19 PM	BCl3 valve closed
5/24/2010	3:12:19 PM	PH3 valve closed
5/24/2010	3:12:19 PM	SiCl4 pre valve closed
5/24/2010	3:12:19 PM	SiCl4 post valve closed
5/24/2010	3:12:19 PM	Main Vac valve closed
5/24/2010	3:12:19 PM	Bypass valve closed
5/24/2010	3:12:19 PM	Bubbler valve closed
5/24/2010	3:12:19 PM	Helium MFC set to  0.000000
5/24/2010	3:12:19 PM	H2 MFC set to  0.000000
5/24/2010	3:12:19 PM	BCl3 MFC set to  0.000000
5/24/2010	3:12:19 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:12:19 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:12:19 PM	Tube furnace set to 0
5/24/2010	3:12:19 PM	Run finished at 3:12 PM
5/24/2010	3:12:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/24/2010	3:12:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	3:12:21 PM	Recipe started at 3:12 PM
5/24/2010	3:12:21 PM	Helium valve closed
5/24/2010	3:12:21 PM	H2 valve closed
5/24/2010	3:12:21 PM	BCl3 valve closed
5/24/2010	3:12:21 PM	PH3 valve closed
5/24/2010	3:12:21 PM	SiCl4 pre valve closed
5/24/2010	3:12:21 PM	SiCl4 post valve closed
5/24/2010	3:12:21 PM	Main Vac valve closed
5/24/2010	3:12:21 PM	Bubbler valve closed
5/24/2010	3:12:21 PM	Bypass valve opened
5/24/2010	3:12:21 PM	Helium MFC set to  0.000000
5/24/2010	3:12:21 PM	H2 MFC set to  0.000000
5/24/2010	3:12:21 PM	BCl3 MFC set to  0.000000
5/24/2010	3:12:21 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:12:21 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:12:21 PM	Tube furnace set to 0
5/24/2010	3:12:45 PM	Helium valve closed
5/24/2010	3:12:45 PM	H2 valve closed
5/24/2010	3:12:45 PM	BCl3 valve closed
5/24/2010	3:12:45 PM	PH3 valve closed
5/24/2010	3:12:45 PM	SiCl4 pre valve closed
5/24/2010	3:12:45 PM	SiCl4 post valve closed
5/24/2010	3:12:45 PM	Bubbler valve closed
5/24/2010	3:12:45 PM	Main Vac valve opened
5/24/2010	3:12:45 PM	Bypass valve opened
5/24/2010	3:12:45 PM	Helium MFC set to  0.000000
5/24/2010	3:12:45 PM	H2 MFC set to  0.000000
5/24/2010	3:12:45 PM	BCl3 MFC set to  0.000000
5/24/2010	3:12:45 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:12:45 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:12:45 PM	Tube furnace set to 0
5/24/2010	3:12:46 PM	Run finished at 3:12 PM
5/24/2010	3:12:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	3:13:26 PM	Bypass valve closed
5/24/2010	3:13:27 PM	Main Vac valve closed
5/24/2010	3:13:47 PM	Bypass valve opened
5/24/2010	3:13:47 PM	Main Vac valve opened
5/24/2010	3:14:56 PM	Recipe started at 3:14 PM
5/24/2010	3:14:56 PM	Helium valve closed
5/24/2010	3:14:56 PM	BCl3 valve closed
5/24/2010	3:14:56 PM	PH3 valve closed
5/24/2010	3:14:56 PM	SiCl4 pre valve closed
5/24/2010	3:14:56 PM	SiCl4 post valve closed
5/24/2010	3:14:56 PM	Main Vac valve closed
5/24/2010	3:14:56 PM	Bypass valve closed
5/24/2010	3:14:56 PM	Bubbler valve closed
5/24/2010	3:14:56 PM	H2 valve opened
5/24/2010	3:14:56 PM	Helium MFC set to  0.000000
5/24/2010	3:14:56 PM	H2 MFC set to  500.000000
5/24/2010	3:14:56 PM	BCl3 MFC set to  0.000000
5/24/2010	3:14:56 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:14:56 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:14:56 PM	Tube furnace set to 0
5/24/2010	3:16:14 PM	Helium valve closed
5/24/2010	3:16:14 PM	BCl3 valve closed
5/24/2010	3:16:14 PM	PH3 valve closed
5/24/2010	3:16:14 PM	SiCl4 pre valve closed
5/24/2010	3:16:14 PM	SiCl4 post valve closed
5/24/2010	3:16:14 PM	Main Vac valve closed
5/24/2010	3:16:14 PM	Bypass valve closed
5/24/2010	3:16:14 PM	H2 valve opened
5/24/2010	3:16:14 PM	Bubbler valve opened
5/24/2010	3:16:14 PM	Helium MFC set to  0.000000
5/24/2010	3:16:14 PM	H2 MFC set to  500.000000
5/24/2010	3:16:14 PM	BCl3 MFC set to  0.000000
5/24/2010	3:16:14 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:16:14 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:16:14 PM	Tube furnace set to 1000
5/24/2010	3:36:14 PM	Helium valve closed
5/24/2010	3:36:14 PM	PH3 valve closed
5/24/2010	3:36:14 PM	Main Vac valve closed
5/24/2010	3:36:14 PM	Bypass valve closed
5/24/2010	3:36:14 PM	H2 valve opened
5/24/2010	3:36:14 PM	BCl3 valve opened
5/24/2010	3:36:14 PM	SiCl4 pre valve opened
5/24/2010	3:36:14 PM	SiCl4 post valve opened
5/24/2010	3:36:14 PM	Bubbler valve opened
5/24/2010	3:36:14 PM	Helium MFC set to  0.000000
5/24/2010	3:36:14 PM	H2 MFC set to  500.000000
5/24/2010	3:36:14 PM	BCl3 MFC set to  35.000000
5/24/2010	3:36:14 PM	SiCl4 MFC set to  400.000000
5/24/2010	3:36:14 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:36:14 PM	Tube furnace set to 1000
5/24/2010	3:44:14 PM	H2 valve closed
5/24/2010	3:44:14 PM	BCl3 valve closed
5/24/2010	3:44:14 PM	PH3 valve closed
5/24/2010	3:44:14 PM	SiCl4 pre valve closed
5/24/2010	3:44:14 PM	SiCl4 post valve closed
5/24/2010	3:44:14 PM	Main Vac valve closed
5/24/2010	3:44:14 PM	Bypass valve closed
5/24/2010	3:44:14 PM	Helium valve opened
5/24/2010	3:44:14 PM	Bubbler valve opened
5/24/2010	3:44:14 PM	Helium MFC set to  500.000000
5/24/2010	3:44:14 PM	H2 MFC set to  0.000000
5/24/2010	3:44:14 PM	BCl3 MFC set to  0.000000
5/24/2010	3:44:14 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:44:14 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:44:15 PM	Tube furnace set to 0
5/24/2010	3:59:47 PM	Helium valve closed
5/24/2010	3:59:47 PM	H2 valve closed
5/24/2010	3:59:47 PM	BCl3 valve closed
5/24/2010	3:59:47 PM	PH3 valve closed
5/24/2010	3:59:47 PM	SiCl4 pre valve closed
5/24/2010	3:59:47 PM	SiCl4 post valve closed
5/24/2010	3:59:47 PM	Main Vac valve closed
5/24/2010	3:59:47 PM	Bypass valve closed
5/24/2010	3:59:47 PM	Bubbler valve closed
5/24/2010	3:59:47 PM	Helium MFC set to  0.000000
5/24/2010	3:59:47 PM	H2 MFC set to  0.000000
5/24/2010	3:59:47 PM	BCl3 MFC set to  0.000000
5/24/2010	3:59:47 PM	SiCl4 MFC set to  0.000000
5/24/2010	3:59:47 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	3:59:47 PM	Tube furnace set to 0
5/24/2010	3:59:47 PM	Run finished at 3:59 PM
5/24/2010	4:09:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	4:09:54 PM	Recipe started at 4:09 PM
5/24/2010	4:09:54 PM	Helium valve closed
5/24/2010	4:09:54 PM	H2 valve closed
5/24/2010	4:09:54 PM	BCl3 valve closed
5/24/2010	4:09:54 PM	PH3 valve closed
5/24/2010	4:09:54 PM	SiCl4 pre valve closed
5/24/2010	4:09:54 PM	SiCl4 post valve closed
5/24/2010	4:09:54 PM	Main Vac valve closed
5/24/2010	4:09:54 PM	Bubbler valve closed
5/24/2010	4:09:54 PM	Bypass valve opened
5/24/2010	4:09:54 PM	Helium MFC set to  0.000000
5/24/2010	4:09:54 PM	H2 MFC set to  0.000000
5/24/2010	4:09:54 PM	BCl3 MFC set to  0.000000
5/24/2010	4:09:54 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:09:54 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:09:54 PM	Tube furnace set to 0
5/24/2010	4:10:40 PM	Helium valve closed
5/24/2010	4:10:40 PM	H2 valve closed
5/24/2010	4:10:40 PM	BCl3 valve closed
5/24/2010	4:10:40 PM	PH3 valve closed
5/24/2010	4:10:40 PM	SiCl4 pre valve closed
5/24/2010	4:10:40 PM	SiCl4 post valve closed
5/24/2010	4:10:40 PM	Bubbler valve closed
5/24/2010	4:10:40 PM	Main Vac valve opened
5/24/2010	4:10:40 PM	Bypass valve opened
5/24/2010	4:10:40 PM	Helium MFC set to  0.000000
5/24/2010	4:10:40 PM	H2 MFC set to  0.000000
5/24/2010	4:10:40 PM	BCl3 MFC set to  0.000000
5/24/2010	4:10:40 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:10:40 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:10:40 PM	Tube furnace set to 0
5/24/2010	4:10:40 PM	Run finished at 4:10 PM
5/24/2010	4:10:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	4:11:21 PM	Recipe started at 4:11 PM
5/24/2010	4:11:21 PM	H2 valve closed
5/24/2010	4:11:21 PM	BCl3 valve closed
5/24/2010	4:11:21 PM	PH3 valve closed
5/24/2010	4:11:21 PM	SiCl4 pre valve closed
5/24/2010	4:11:21 PM	SiCl4 post valve closed
5/24/2010	4:11:21 PM	Main Vac valve closed
5/24/2010	4:11:21 PM	Bypass valve closed
5/24/2010	4:11:21 PM	Bubbler valve closed
5/24/2010	4:11:21 PM	Helium valve opened
5/24/2010	4:11:21 PM	Helium MFC set to  500.000000
5/24/2010	4:11:21 PM	H2 MFC set to  0.000000
5/24/2010	4:11:21 PM	BCl3 MFC set to  0.000000
5/24/2010	4:11:21 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:11:21 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:11:21 PM	Tube furnace set to 80
5/24/2010	4:12:03 PM	Helium valve closed
5/24/2010	4:12:03 PM	H2 valve closed
5/24/2010	4:12:03 PM	BCl3 valve closed
5/24/2010	4:12:03 PM	PH3 valve closed
5/24/2010	4:12:03 PM	SiCl4 pre valve closed
5/24/2010	4:12:03 PM	SiCl4 post valve closed
5/24/2010	4:12:03 PM	Main Vac valve closed
5/24/2010	4:12:03 PM	Bypass valve closed
5/24/2010	4:12:03 PM	Bubbler valve closed
5/24/2010	4:12:03 PM	Helium MFC set to  0.000000
5/24/2010	4:12:03 PM	H2 MFC set to  0.000000
5/24/2010	4:12:03 PM	BCl3 MFC set to  0.000000
5/24/2010	4:12:03 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:12:03 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:12:03 PM	Tube furnace set to 80
5/24/2010	4:12:18 PM	Helium valve closed
5/24/2010	4:12:18 PM	H2 valve closed
5/24/2010	4:12:18 PM	BCl3 valve closed
5/24/2010	4:12:18 PM	PH3 valve closed
5/24/2010	4:12:18 PM	SiCl4 pre valve closed
5/24/2010	4:12:18 PM	SiCl4 post valve closed
5/24/2010	4:12:18 PM	Main Vac valve closed
5/24/2010	4:12:18 PM	Bubbler valve closed
5/24/2010	4:12:18 PM	Bypass valve opened
5/24/2010	4:12:18 PM	Helium MFC set to  0.000000
5/24/2010	4:12:18 PM	H2 MFC set to  0.000000
5/24/2010	4:12:18 PM	BCl3 MFC set to  0.000000
5/24/2010	4:12:18 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:12:18 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:12:19 PM	Tube furnace set to 80
5/24/2010	4:12:46 PM	Helium valve closed
5/24/2010	4:12:46 PM	H2 valve closed
5/24/2010	4:12:46 PM	BCl3 valve closed
5/24/2010	4:12:46 PM	PH3 valve closed
5/24/2010	4:12:46 PM	SiCl4 pre valve closed
5/24/2010	4:12:46 PM	SiCl4 post valve closed
5/24/2010	4:12:46 PM	Bubbler valve closed
5/24/2010	4:12:46 PM	Main Vac valve opened
5/24/2010	4:12:46 PM	Bypass valve opened
5/24/2010	4:12:46 PM	Helium MFC set to  0.000000
5/24/2010	4:12:46 PM	H2 MFC set to  0.000000
5/24/2010	4:12:46 PM	BCl3 MFC set to  0.000000
5/24/2010	4:12:46 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:12:46 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:12:46 PM	Tube furnace set to 80
5/24/2010	4:15:46 PM	H2 valve closed
5/24/2010	4:15:46 PM	BCl3 valve closed
5/24/2010	4:15:46 PM	PH3 valve closed
5/24/2010	4:15:46 PM	SiCl4 pre valve closed
5/24/2010	4:15:46 PM	SiCl4 post valve closed
5/24/2010	4:15:46 PM	Main Vac valve closed
5/24/2010	4:15:46 PM	Bypass valve closed
5/24/2010	4:15:46 PM	Bubbler valve closed
5/24/2010	4:15:46 PM	Helium valve opened
5/24/2010	4:15:46 PM	Helium MFC set to  500.000000
5/24/2010	4:15:46 PM	H2 MFC set to  0.000000
5/24/2010	4:15:46 PM	BCl3 MFC set to  0.000000
5/24/2010	4:15:46 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:15:46 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:15:46 PM	Tube furnace set to 80
5/24/2010	4:16:27 PM	Helium valve closed
5/24/2010	4:16:27 PM	H2 valve closed
5/24/2010	4:16:27 PM	BCl3 valve closed
5/24/2010	4:16:27 PM	PH3 valve closed
5/24/2010	4:16:27 PM	SiCl4 pre valve closed
5/24/2010	4:16:27 PM	SiCl4 post valve closed
5/24/2010	4:16:27 PM	Main Vac valve closed
5/24/2010	4:16:27 PM	Bypass valve closed
5/24/2010	4:16:27 PM	Bubbler valve closed
5/24/2010	4:16:27 PM	Helium MFC set to  0.000000
5/24/2010	4:16:27 PM	H2 MFC set to  0.000000
5/24/2010	4:16:27 PM	BCl3 MFC set to  0.000000
5/24/2010	4:16:27 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:16:27 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:16:27 PM	Tube furnace set to 80
5/24/2010	4:16:42 PM	Helium valve closed
5/24/2010	4:16:42 PM	H2 valve closed
5/24/2010	4:16:42 PM	BCl3 valve closed
5/24/2010	4:16:42 PM	PH3 valve closed
5/24/2010	4:16:42 PM	SiCl4 pre valve closed
5/24/2010	4:16:42 PM	SiCl4 post valve closed
5/24/2010	4:16:42 PM	Main Vac valve closed
5/24/2010	4:16:42 PM	Bubbler valve closed
5/24/2010	4:16:42 PM	Bypass valve opened
5/24/2010	4:16:42 PM	Helium MFC set to  0.000000
5/24/2010	4:16:42 PM	H2 MFC set to  0.000000
5/24/2010	4:16:42 PM	BCl3 MFC set to  0.000000
5/24/2010	4:16:42 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:16:42 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:16:43 PM	Tube furnace set to 80
5/24/2010	4:17:09 PM	Helium valve closed
5/24/2010	4:17:09 PM	H2 valve closed
5/24/2010	4:17:09 PM	BCl3 valve closed
5/24/2010	4:17:09 PM	PH3 valve closed
5/24/2010	4:17:09 PM	SiCl4 pre valve closed
5/24/2010	4:17:09 PM	SiCl4 post valve closed
5/24/2010	4:17:09 PM	Bubbler valve closed
5/24/2010	4:17:09 PM	Main Vac valve opened
5/24/2010	4:17:09 PM	Bypass valve opened
5/24/2010	4:17:09 PM	Helium MFC set to  0.000000
5/24/2010	4:17:09 PM	H2 MFC set to  0.000000
5/24/2010	4:17:09 PM	BCl3 MFC set to  0.000000
5/24/2010	4:17:09 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:17:09 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:17:09 PM	Tube furnace set to 80
5/24/2010	4:20:09 PM	H2 valve closed
5/24/2010	4:20:09 PM	BCl3 valve closed
5/24/2010	4:20:09 PM	PH3 valve closed
5/24/2010	4:20:09 PM	SiCl4 pre valve closed
5/24/2010	4:20:09 PM	SiCl4 post valve closed
5/24/2010	4:20:09 PM	Main Vac valve closed
5/24/2010	4:20:09 PM	Bypass valve closed
5/24/2010	4:20:09 PM	Bubbler valve closed
5/24/2010	4:20:09 PM	Helium valve opened
5/24/2010	4:20:09 PM	Helium MFC set to  500.000000
5/24/2010	4:20:09 PM	H2 MFC set to  0.000000
5/24/2010	4:20:09 PM	BCl3 MFC set to  0.000000
5/24/2010	4:20:09 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:20:09 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:20:10 PM	Tube furnace set to 80
5/24/2010	4:20:51 PM	Helium valve closed
5/24/2010	4:20:51 PM	H2 valve closed
5/24/2010	4:20:51 PM	BCl3 valve closed
5/24/2010	4:20:51 PM	PH3 valve closed
5/24/2010	4:20:51 PM	SiCl4 pre valve closed
5/24/2010	4:20:51 PM	SiCl4 post valve closed
5/24/2010	4:20:51 PM	Main Vac valve closed
5/24/2010	4:20:51 PM	Bypass valve closed
5/24/2010	4:20:51 PM	Bubbler valve closed
5/24/2010	4:20:51 PM	Helium MFC set to  0.000000
5/24/2010	4:20:51 PM	H2 MFC set to  0.000000
5/24/2010	4:20:51 PM	BCl3 MFC set to  0.000000
5/24/2010	4:20:51 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:20:51 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:20:51 PM	Tube furnace set to 80
5/24/2010	4:21:06 PM	Helium valve closed
5/24/2010	4:21:06 PM	H2 valve closed
5/24/2010	4:21:06 PM	BCl3 valve closed
5/24/2010	4:21:06 PM	PH3 valve closed
5/24/2010	4:21:06 PM	SiCl4 pre valve closed
5/24/2010	4:21:06 PM	SiCl4 post valve closed
5/24/2010	4:21:06 PM	Main Vac valve closed
5/24/2010	4:21:06 PM	Bubbler valve closed
5/24/2010	4:21:06 PM	Bypass valve opened
5/24/2010	4:21:06 PM	Helium MFC set to  0.000000
5/24/2010	4:21:06 PM	H2 MFC set to  0.000000
5/24/2010	4:21:06 PM	BCl3 MFC set to  0.000000
5/24/2010	4:21:06 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:21:06 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:21:06 PM	Tube furnace set to 80
5/24/2010	4:21:33 PM	Helium valve closed
5/24/2010	4:21:33 PM	H2 valve closed
5/24/2010	4:21:33 PM	BCl3 valve closed
5/24/2010	4:21:33 PM	PH3 valve closed
5/24/2010	4:21:33 PM	SiCl4 pre valve closed
5/24/2010	4:21:33 PM	SiCl4 post valve closed
5/24/2010	4:21:33 PM	Bubbler valve closed
5/24/2010	4:21:33 PM	Main Vac valve opened
5/24/2010	4:21:33 PM	Bypass valve opened
5/24/2010	4:21:33 PM	Helium MFC set to  0.000000
5/24/2010	4:21:33 PM	H2 MFC set to  0.000000
5/24/2010	4:21:33 PM	BCl3 MFC set to  0.000000
5/24/2010	4:21:33 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:21:33 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:21:33 PM	Tube furnace set to 80
5/24/2010	4:24:33 PM	Helium valve closed
5/24/2010	4:24:33 PM	H2 valve closed
5/24/2010	4:24:33 PM	BCl3 valve closed
5/24/2010	4:24:33 PM	PH3 valve closed
5/24/2010	4:24:33 PM	SiCl4 pre valve closed
5/24/2010	4:24:33 PM	SiCl4 post valve closed
5/24/2010	4:24:33 PM	Bubbler valve closed
5/24/2010	4:24:33 PM	Main Vac valve opened
5/24/2010	4:24:33 PM	Bypass valve opened
5/24/2010	4:24:33 PM	Helium MFC set to  0.000000
5/24/2010	4:24:33 PM	H2 MFC set to  0.000000
5/24/2010	4:24:33 PM	BCl3 MFC set to  0.000000
5/24/2010	4:24:33 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:24:33 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:24:33 PM	Tube furnace set to 0
5/24/2010	4:24:34 PM	Run finished at 4:24 PM
5/24/2010	4:31:44 PM	Recipe started at 4:31 PM
5/24/2010	4:31:44 PM	H2 valve closed
5/24/2010	4:31:44 PM	BCl3 valve closed
5/24/2010	4:31:44 PM	PH3 valve closed
5/24/2010	4:31:44 PM	SiCl4 pre valve closed
5/24/2010	4:31:44 PM	SiCl4 post valve closed
5/24/2010	4:31:44 PM	Main Vac valve closed
5/24/2010	4:31:44 PM	Bypass valve closed
5/24/2010	4:31:44 PM	Bubbler valve closed
5/24/2010	4:31:44 PM	Helium valve opened
5/24/2010	4:31:44 PM	Helium MFC set to  500.000000
5/24/2010	4:31:44 PM	H2 MFC set to  0.000000
5/24/2010	4:31:44 PM	BCl3 MFC set to  0.000000
5/24/2010	4:31:44 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:31:44 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:31:44 PM	Tube furnace set to 80
5/24/2010	4:32:25 PM	Helium valve closed
5/24/2010	4:32:25 PM	H2 valve closed
5/24/2010	4:32:25 PM	BCl3 valve closed
5/24/2010	4:32:25 PM	PH3 valve closed
5/24/2010	4:32:25 PM	SiCl4 pre valve closed
5/24/2010	4:32:25 PM	SiCl4 post valve closed
5/24/2010	4:32:25 PM	Main Vac valve closed
5/24/2010	4:32:25 PM	Bypass valve closed
5/24/2010	4:32:25 PM	Bubbler valve closed
5/24/2010	4:32:25 PM	Helium MFC set to  0.000000
5/24/2010	4:32:25 PM	H2 MFC set to  0.000000
5/24/2010	4:32:25 PM	BCl3 MFC set to  0.000000
5/24/2010	4:32:25 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:32:25 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:32:25 PM	Tube furnace set to 80
5/24/2010	4:32:40 PM	Helium valve closed
5/24/2010	4:32:40 PM	H2 valve closed
5/24/2010	4:32:40 PM	BCl3 valve closed
5/24/2010	4:32:40 PM	PH3 valve closed
5/24/2010	4:32:40 PM	SiCl4 pre valve closed
5/24/2010	4:32:40 PM	SiCl4 post valve closed
5/24/2010	4:32:40 PM	Main Vac valve closed
5/24/2010	4:32:40 PM	Bubbler valve closed
5/24/2010	4:32:40 PM	Bypass valve opened
5/24/2010	4:32:40 PM	Helium MFC set to  0.000000
5/24/2010	4:32:40 PM	H2 MFC set to  0.000000
5/24/2010	4:32:40 PM	BCl3 MFC set to  0.000000
5/24/2010	4:32:40 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:32:40 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:32:40 PM	Tube furnace set to 80
5/24/2010	4:33:07 PM	Helium valve closed
5/24/2010	4:33:07 PM	H2 valve closed
5/24/2010	4:33:07 PM	BCl3 valve closed
5/24/2010	4:33:07 PM	PH3 valve closed
5/24/2010	4:33:07 PM	SiCl4 pre valve closed
5/24/2010	4:33:07 PM	SiCl4 post valve closed
5/24/2010	4:33:07 PM	Bubbler valve closed
5/24/2010	4:33:07 PM	Main Vac valve opened
5/24/2010	4:33:07 PM	Bypass valve opened
5/24/2010	4:33:07 PM	Helium MFC set to  0.000000
5/24/2010	4:33:07 PM	H2 MFC set to  0.000000
5/24/2010	4:33:07 PM	BCl3 MFC set to  0.000000
5/24/2010	4:33:07 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:33:07 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:33:07 PM	Tube furnace set to 80
5/24/2010	4:36:07 PM	H2 valve closed
5/24/2010	4:36:07 PM	BCl3 valve closed
5/24/2010	4:36:07 PM	PH3 valve closed
5/24/2010	4:36:07 PM	SiCl4 pre valve closed
5/24/2010	4:36:07 PM	SiCl4 post valve closed
5/24/2010	4:36:07 PM	Main Vac valve closed
5/24/2010	4:36:07 PM	Bypass valve closed
5/24/2010	4:36:07 PM	Bubbler valve closed
5/24/2010	4:36:07 PM	Helium valve opened
5/24/2010	4:36:07 PM	Helium MFC set to  500.000000
5/24/2010	4:36:07 PM	H2 MFC set to  0.000000
5/24/2010	4:36:07 PM	BCl3 MFC set to  0.000000
5/24/2010	4:36:07 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:36:07 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:36:08 PM	Tube furnace set to 80
5/24/2010	4:36:49 PM	Helium valve closed
5/24/2010	4:36:49 PM	H2 valve closed
5/24/2010	4:36:49 PM	BCl3 valve closed
5/24/2010	4:36:49 PM	PH3 valve closed
5/24/2010	4:36:49 PM	SiCl4 pre valve closed
5/24/2010	4:36:49 PM	SiCl4 post valve closed
5/24/2010	4:36:49 PM	Main Vac valve closed
5/24/2010	4:36:49 PM	Bypass valve closed
5/24/2010	4:36:49 PM	Bubbler valve closed
5/24/2010	4:36:49 PM	Helium MFC set to  0.000000
5/24/2010	4:36:49 PM	H2 MFC set to  0.000000
5/24/2010	4:36:49 PM	BCl3 MFC set to  0.000000
5/24/2010	4:36:49 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:36:49 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:36:49 PM	Tube furnace set to 80
5/24/2010	4:37:04 PM	Helium valve closed
5/24/2010	4:37:04 PM	H2 valve closed
5/24/2010	4:37:04 PM	BCl3 valve closed
5/24/2010	4:37:04 PM	PH3 valve closed
5/24/2010	4:37:04 PM	SiCl4 pre valve closed
5/24/2010	4:37:04 PM	SiCl4 post valve closed
5/24/2010	4:37:04 PM	Main Vac valve closed
5/24/2010	4:37:04 PM	Bubbler valve closed
5/24/2010	4:37:04 PM	Bypass valve opened
5/24/2010	4:37:04 PM	Helium MFC set to  0.000000
5/24/2010	4:37:04 PM	H2 MFC set to  0.000000
5/24/2010	4:37:04 PM	BCl3 MFC set to  0.000000
5/24/2010	4:37:04 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:37:04 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:37:04 PM	Tube furnace set to 80
5/24/2010	4:37:30 PM	Helium valve closed
5/24/2010	4:37:30 PM	H2 valve closed
5/24/2010	4:37:30 PM	BCl3 valve closed
5/24/2010	4:37:30 PM	PH3 valve closed
5/24/2010	4:37:30 PM	SiCl4 pre valve closed
5/24/2010	4:37:30 PM	SiCl4 post valve closed
5/24/2010	4:37:30 PM	Bubbler valve closed
5/24/2010	4:37:30 PM	Main Vac valve opened
5/24/2010	4:37:30 PM	Bypass valve opened
5/24/2010	4:37:31 PM	Helium MFC set to  0.000000
5/24/2010	4:37:31 PM	H2 MFC set to  0.000000
5/24/2010	4:37:31 PM	BCl3 MFC set to  0.000000
5/24/2010	4:37:31 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:37:31 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:37:31 PM	Tube furnace set to 80
5/24/2010	4:39:41 PM	Run aborted at 4:39 PM
5/24/2010	4:39:41 PM	Helium valve closed
5/24/2010	4:39:41 PM	H2 valve closed
5/24/2010	4:39:41 PM	BCl3 valve closed
5/24/2010	4:39:41 PM	PH3 valve closed
5/24/2010	4:39:41 PM	SiCl4 pre valve closed
5/24/2010	4:39:41 PM	SiCl4 post valve closed
5/24/2010	4:39:41 PM	Bypass valve closed
5/24/2010	4:39:41 PM	Main Vac valve closed
5/24/2010	4:39:41 PM	Bubbler valve closed
5/24/2010	4:39:41 PM	Helium MFC set to  0.000000
5/24/2010	4:39:41 PM	H2 MFC set to  0.000000
5/24/2010	4:39:41 PM	BCl3 MFC set to  0.000000
5/24/2010	4:39:41 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:39:41 PM	Tube furnace set to 0
5/24/2010	4:39:46 PM	Recipe started at 4:39 PM
5/24/2010	4:39:46 PM	H2 valve closed
5/24/2010	4:39:46 PM	BCl3 valve closed
5/24/2010	4:39:46 PM	PH3 valve closed
5/24/2010	4:39:46 PM	SiCl4 pre valve closed
5/24/2010	4:39:46 PM	SiCl4 post valve closed
5/24/2010	4:39:46 PM	Main Vac valve closed
5/24/2010	4:39:46 PM	Bypass valve closed
5/24/2010	4:39:46 PM	Bubbler valve closed
5/24/2010	4:39:46 PM	Helium valve opened
5/24/2010	4:39:46 PM	Helium MFC set to  500.000000
5/24/2010	4:39:46 PM	H2 MFC set to  0.000000
5/24/2010	4:39:46 PM	BCl3 MFC set to  0.000000
5/24/2010	4:39:46 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:39:46 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:39:46 PM	Tube furnace set to 80
5/24/2010	4:40:27 PM	Helium valve closed
5/24/2010	4:40:27 PM	H2 valve closed
5/24/2010	4:40:27 PM	BCl3 valve closed
5/24/2010	4:40:27 PM	PH3 valve closed
5/24/2010	4:40:27 PM	SiCl4 pre valve closed
5/24/2010	4:40:27 PM	SiCl4 post valve closed
5/24/2010	4:40:27 PM	Main Vac valve closed
5/24/2010	4:40:27 PM	Bypass valve closed
5/24/2010	4:40:27 PM	Bubbler valve closed
5/24/2010	4:40:27 PM	Helium MFC set to  0.000000
5/24/2010	4:40:27 PM	H2 MFC set to  0.000000
5/24/2010	4:40:27 PM	BCl3 MFC set to  0.000000
5/24/2010	4:40:27 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:40:27 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:40:27 PM	Tube furnace set to 80
5/24/2010	4:40:42 PM	Helium valve closed
5/24/2010	4:40:42 PM	H2 valve closed
5/24/2010	4:40:42 PM	BCl3 valve closed
5/24/2010	4:40:42 PM	PH3 valve closed
5/24/2010	4:40:42 PM	SiCl4 pre valve closed
5/24/2010	4:40:42 PM	SiCl4 post valve closed
5/24/2010	4:40:42 PM	Main Vac valve closed
5/24/2010	4:40:42 PM	Bubbler valve closed
5/24/2010	4:40:42 PM	Bypass valve opened
5/24/2010	4:40:42 PM	Helium MFC set to  0.000000
5/24/2010	4:40:42 PM	H2 MFC set to  0.000000
5/24/2010	4:40:42 PM	BCl3 MFC set to  0.000000
5/24/2010	4:40:42 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:40:42 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:40:42 PM	Tube furnace set to 80
5/24/2010	4:41:08 PM	Helium valve closed
5/24/2010	4:41:08 PM	H2 valve closed
5/24/2010	4:41:08 PM	BCl3 valve closed
5/24/2010	4:41:08 PM	PH3 valve closed
5/24/2010	4:41:08 PM	SiCl4 pre valve closed
5/24/2010	4:41:08 PM	SiCl4 post valve closed
5/24/2010	4:41:08 PM	Bubbler valve closed
5/24/2010	4:41:08 PM	Main Vac valve opened
5/24/2010	4:41:08 PM	Bypass valve opened
5/24/2010	4:41:08 PM	Helium MFC set to  0.000000
5/24/2010	4:41:08 PM	H2 MFC set to  0.000000
5/24/2010	4:41:08 PM	BCl3 MFC set to  0.000000
5/24/2010	4:41:08 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:41:08 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:41:09 PM	Tube furnace set to 80
5/24/2010	4:44:09 PM	H2 valve closed
5/24/2010	4:44:09 PM	BCl3 valve closed
5/24/2010	4:44:09 PM	PH3 valve closed
5/24/2010	4:44:09 PM	SiCl4 pre valve closed
5/24/2010	4:44:09 PM	SiCl4 post valve closed
5/24/2010	4:44:09 PM	Main Vac valve closed
5/24/2010	4:44:09 PM	Bypass valve closed
5/24/2010	4:44:09 PM	Bubbler valve closed
5/24/2010	4:44:09 PM	Helium valve opened
5/24/2010	4:44:09 PM	Helium MFC set to  500.000000
5/24/2010	4:44:09 PM	H2 MFC set to  0.000000
5/24/2010	4:44:09 PM	BCl3 MFC set to  0.000000
5/24/2010	4:44:09 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:44:09 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:44:09 PM	Tube furnace set to 80
5/24/2010	4:44:50 PM	Helium valve closed
5/24/2010	4:44:50 PM	H2 valve closed
5/24/2010	4:44:50 PM	BCl3 valve closed
5/24/2010	4:44:50 PM	PH3 valve closed
5/24/2010	4:44:50 PM	SiCl4 pre valve closed
5/24/2010	4:44:50 PM	SiCl4 post valve closed
5/24/2010	4:44:50 PM	Main Vac valve closed
5/24/2010	4:44:50 PM	Bypass valve closed
5/24/2010	4:44:50 PM	Bubbler valve closed
5/24/2010	4:44:50 PM	Helium MFC set to  0.000000
5/24/2010	4:44:50 PM	H2 MFC set to  0.000000
5/24/2010	4:44:50 PM	BCl3 MFC set to  0.000000
5/24/2010	4:44:50 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:44:50 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:44:50 PM	Tube furnace set to 80
5/24/2010	4:45:05 PM	Helium valve closed
5/24/2010	4:45:05 PM	H2 valve closed
5/24/2010	4:45:05 PM	BCl3 valve closed
5/24/2010	4:45:05 PM	PH3 valve closed
5/24/2010	4:45:05 PM	SiCl4 pre valve closed
5/24/2010	4:45:05 PM	SiCl4 post valve closed
5/24/2010	4:45:05 PM	Main Vac valve closed
5/24/2010	4:45:05 PM	Bubbler valve closed
5/24/2010	4:45:05 PM	Bypass valve opened
5/24/2010	4:45:05 PM	Helium MFC set to  0.000000
5/24/2010	4:45:05 PM	H2 MFC set to  0.000000
5/24/2010	4:45:05 PM	BCl3 MFC set to  0.000000
5/24/2010	4:45:05 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:45:05 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:45:05 PM	Tube furnace set to 80
5/24/2010	4:45:32 PM	Helium valve closed
5/24/2010	4:45:32 PM	H2 valve closed
5/24/2010	4:45:32 PM	BCl3 valve closed
5/24/2010	4:45:32 PM	PH3 valve closed
5/24/2010	4:45:32 PM	SiCl4 pre valve closed
5/24/2010	4:45:32 PM	SiCl4 post valve closed
5/24/2010	4:45:32 PM	Bubbler valve closed
5/24/2010	4:45:32 PM	Main Vac valve opened
5/24/2010	4:45:32 PM	Bypass valve opened
5/24/2010	4:45:32 PM	Helium MFC set to  0.000000
5/24/2010	4:45:32 PM	H2 MFC set to  0.000000
5/24/2010	4:45:32 PM	BCl3 MFC set to  0.000000
5/24/2010	4:45:32 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:45:32 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:45:32 PM	Tube furnace set to 80
5/24/2010	4:48:32 PM	H2 valve closed
5/24/2010	4:48:32 PM	BCl3 valve closed
5/24/2010	4:48:32 PM	PH3 valve closed
5/24/2010	4:48:32 PM	SiCl4 pre valve closed
5/24/2010	4:48:32 PM	SiCl4 post valve closed
5/24/2010	4:48:32 PM	Main Vac valve closed
5/24/2010	4:48:32 PM	Bypass valve closed
5/24/2010	4:48:32 PM	Bubbler valve closed
5/24/2010	4:48:32 PM	Helium valve opened
5/24/2010	4:48:32 PM	Helium MFC set to  500.000000
5/24/2010	4:48:32 PM	H2 MFC set to  0.000000
5/24/2010	4:48:32 PM	BCl3 MFC set to  0.000000
5/24/2010	4:48:32 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:48:32 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:48:32 PM	Tube furnace set to 80
5/24/2010	4:49:13 PM	Helium valve closed
5/24/2010	4:49:13 PM	H2 valve closed
5/24/2010	4:49:13 PM	BCl3 valve closed
5/24/2010	4:49:13 PM	PH3 valve closed
5/24/2010	4:49:13 PM	SiCl4 pre valve closed
5/24/2010	4:49:13 PM	SiCl4 post valve closed
5/24/2010	4:49:13 PM	Main Vac valve closed
5/24/2010	4:49:13 PM	Bypass valve closed
5/24/2010	4:49:13 PM	Bubbler valve closed
5/24/2010	4:49:13 PM	Helium MFC set to  0.000000
5/24/2010	4:49:13 PM	H2 MFC set to  0.000000
5/24/2010	4:49:13 PM	BCl3 MFC set to  0.000000
5/24/2010	4:49:13 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:49:13 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:49:13 PM	Tube furnace set to 80
5/24/2010	4:49:28 PM	Helium valve closed
5/24/2010	4:49:28 PM	H2 valve closed
5/24/2010	4:49:28 PM	BCl3 valve closed
5/24/2010	4:49:28 PM	PH3 valve closed
5/24/2010	4:49:28 PM	SiCl4 pre valve closed
5/24/2010	4:49:28 PM	SiCl4 post valve closed
5/24/2010	4:49:28 PM	Main Vac valve closed
5/24/2010	4:49:28 PM	Bubbler valve closed
5/24/2010	4:49:28 PM	Bypass valve opened
5/24/2010	4:49:28 PM	Helium MFC set to  0.000000
5/24/2010	4:49:28 PM	H2 MFC set to  0.000000
5/24/2010	4:49:28 PM	BCl3 MFC set to  0.000000
5/24/2010	4:49:28 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:49:28 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:49:28 PM	Tube furnace set to 80
5/24/2010	4:49:55 PM	Helium valve closed
5/24/2010	4:49:55 PM	H2 valve closed
5/24/2010	4:49:55 PM	BCl3 valve closed
5/24/2010	4:49:55 PM	PH3 valve closed
5/24/2010	4:49:55 PM	SiCl4 pre valve closed
5/24/2010	4:49:55 PM	SiCl4 post valve closed
5/24/2010	4:49:55 PM	Bubbler valve closed
5/24/2010	4:49:55 PM	Main Vac valve opened
5/24/2010	4:49:55 PM	Bypass valve opened
5/24/2010	4:49:55 PM	Helium MFC set to  0.000000
5/24/2010	4:49:55 PM	H2 MFC set to  0.000000
5/24/2010	4:49:55 PM	BCl3 MFC set to  0.000000
5/24/2010	4:49:55 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:49:55 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:49:55 PM	Tube furnace set to 80
5/24/2010	4:52:13 PM	Helium valve closed
5/24/2010	4:52:13 PM	H2 valve closed
5/24/2010	4:52:13 PM	BCl3 valve closed
5/24/2010	4:52:13 PM	PH3 valve closed
5/24/2010	4:52:13 PM	SiCl4 pre valve closed
5/24/2010	4:52:13 PM	SiCl4 post valve closed
5/24/2010	4:52:13 PM	Bubbler valve closed
5/24/2010	4:52:13 PM	Main Vac valve opened
5/24/2010	4:52:13 PM	Bypass valve opened
5/24/2010	4:52:13 PM	Helium MFC set to  0.000000
5/24/2010	4:52:13 PM	H2 MFC set to  0.000000
5/24/2010	4:52:13 PM	BCl3 MFC set to  0.000000
5/24/2010	4:52:13 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:52:13 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:52:13 PM	Tube furnace set to 0
5/24/2010	4:52:14 PM	Run finished at 4:52 PM
5/24/2010	4:52:44 PM	Recipe started at 4:52 PM
5/24/2010	4:52:44 PM	H2 valve closed
5/24/2010	4:52:44 PM	BCl3 valve closed
5/24/2010	4:52:44 PM	PH3 valve closed
5/24/2010	4:52:44 PM	SiCl4 pre valve closed
5/24/2010	4:52:44 PM	SiCl4 post valve closed
5/24/2010	4:52:44 PM	Main Vac valve closed
5/24/2010	4:52:44 PM	Bypass valve closed
5/24/2010	4:52:44 PM	Bubbler valve closed
5/24/2010	4:52:44 PM	Helium valve opened
5/24/2010	4:52:44 PM	Helium MFC set to  500.000000
5/24/2010	4:52:44 PM	H2 MFC set to  0.000000
5/24/2010	4:52:44 PM	BCl3 MFC set to  0.000000
5/24/2010	4:52:44 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:52:44 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:52:44 PM	Tube furnace set to 80
5/24/2010	4:53:25 PM	Helium valve closed
5/24/2010	4:53:25 PM	H2 valve closed
5/24/2010	4:53:25 PM	BCl3 valve closed
5/24/2010	4:53:25 PM	PH3 valve closed
5/24/2010	4:53:25 PM	SiCl4 pre valve closed
5/24/2010	4:53:25 PM	SiCl4 post valve closed
5/24/2010	4:53:25 PM	Main Vac valve closed
5/24/2010	4:53:25 PM	Bypass valve closed
5/24/2010	4:53:25 PM	Bubbler valve closed
5/24/2010	4:53:25 PM	Helium MFC set to  0.000000
5/24/2010	4:53:25 PM	H2 MFC set to  0.000000
5/24/2010	4:53:25 PM	BCl3 MFC set to  0.000000
5/24/2010	4:53:25 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:53:25 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:53:25 PM	Tube furnace set to 80
5/24/2010	4:53:40 PM	Helium valve closed
5/24/2010	4:53:40 PM	H2 valve closed
5/24/2010	4:53:40 PM	BCl3 valve closed
5/24/2010	4:53:40 PM	PH3 valve closed
5/24/2010	4:53:40 PM	SiCl4 pre valve closed
5/24/2010	4:53:40 PM	SiCl4 post valve closed
5/24/2010	4:53:40 PM	Main Vac valve closed
5/24/2010	4:53:40 PM	Bubbler valve closed
5/24/2010	4:53:40 PM	Bypass valve opened
5/24/2010	4:53:40 PM	Helium MFC set to  0.000000
5/24/2010	4:53:40 PM	H2 MFC set to  0.000000
5/24/2010	4:53:40 PM	BCl3 MFC set to  0.000000
5/24/2010	4:53:40 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:53:40 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:53:40 PM	Tube furnace set to 80
5/24/2010	4:54:07 PM	Helium valve closed
5/24/2010	4:54:07 PM	H2 valve closed
5/24/2010	4:54:07 PM	BCl3 valve closed
5/24/2010	4:54:07 PM	PH3 valve closed
5/24/2010	4:54:07 PM	SiCl4 pre valve closed
5/24/2010	4:54:07 PM	SiCl4 post valve closed
5/24/2010	4:54:07 PM	Bubbler valve closed
5/24/2010	4:54:07 PM	Main Vac valve opened
5/24/2010	4:54:07 PM	Bypass valve opened
5/24/2010	4:54:07 PM	Helium MFC set to  0.000000
5/24/2010	4:54:07 PM	H2 MFC set to  0.000000
5/24/2010	4:54:07 PM	BCl3 MFC set to  0.000000
5/24/2010	4:54:07 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:54:07 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:54:07 PM	Tube furnace set to 80
5/24/2010	4:57:07 PM	H2 valve closed
5/24/2010	4:57:07 PM	BCl3 valve closed
5/24/2010	4:57:07 PM	PH3 valve closed
5/24/2010	4:57:07 PM	SiCl4 pre valve closed
5/24/2010	4:57:07 PM	SiCl4 post valve closed
5/24/2010	4:57:07 PM	Main Vac valve closed
5/24/2010	4:57:07 PM	Bypass valve closed
5/24/2010	4:57:07 PM	Bubbler valve closed
5/24/2010	4:57:07 PM	Helium valve opened
5/24/2010	4:57:07 PM	Helium MFC set to  500.000000
5/24/2010	4:57:07 PM	H2 MFC set to  0.000000
5/24/2010	4:57:07 PM	BCl3 MFC set to  0.000000
5/24/2010	4:57:07 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:57:07 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:57:07 PM	Tube furnace set to 80
5/24/2010	4:57:48 PM	Helium valve closed
5/24/2010	4:57:48 PM	H2 valve closed
5/24/2010	4:57:48 PM	BCl3 valve closed
5/24/2010	4:57:48 PM	PH3 valve closed
5/24/2010	4:57:48 PM	SiCl4 pre valve closed
5/24/2010	4:57:48 PM	SiCl4 post valve closed
5/24/2010	4:57:48 PM	Main Vac valve closed
5/24/2010	4:57:48 PM	Bypass valve closed
5/24/2010	4:57:48 PM	Bubbler valve closed
5/24/2010	4:57:48 PM	Helium MFC set to  0.000000
5/24/2010	4:57:48 PM	H2 MFC set to  0.000000
5/24/2010	4:57:48 PM	BCl3 MFC set to  0.000000
5/24/2010	4:57:48 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:57:48 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:57:48 PM	Tube furnace set to 80
5/24/2010	4:58:03 PM	Helium valve closed
5/24/2010	4:58:03 PM	H2 valve closed
5/24/2010	4:58:03 PM	BCl3 valve closed
5/24/2010	4:58:03 PM	PH3 valve closed
5/24/2010	4:58:03 PM	SiCl4 pre valve closed
5/24/2010	4:58:03 PM	SiCl4 post valve closed
5/24/2010	4:58:03 PM	Main Vac valve closed
5/24/2010	4:58:03 PM	Bubbler valve closed
5/24/2010	4:58:03 PM	Bypass valve opened
5/24/2010	4:58:03 PM	Helium MFC set to  0.000000
5/24/2010	4:58:03 PM	H2 MFC set to  0.000000
5/24/2010	4:58:03 PM	BCl3 MFC set to  0.000000
5/24/2010	4:58:03 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:58:03 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:58:03 PM	Tube furnace set to 80
5/24/2010	4:58:30 PM	Helium valve closed
5/24/2010	4:58:30 PM	H2 valve closed
5/24/2010	4:58:30 PM	BCl3 valve closed
5/24/2010	4:58:30 PM	PH3 valve closed
5/24/2010	4:58:30 PM	SiCl4 pre valve closed
5/24/2010	4:58:30 PM	SiCl4 post valve closed
5/24/2010	4:58:30 PM	Bubbler valve closed
5/24/2010	4:58:30 PM	Main Vac valve opened
5/24/2010	4:58:30 PM	Bypass valve opened
5/24/2010	4:58:30 PM	Helium MFC set to  0.000000
5/24/2010	4:58:30 PM	H2 MFC set to  0.000000
5/24/2010	4:58:30 PM	BCl3 MFC set to  0.000000
5/24/2010	4:58:30 PM	SiCl4 MFC set to  0.000000
5/24/2010	4:58:30 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	4:58:30 PM	Tube furnace set to 80
5/24/2010	5:01:30 PM	H2 valve closed
5/24/2010	5:01:30 PM	BCl3 valve closed
5/24/2010	5:01:30 PM	PH3 valve closed
5/24/2010	5:01:30 PM	SiCl4 pre valve closed
5/24/2010	5:01:30 PM	SiCl4 post valve closed
5/24/2010	5:01:30 PM	Main Vac valve closed
5/24/2010	5:01:30 PM	Bypass valve closed
5/24/2010	5:01:30 PM	Bubbler valve closed
5/24/2010	5:01:30 PM	Helium valve opened
5/24/2010	5:01:30 PM	Helium MFC set to  500.000000
5/24/2010	5:01:30 PM	H2 MFC set to  0.000000
5/24/2010	5:01:30 PM	BCl3 MFC set to  0.000000
5/24/2010	5:01:30 PM	SiCl4 MFC set to  0.000000
5/24/2010	5:01:30 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:01:30 PM	Tube furnace set to 80
5/24/2010	5:02:12 PM	Helium valve closed
5/24/2010	5:02:12 PM	H2 valve closed
5/24/2010	5:02:12 PM	BCl3 valve closed
5/24/2010	5:02:12 PM	PH3 valve closed
5/24/2010	5:02:12 PM	SiCl4 pre valve closed
5/24/2010	5:02:12 PM	SiCl4 post valve closed
5/24/2010	5:02:12 PM	Main Vac valve closed
5/24/2010	5:02:12 PM	Bypass valve closed
5/24/2010	5:02:12 PM	Bubbler valve closed
5/24/2010	5:02:12 PM	Helium MFC set to  0.000000
5/24/2010	5:02:12 PM	H2 MFC set to  0.000000
5/24/2010	5:02:12 PM	BCl3 MFC set to  0.000000
5/24/2010	5:02:12 PM	SiCl4 MFC set to  0.000000
5/24/2010	5:02:12 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:02:12 PM	Tube furnace set to 80
5/24/2010	5:02:27 PM	Helium valve closed
5/24/2010	5:02:27 PM	H2 valve closed
5/24/2010	5:02:27 PM	BCl3 valve closed
5/24/2010	5:02:27 PM	PH3 valve closed
5/24/2010	5:02:27 PM	SiCl4 pre valve closed
5/24/2010	5:02:27 PM	SiCl4 post valve closed
5/24/2010	5:02:27 PM	Main Vac valve closed
5/24/2010	5:02:27 PM	Bubbler valve closed
5/24/2010	5:02:27 PM	Bypass valve opened
5/24/2010	5:02:27 PM	Helium MFC set to  0.000000
5/24/2010	5:02:27 PM	H2 MFC set to  0.000000
5/24/2010	5:02:27 PM	BCl3 MFC set to  0.000000
5/24/2010	5:02:27 PM	SiCl4 MFC set to  0.000000
5/24/2010	5:02:27 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:02:27 PM	Tube furnace set to 80
5/24/2010	5:02:54 PM	Helium valve closed
5/24/2010	5:02:54 PM	H2 valve closed
5/24/2010	5:02:54 PM	BCl3 valve closed
5/24/2010	5:02:54 PM	PH3 valve closed
5/24/2010	5:02:54 PM	SiCl4 pre valve closed
5/24/2010	5:02:54 PM	SiCl4 post valve closed
5/24/2010	5:02:54 PM	Bubbler valve closed
5/24/2010	5:02:54 PM	Main Vac valve opened
5/24/2010	5:02:54 PM	Bypass valve opened
5/24/2010	5:02:54 PM	Helium MFC set to  0.000000
5/24/2010	5:02:54 PM	H2 MFC set to  0.000000
5/24/2010	5:02:54 PM	BCl3 MFC set to  0.000000
5/24/2010	5:02:54 PM	SiCl4 MFC set to  0.000000
5/24/2010	5:02:54 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:02:54 PM	Tube furnace set to 80
5/24/2010	5:05:54 PM	Helium valve closed
5/24/2010	5:05:54 PM	H2 valve closed
5/24/2010	5:05:54 PM	BCl3 valve closed
5/24/2010	5:05:54 PM	PH3 valve closed
5/24/2010	5:05:54 PM	SiCl4 pre valve closed
5/24/2010	5:05:54 PM	SiCl4 post valve closed
5/24/2010	5:05:54 PM	Bubbler valve closed
5/24/2010	5:05:54 PM	Main Vac valve opened
5/24/2010	5:05:54 PM	Bypass valve opened
5/24/2010	5:05:54 PM	Helium MFC set to  0.000000
5/24/2010	5:05:54 PM	H2 MFC set to  0.000000
5/24/2010	5:05:54 PM	BCl3 MFC set to  0.000000
5/24/2010	5:05:54 PM	SiCl4 MFC set to  0.000000
5/24/2010	5:05:54 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:05:54 PM	Tube furnace set to 0
5/24/2010	5:05:55 PM	Run finished at 5:05 PM
5/24/2010	5:20:12 PM	Bypass valve closed
5/24/2010	5:20:12 PM	Main Vac valve closed
5/24/2010	5:20:38 PM	Bypass valve opened
5/24/2010	5:20:39 PM	Main Vac valve opened
5/24/2010	5:21:12 PM	Recipe started at 5:21 PM
5/24/2010	5:21:12 PM	Helium valve closed
5/24/2010	5:21:12 PM	BCl3 valve closed
5/24/2010	5:21:12 PM	PH3 valve closed
5/24/2010	5:21:12 PM	SiCl4 pre valve closed
5/24/2010	5:21:12 PM	SiCl4 post valve closed
5/24/2010	5:21:12 PM	Main Vac valve closed
5/24/2010	5:21:12 PM	Bypass valve closed
5/24/2010	5:21:12 PM	Bubbler valve closed
5/24/2010	5:21:12 PM	H2 valve opened
5/24/2010	5:21:12 PM	Helium MFC set to  0.000000
5/24/2010	5:21:12 PM	H2 MFC set to  500.000000
5/24/2010	5:21:12 PM	BCl3 MFC set to  0.000000
5/24/2010	5:21:12 PM	SiCl4 MFC set to  0.000000
5/24/2010	5:21:12 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:21:12 PM	Tube furnace set to 0
5/24/2010	5:22:31 PM	Helium valve closed
5/24/2010	5:22:31 PM	BCl3 valve closed
5/24/2010	5:22:31 PM	PH3 valve closed
5/24/2010	5:22:31 PM	SiCl4 pre valve closed
5/24/2010	5:22:31 PM	SiCl4 post valve closed
5/24/2010	5:22:31 PM	Main Vac valve closed
5/24/2010	5:22:31 PM	Bypass valve closed
5/24/2010	5:22:31 PM	H2 valve opened
5/24/2010	5:22:31 PM	Bubbler valve opened
5/24/2010	5:22:31 PM	Helium MFC set to  0.000000
5/24/2010	5:22:31 PM	H2 MFC set to  500.000000
5/24/2010	5:22:31 PM	BCl3 MFC set to  0.000000
5/24/2010	5:22:31 PM	SiCl4 MFC set to  0.000000
5/24/2010	5:22:31 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:22:31 PM	Tube furnace set to 1000
5/24/2010	5:42:31 PM	Helium valve closed
5/24/2010	5:42:31 PM	PH3 valve closed
5/24/2010	5:42:31 PM	Main Vac valve closed
5/24/2010	5:42:31 PM	Bypass valve closed
5/24/2010	5:42:31 PM	H2 valve opened
5/24/2010	5:42:31 PM	BCl3 valve opened
5/24/2010	5:42:31 PM	SiCl4 pre valve opened
5/24/2010	5:42:31 PM	SiCl4 post valve opened
5/24/2010	5:42:31 PM	Bubbler valve opened
5/24/2010	5:42:31 PM	Helium MFC set to  0.000000
5/24/2010	5:42:31 PM	H2 MFC set to  500.000000
5/24/2010	5:42:31 PM	BCl3 MFC set to  35.000000
5/24/2010	5:42:31 PM	SiCl4 MFC set to  500.000000
5/24/2010	5:42:31 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:42:32 PM	Tube furnace set to 1000
5/24/2010	5:50:32 PM	H2 valve closed
5/24/2010	5:50:32 PM	BCl3 valve closed
5/24/2010	5:50:32 PM	PH3 valve closed
5/24/2010	5:50:32 PM	SiCl4 pre valve closed
5/24/2010	5:50:32 PM	SiCl4 post valve closed
5/24/2010	5:50:32 PM	Main Vac valve closed
5/24/2010	5:50:32 PM	Bypass valve closed
5/24/2010	5:50:32 PM	Helium valve opened
5/24/2010	5:50:32 PM	Bubbler valve opened
5/24/2010	5:50:32 PM	Helium MFC set to  500.000000
5/24/2010	5:50:32 PM	H2 MFC set to  0.000000
5/24/2010	5:50:32 PM	BCl3 MFC set to  0.000000
5/24/2010	5:50:32 PM	SiCl4 MFC set to  0.000000
5/24/2010	5:50:32 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	5:50:32 PM	Tube furnace set to 0
5/24/2010	6:07:16 PM	Helium valve closed
5/24/2010	6:07:16 PM	H2 valve closed
5/24/2010	6:07:16 PM	BCl3 valve closed
5/24/2010	6:07:16 PM	PH3 valve closed
5/24/2010	6:07:16 PM	SiCl4 pre valve closed
5/24/2010	6:07:16 PM	SiCl4 post valve closed
5/24/2010	6:07:16 PM	Main Vac valve closed
5/24/2010	6:07:16 PM	Bypass valve closed
5/24/2010	6:07:16 PM	Bubbler valve closed
5/24/2010	6:07:16 PM	Helium MFC set to  0.000000
5/24/2010	6:07:16 PM	H2 MFC set to  0.000000
5/24/2010	6:07:16 PM	BCl3 MFC set to  0.000000
5/24/2010	6:07:16 PM	SiCl4 MFC set to  0.000000
5/24/2010	6:07:16 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	6:07:16 PM	Tube furnace set to 0
5/24/2010	6:07:16 PM	Run finished at 6:07 PM
5/24/2010	6:08:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	6:08:46 PM	Recipe started at 6:08 PM
5/24/2010	6:08:46 PM	Helium valve closed
5/24/2010	6:08:46 PM	H2 valve closed
5/24/2010	6:08:46 PM	BCl3 valve closed
5/24/2010	6:08:46 PM	PH3 valve closed
5/24/2010	6:08:46 PM	SiCl4 pre valve closed
5/24/2010	6:08:46 PM	SiCl4 post valve closed
5/24/2010	6:08:46 PM	Main Vac valve closed
5/24/2010	6:08:46 PM	Bubbler valve closed
5/24/2010	6:08:46 PM	Bypass valve opened
5/24/2010	6:08:46 PM	Helium MFC set to  0.000000
5/24/2010	6:08:46 PM	H2 MFC set to  0.000000
5/24/2010	6:08:46 PM	BCl3 MFC set to  0.000000
5/24/2010	6:08:46 PM	SiCl4 MFC set to  0.000000
5/24/2010	6:08:46 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	6:08:46 PM	Tube furnace set to 0
5/24/2010	6:09:31 PM	Helium valve closed
5/24/2010	6:09:31 PM	H2 valve closed
5/24/2010	6:09:31 PM	BCl3 valve closed
5/24/2010	6:09:31 PM	PH3 valve closed
5/24/2010	6:09:31 PM	SiCl4 pre valve closed
5/24/2010	6:09:31 PM	SiCl4 post valve closed
5/24/2010	6:09:31 PM	Bubbler valve closed
5/24/2010	6:09:31 PM	Main Vac valve opened
5/24/2010	6:09:31 PM	Bypass valve opened
5/24/2010	6:09:31 PM	Helium MFC set to  0.000000
5/24/2010	6:09:31 PM	H2 MFC set to  0.000000
5/24/2010	6:09:31 PM	BCl3 MFC set to  0.000000
5/24/2010	6:09:31 PM	SiCl4 MFC set to  0.000000
5/24/2010	6:09:31 PM	Bypass solenoid MFC set to  0.000000
5/24/2010	6:09:31 PM	Tube furnace set to 0
5/24/2010	6:09:31 PM	Run finished at 6:09 PM
5/24/2010	6:09:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/24/2010	6:33:50 PM	Program exited cleanly
5/24/2010	6:45:34 PM	Program started normally
5/24/2010	6:45:34 PM	Helium valve closed
5/24/2010	6:45:34 PM	H2 valve closed
5/24/2010	6:45:34 PM	BCl3 valve closed
5/24/2010	6:45:34 PM	PH3 valve closed
5/24/2010	6:45:34 PM	SiCl4 pre valve closed
5/24/2010	6:45:34 PM	SiCl4 post valve closed
5/24/2010	6:45:34 PM	Main Vac valve closed
5/24/2010	6:45:34 PM	Bypass valve closed
5/24/2010	6:45:34 PM	Bubbler valve closed
5/24/2010	6:45:34 PM	Helium MFC set to  0.000000
5/24/2010	6:45:34 PM	H2 MFC set to  0.000000
5/24/2010	6:45:34 PM	BCl3 MFC set to  0.000000
5/24/2010	6:45:34 PM	SiCl4 MFC set to  0.000000
5/24/2010	6:45:34 PM	Bypass solenoid MFC set to  760.000000
5/24/2010	6:45:34 PM	Tube furnace set to 0
5/24/2010	6:45:35 PM	Bypass valve opened
5/24/2010	6:45:36 PM	Main Vac valve opened
5/24/2010	6:45:36 PM	Main Vac valve closed
5/24/2010	6:45:36 PM	Main Vac valve opened
5/24/2010	6:45:48 PM	SiCl4 MFC set to  100.000000
5/24/2010	6:45:55 PM	SiCl4 MFC set to  500.000000
5/24/2010	6:46:49 PM	SiCl4 MFC set to  0.000000
5/24/2010	6:47:25 PM	Program exited cleanly
5/24/2010	6:59:51 PM	Program started normally
5/24/2010	6:59:51 PM	Helium valve closed
5/24/2010	6:59:51 PM	H2 valve closed
5/24/2010	6:59:51 PM	BCl3 valve closed
5/24/2010	6:59:51 PM	PH3 valve closed
5/24/2010	6:59:51 PM	SiCl4 pre valve closed
5/24/2010	6:59:51 PM	SiCl4 post valve closed
5/24/2010	6:59:51 PM	Main Vac valve closed
5/24/2010	6:59:51 PM	Bypass valve closed
5/24/2010	6:59:51 PM	Bubbler valve closed
5/24/2010	6:59:51 PM	Helium MFC set to  0.000000
5/24/2010	6:59:51 PM	H2 MFC set to  0.000000
5/24/2010	6:59:51 PM	BCl3 MFC set to  0.000000
5/24/2010	6:59:51 PM	SiCl4 MFC set to  0.000000
5/24/2010	6:59:51 PM	Bypass solenoid MFC set to  760.000000
5/24/2010	6:59:52 PM	Tube furnace set to 0
5/24/2010	6:59:52 PM	Bypass valve opened
5/24/2010	6:59:53 PM	Main Vac valve opened
5/24/2010	7:00:11 PM	PH3 valve opened
